Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
248 words
A computerized method of defect area display in a pattern inspection system computerized generated frames of references data, wherein the defect area to be displayed is raster scanned by a laser beam, and reflected light from the defect area produces inspection data representative of a scanned pattern, comprising the steps of: detecting the reflected light and producing frames of data corresponding to the inspection data; comparing at least one selected frame of reference data description of an ideal pattern with at least one frame of a data description of an inspection pattern, derived from reflected light, to locate miscompares; identifying defect areas in which miscompares are located; displaying an image of an inspection data description of a selected defect area, based on reflected light, overlaid on a reference data description of the selected defect area; displaying as a first color, those areas of the displayed image which corresponds to pattern areas appearing both in the inspection and reference data descriptions of the selected defect area; displaying as a second color, those areas of the displayed image which correspond to pattern areas appearing in the inspection data description of the selected defect area but do not appear in the reference data description of the selected defect area; and displaying as a third color, those areas of the displayed image which correspond to pattern areas appearing in the reference data description of the selected defect area but do not appear in the inspected data description of the selected defect area.
Claim 2
Dependent Claim
248 words
A computerized method of defect area display in a pattern inspection system computerized generated frames of references data, wherein the defect area to be displayed is raster scanned by a laser beam, and reflected light from the defect area produces inspection data representative of a scanned pattern, comprising the steps of: detecting the reflected light and producing frames of data corresponding to the inspection data; comparing at least one selected frame of reference data description of an ideal pattern with at least one frame of a data description of an inspection pattern, derived from reflected light, to locate miscompares; identifying defect areas in which miscompares are located; displaying an image of an inspection data description of a selected defect area, based on reflected light, overlaid on a reference data description of the selected defect area; displaying as a first color, those areas of the displayed image which corresponds to pattern areas appearing both in the inspection and reference data descriptions of the selected defect area; displaying as a second color, those areas of the displayed image which correspond to pattern areas appearing in the inspection data description of the selected defect area but do not appear in the reference data description of the selected defect area; and displaying as a third color, those areas of the displayed image which correspond to pattern areas appearing in the reference data description of the selected defect area but do not appear in the inspected data description of the selected defect area.
Claim 3
Dependent Claim
22 words
The method of claim 1, wherein: the first color is yellow; the second color is green; and the third color is red.
Claim 4
Dependent Claim
41 words
The method of claim 1, wherein the inspection data description, in the form of reflected light, of the selected defect area comprises: a gray scale data word representation of the reflected light intensity for each pixel of the selected defect area.
Claim 5
Dependent Claim
35 words
The method according to claim 3, wherein the gray scale data word representation of the reflected light intensity for each pixel of the selected defect area form a gray scale image of the defect area.
Claim 6
Dependent Claim
33 words
The method according to claim 4, wherein a computer generated reference image of the same area in which the defect area occurs is overlaid onto the gray scale image of the defect area.
Claim 7
Dependent Claim
26 words
The method of claim 1, wherein the reference data description of the selected defect area comprises: a bit-mapped reference data representation of the selected defect area.
Claim 8
Dependent Claim
18 words
The method of claim 1, wherein the steps of displaying are carried out on a color video display.
Claim 9
Dependent Claim
36 words
The computerized method of defect area display in a pattern inspection system, according to claim 1, wherein the reference data description is created frame-by-frame, on a real time basis during review of the selected defect area.