US5094880A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Thin superconducting film and manufacturing method for the same
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1990-07-11
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Granted: 1992-03-10
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Expires: 2010-07-11
Abstract
Abstract A superconducting film is formed by a physical vapor deposition. In order to form such a superconducting film as exhibits a sufficient superconductivity a small portion of a target is sublimed without decomposing molecules of the target and deposited on a surface of a substrate. In addition an undesirable component is not introduced from the target into the superconducting film.
Inventors
- 👤 Masashi Hongoh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 21:54
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/12; C23C14/22; C23C14/24; C23C14/28; H; H10; H10N; H10N60/00; H10N60/80; H10N60/85; H10N60/851; Y; Y10; Y10S; Y10S505/00; Y10S505/80; Y10S505/815; Y10S505/816; Y10S505/818; Y10S505/819
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
86 words
A method for forming an organic superconducting film comprising the steps of: providing a target comprising an organic material for forming an organic superconductor in a container; vaporizing said organic material by irradiating a portion of said target with a light; and depositing said vaporized material on a surface of a substrate, which is maintained at a temperature less than a decomposition temperature of said target material, wherein said target is cooled by a cooling medium so that to prevent the target material from being decomposed.
Claim 2
Independent Claim
86 words
A method for forming an organic superconducting film comprising the steps of: providing a target comprising an organic material for forming an organic superconductor in a container; vaporizing said organic material by irradiating a portion of said target with a light; and depositing said vaporized material on a surface of a substrate, which is maintained at a temperature less than a decomposition temperature of said target material, wherein said target is cooled by a cooling medium so that to prevent the target material from being decomposed.
Claim 3
Dependent Claim
17 words
The method for forming a superconducting film of claim 1 wherein said light is a laser beam.
Claim 4
Dependent Claim
23 words
The method for forming a superconducting film of claim 1 wherein said light is emitted from a mercury lamp or a halogen lamp.
Claim 5
Dependent Claim
18 words
The method for forming a superconducting film of claim 1 wherein said cooling medium is a liquid nitrogen.
Claim 6
Dependent Claim
28 words
The method for forming a superconducting film of claim 2 wherein said laser beam is emitted from an excimer laser, CO 2 gas laser, or a Nb-YAG laser.
Claim 7
Dependent Claim
13 words
The method of claim 1 wherein said portion is heated at 100°-400° C.
Claim 8
Dependent Claim
19 words
The method for forming a superconducting film of claim 5 wherein said excimer laser is a KrF excimer laser.
Claim 9
Dependent Claim
19 words
The method for forming a superconducting film of claim 5 wherein said excimer laser is a XeCl excimer laser.
Claim 10
Independent Claim
99 words
A method for forming an organic superconductor comprising the steps of: placing in a vacuum chamber a target comprising an organic material for forming an organic superconductor; vaporizing said organic material by irradiating a portion of said target with a laser beam so that said portion is heated to 100°-400° C.; and depositing said vaporized material on a substrate placed in said chamber, wherein said substrate is maintained at a temperature less than a decomposition temperature of said target material, wherein said target is cooled by a cooling medium so that to prevent the target material from being decomposed.
Claim 11
Independent Claim
99 words
A method for forming an organic superconductor comprising the steps of: placing in a vacuum chamber a target comprising an organic material for forming an organic superconductor; vaporizing said organic material by irradiating a portion of said target with a laser beam so that said portion is heated to 100°-400° C.; and depositing said vaporized material on a substrate placed in said chamber, wherein said substrate is maintained at a temperature less than a decomposition temperature of said target material, wherein said target is cooled by a cooling medium so that to prevent the target material from being decomposed.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-03-10 | 1995-09-09 | 1996-03-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-03-10 | 1999-09-09 | 2000-03-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-03-10 | 2003-09-09 | 2004-03-10 | $7700.00 | Window Closed / Lapsed |