US5091208A
Expired / Lapsed
US
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Novel susceptor for use in chemical vapor deposition apparatus and its method of use
Assignee: Wayne State University
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Filing: 1990-03-05
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Granted: 1992-02-25
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Expires: 2010-03-05
Abstract
Abstract A composite susceptor for forming uniform deposits by chemical vapor deposition. The composite susceptor has an electrically conducted layer of material disposed on a block of material which is adapted to be heated by an induction heating coil. The conductive layer is electrically biased to control the geometry of the gas plasma. By electrically controlling the geometry of the gas plasma, more uniform deposition of a material on a substance is achieved. A composite susceptor having a segmented conductive layer for producing a graded electrical profile and a conductive ring surrounding a gas plasma are also described. In one aspect, a phase-shifting layer of material is disposed on the conductive layer.
Inventors
- 👤 Roger W. Pryor
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 15:50
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/458; C23C16/4582; C23C16/4583; C23C16/4586
Claims Analysis
Total Claims: 38
Claim 1
Independent Claim
100 words
A composite susceptor, comprising: a susceptor body for use in a deposition apparatus of the type in which a material is deposited on a substrate adjacent said susceptor body; said susceptor body having a first region of a first preselected material, said first region having a first predetermined electrical resistance; said susceptor body further having a second region of a second preselected material, said second region having a second predetermined electrical resistance; said first predetermined electrical resistance being less than said second predetermined electrical resistance, and wherein said second region defines a cavity for receiving means for heating said susceptor.
Claim 2
Dependent Claim
100 words
A composite susceptor, comprising: a susceptor body for use in a deposition apparatus of the type in which a material is deposited on a substrate adjacent said susceptor body; said susceptor body having a first region of a first preselected material, said first region having a first predetermined electrical resistance; said susceptor body further having a second region of a second preselected material, said second region having a second predetermined electrical resistance; said first predetermined electrical resistance being less than said second predetermined electrical resistance, and wherein said second region defines a cavity for receiving means for heating said susceptor.
Claim 3
Dependent Claim
18 words
The susceptor recited in claim 1 further including means for controlling the electrical potential of said first region.
Claim 4
Dependent Claim
14 words
The susceptor recited in claim 1, wherein said first region is a refractory metal.
Claim 5
Dependent Claim
29 words
The susceptor recited in claim 1, wherein said first preselected material is a refractory metal selected from the group consisting of molybdenum, tungsten, tantalum and niobium and combinations thereof.
Claim 6
Dependent Claim
14 words
The invention recited in claim 1, wherein said heating means is an induction coil.
Claim 7
Dependent Claim
116 words
A composite susceptor, comprising: a susceptor body for use in a deposition apparatus of the type in which a material is deposited on a substrate, said substrate being adjacent said susceptor body; said susceptor body having a first region having a first predetermined electrical resistance; said susceptor body having a second region having a second predetermined electrical resistance; said second region defining a cavity to receive an induction heating coil, wherein the value of said first predetermined electrical resistance is less than the value of said second predetermined electrical resistance, and wherein the material from which said first region of material is formed has a specific resistance of from about 2 microohm-cm to about 200 microohm-cm.
Claim 8
Dependent Claim
116 words
A composite susceptor, comprising: a susceptor body for use in a deposition apparatus of the type in which a material is deposited on a substrate, said substrate being adjacent said susceptor body; said susceptor body having a first region having a first predetermined electrical resistance; said susceptor body having a second region having a second predetermined electrical resistance; said second region defining a cavity to receive an induction heating coil, wherein the value of said first predetermined electrical resistance is less than the value of said second predetermined electrical resistance, and wherein the material from which said first region of material is formed has a specific resistance of from about 2 microohm-cm to about 200 microohm-cm.
