High speed wafer handler

Claim 1

An arrangement for transferring wafers from atmosphere into and out of a vacuum system comprising (a) a main vacuum chamber having an opening, and (b) pressure transition means disposed at said opening for introducing wafers from atmosphere into and out of said main vacuum chamber with minimal loss of vacuum from said main vacuum chamber, said pressure transition means including (i) outer cover means disposed at said opening for sealingly closing said opening, said outer cover means being movable outwardly from said opening by a small distance, (ii) platform means disposed interiorly of said outer cover means for receiving said wafers at a surface, said platform means including an inflatable elastomer seal disposed below said surface of said platform means, said inflatable elastomer seal being expanded before outward movement of said outer cover means to seal said main vacuum chamber from said atmosphere, (iii) isolation means disposed about said opening for limiting said outward movement of said outer cover means to said small distance and for minimizing atmospheric exposure upon said outward movement of said outer cover means, (iv) elevator means for moving said platform means to a first position within said main vacuum chamber upon sealingly closing said opening by said outer cover means, and (v) transfer means for rotatably transferring at least one wafer between said platform means and said main vacuum chamber, said transfer means having arm means for picking up said wafers from said platform means at said first position and for rotating picked up wafers to a second position within said main vacuum chamber, said arm means returning wafers from said second position to said platform means upon continuing rotation.