US5099310A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Substrate for semiconductor apparatus
Assignee: Sumitomo Electric Industries Ltd
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Filing: 1989-01-17
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Granted: 1992-03-24
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Expires: 2009-01-17
Abstract
Abstract This invention relates to a substrate for semiconductor apparatus loading a semiconductor chip in integrated circuit apparatus and is characterized in that a sintered compact containing copper of 2 to 30 wt. % in tungsten and/or molybdenum is used as the substrate having the heat radiation capable of efficiently radiating heat developed from the loaded semiconductor chip and thermal expansion coefficient similar to those of semiconductor chip and other enclosure material except for the substrate.
Inventors
- 👤 Mituo Osada
- 👤 Yoshinari Amano
- 👤 Nobuo Ogasa
- 👤 Akira Ohtusuka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 17:10
CPC Classifications
B; B22; B22F; B22F3/00; B22F3/24; H; H10; H10W; H10W40/00; H10W40/20; H10W40/25; H10W40/257; H10W70/00; H10W70/60; H10W70/67; H10W70/68; H10W70/6875; H10W72/00; H10W72/071; H10W72/073; H10W72/07331; H10W72/07337; H10W72/30; H10W72/321; H10W72/325; H10W72/351; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/4913; Y10T428/00; Y10T428/12; Y10T428/12014; Y10T428/12028; Y10T428/12049; Y10T428/12056; Y10T428/12493
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
100 words
An IC package for housing a semiconductor comprising a substrate and an enclosure base material made of Al 2 O 3 , said substrate consisting essentially of a material containing copper and at least one of tungsten and molybdenum, said material being produced by pressing and sintering at least one of tungsten and molybdenum powders to form a sintered compact, said sintered compact being infiltrated with molten copper at 10-30 weight percent, the thermal expansion coefficient of said substrate being in the range of 5.2 to 9.7×10 -6 /°C. and the thermal conductivity being at least 0.35 cal/cm. sec. °C.
Claim 2
Dependent Claim
100 words
An IC package for housing a semiconductor comprising a substrate and an enclosure base material made of Al 2 O 3 , said substrate consisting essentially of a material containing copper and at least one of tungsten and molybdenum, said material being produced by pressing and sintering at least one of tungsten and molybdenum powders to form a sintered compact, said sintered compact being infiltrated with molten copper at 10-30 weight percent, the thermal expansion coefficient of said substrate being in the range of 5.2 to 9.7×10 -6 /°C. and the thermal conductivity being at least 0.35 cal/cm. sec. °C.
Claim 3
Dependent Claim
18 words
The IC package according to claim 1 wherein said sintering and infiltration are performed in a hydrogen atmosphere.
Claim 4
Dependent Claim
115 words
An IC package for housing a semiconductor comprising a substrate and an enclosure base material made of Al 2 O 3 , said substrate consisting essentially of a material containing copper and at least one of tungsten and molybdenum, said material being produced by pressing and sintering a uniform mixture of at least one of tungsten and molybdenum powders with not more than 20 weight percent of iron group metal powders to form a sintered compact, said sintered compact being infiltrated with molten copper at 10-30 weight percent, the thermal expansion coefficient of said substrate being in the range of 5.2 to 9.7×10 -6 /°C. and thermal conductivity being at least 0.35 cal/cm. sec. °C.
Claim 5
Dependent Claim
115 words
An IC package for housing a semiconductor comprising a substrate and an enclosure base material made of Al 2 O 3 , said substrate consisting essentially of a material containing copper and at least one of tungsten and molybdenum, said material being produced by pressing and sintering a uniform mixture of at least one of tungsten and molybdenum powders with not more than 20 weight percent of iron group metal powders to form a sintered compact, said sintered compact being infiltrated with molten copper at 10-30 weight percent, the thermal expansion coefficient of said substrate being in the range of 5.2 to 9.7×10 -6 /°C. and thermal conductivity being at least 0.35 cal/cm. sec. °C.
Claim 6
Dependent Claim
18 words
The IC package according to claim 3 wherein said sintering and infiltration are performed in a hydrogen atmosphere.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-03-24 | 1995-09-23 | 1996-03-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-03-24 | 1999-09-23 | 2000-03-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-03-24 | 2003-09-23 | 2004-03-24 | $7700.00 | Window Closed / Lapsed |