US5097793A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Thin film vacuum evaporation device
Assignee: Mitsubishi Electric Corp
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Filing: 1990-04-24
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Granted: 1992-03-24
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Expires: 2010-04-24
Abstract
Abstract A thin film vacuum evaporation device having a reaction gas supplier for locally supplying a reaction gas to the evaporating point on a target. The device includes a reaction chamber that can be kept under vacuum with a light transmitting window disposed therein allowing the passage of a laser beam on the target. Also, a differential pressure chamber may be provided between the target and the light transmitting window, and a gas introducing section may be connected to the differential pressure chamber. Thus, the vapor generated by the target is prevented from adhering to the light transmitting window, and the light transmitting window can be kept clean.
Inventors
- 👤 Akira Shuhara
- 👤 Kazuhiro Oka
- 👤 Takeshi Morita
- 👤 Megumi Ohmine
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 22:25
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
103 words
A thin film vacuum evaporation device, comprising: a reaction chamber having a light transmitting window; discharging means connected to said reaction chamber for keeping a vacuum in said reaction chamber; a target held in said reaction chamber; light beam directing means for directing a beam of light to a light beam focusing position on said target through said light transmitting window to evaporate a part of said target; a member held in said reaction chamber, on which evaporated material from said target is deposited; and gas supplying means for locally supplying a reaction gas to said light beam focusing position on said target.
Claim 2
Dependent Claim
103 words
A thin film vacuum evaporation device, comprising: a reaction chamber having a light transmitting window; discharging means connected to said reaction chamber for keeping a vacuum in said reaction chamber; a target held in said reaction chamber; light beam directing means for directing a beam of light to a light beam focusing position on said target through said light transmitting window to evaporate a part of said target; a member held in said reaction chamber, on which evaporated material from said target is deposited; and gas supplying means for locally supplying a reaction gas to said light beam focusing position on said target.
Claim 3
Dependent Claim
63 words
A device according to claim 1, wherein said gas supplying means includes: a nozzle member attached inside said reaction chamber to cover said light transmitting window and having an orifice, positioned on an optical path of the light beam, of size sufficient to pass the light beam through the orifice; and gas introducing means for supplying a reaction gas into said nozzle member.
Claim 4
Dependent Claim
19 words
A device according to claim 2, wherein said orifice is formed by a member attached to said nozzle member.
Claim 5
Dependent Claim
32 words
A device according to claim 2, wherein the inner diameter of said orifice gradually becomes smaller from a point closer to said light transmitting window to the end closer to said target.
Claim 6
Dependent Claim
29 words
A device according to claim 1, wherein said gas supplying means has a gas ejecting outlet provided in a position other than an optical path of the light beam.
Claim 7
Dependent Claim
137 words
A thin film vacuum evaporation device, comprising: a reaction chamber having a light transmitting window; discharging means connected to said reaction chamber for keeping a vacuum in said reaction chamber; a target held in said reaction chamber; light beam directing means for directing a beam of light to said target through said light transmitting window to evaporate a part of said target; a member held in said reaction chamber, on which evaporated material from said target is deposited; a differential pressure chamber enclosed by a partition wall formed to cover said light transmitting window within said reaction chamber and provided with an orifice, positioned on an optical path of the light beam, of size sufficient to pass the beam of light through the orifice; and gas introducing means for introducing a gas into said differential pressure chamber.
Claim 8
Dependent Claim
137 words
A thin film vacuum evaporation device, comprising: a reaction chamber having a light transmitting window; discharging means connected to said reaction chamber for keeping a vacuum in said reaction chamber; a target held in said reaction chamber; light beam directing means for directing a beam of light to said target through said light transmitting window to evaporate a part of said target; a member held in said reaction chamber, on which evaporated material from said target is deposited; a differential pressure chamber enclosed by a partition wall formed to cover said light transmitting window within said reaction chamber and provided with an orifice, positioned on an optical path of the light beam, of size sufficient to pass the beam of light through the orifice; and gas introducing means for introducing a gas into said differential pressure chamber.
Claim 9
Dependent Claim
19 words
A device according to claim 6, wherein said orifice is formed by a member attached to said partition wall.
Claim 10
Dependent Claim
32 words
A device according to claim 6, wherein the inner diameter of said orifice gradually becomes smaller from a point closer to said light transmitting window to the end closer to said target.
References Cited (Backward Citations)
JPS6179765A
Cited
JPS6179766A
Cited
US4726320A
Cited
JPS62174370A
Cited
FR2607830A1
Cited
GB2212819A
Cited
DE3800680A1
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US4966887A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-03-24 | 1995-09-23 | 1996-03-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-03-24 | 1999-09-23 | 2000-03-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-03-24 | 2003-09-23 | 2004-03-24 | $7700.00 | Window Closed / Lapsed |