Claim 9
Dependent Claim
112 words
A composite susceptor for use in a deposition apparatus of the type in which a material is deposited on a substrate, said substrate contacting said susceptor, said composite susceptor comprising: a composite susceptor having a principal surface on which a substrate is received; said composite susceptor body including a region of a first material at said principal surface, said first region having a first electrical resistance; said composite susceptor body further including a region of a second material adjacent said region of said first material, said second region having a second electrical resistance; and wherein the electrical resistance of said second region is greater than the electrical resistance of said first region.
Claim 10
Dependent Claim
112 words
A composite susceptor for use in a deposition apparatus of the type in which a material is deposited on a substrate, said substrate contacting said susceptor, said composite susceptor comprising: a composite susceptor having a principal surface on which a substrate is received; said composite susceptor body including a region of a first material at said principal surface, said first region having a first electrical resistance; said composite susceptor body further including a region of a second material adjacent said region of said first material, said second region having a second electrical resistance; and wherein the electrical resistance of said second region is greater than the electrical resistance of said first region.
Claim 11
Dependent Claim
19 words
The invention recited in claim 7, further including a layer of dielectric disposed between said first and second regions.
Claim 12
Dependent Claim
30 words
The invention recited in claim 7, further including a ring of material spaced from said principal surface, said ring having an electrical resistance less than that of said second region.
Claim 13
Dependent Claim
19 words
The invention recited in claim 9, further including a layer of dielectric disposed between said first and second region.
Claim 14
Dependent Claim
22 words
The invention recited in claim 7, further including a layer of phase-shifting material disposed on said first region at said principal surface.
Claim 15
Dependent Claim
30 words
The invention recited in claim 11, further including a ring of material spaced from said principal surface, said ring having an electrical resistance less than that of said second regions.
Claim 16
Dependent Claim
19 words
The invention recited in claim 11, further including a layer of dielectric disposed between said first and second regions.
Claim 17
Dependent Claim
76 words
A composite susceptor, comprising: a composite susceptor body having a first region of material said first region of material having a principal surface; said composite susceptor body having a second region of material underlying said first region of material; said second region of material having a higher electrical conductance than said first region of material; said first region of material including sub-regions of said first material; and said sub-regions being substantially electrically isolated from one another.
Claim 18
Dependent Claim
76 words
A composite susceptor, comprising: a composite susceptor body having a first region of material said first region of material having a principal surface; said composite susceptor body having a second region of material underlying said first region of material; said second region of material having a higher electrical conductance than said first region of material; said first region of material including sub-regions of said first material; and said sub-regions being substantially electrically isolated from one another.
Claim 19
Dependent Claim
21 words
The invention recited in claim 14, further including a layer of dielectric disposed between said first and second regions of material.
Claim 20
Dependent Claim
24 words
The invention recited in claim 14, further including a layer of phase-shifting material disposed on said first region of material at said principal surface.
Claim 21
Dependent Claim
32 words
The invention recited in claim 16, further including a ring of material spaced from said principal surface, said ring having an electrical resistance less than that of said second region of material.
Claim 22
Dependent Claim
21 words
The invention recited in claim 16, further including a layer of dielectric disposed between said first and second regions of material.
Claim 23
Dependent Claim
32 words
The composite susceptor recited in claim 16, wherein the material from which said first region of material is formed has a specific resistance of from about 2 microohm-cm to about 200 microohm-cm.
Claim 24
Dependent Claim
32 words
The composite susceptor recited in claim 16, wherein the material from which said second region of material is formed has a specific resistance of from about 50 microohm-cm to about 50,000 microohm-cm.
Claim 25
Dependent Claim
32 words
The invention recited in claim 14, further including a ring of material spaced from said principal surface, said ring having an electrical resistance less than that of said second region of material.
Claim 26
Dependent Claim
21 words
The invention recited in claim 21, further including a layer of dielectric disposed between said first and second regions of material.
Claim 27
Independent Claim
222 words
A method of forming a deposit of material on a substrate by chemical vapor deposition in the chamber of a chemical vapor deposition apparatus comprising the following steps: providing means for heating a substrate on which a material is to be deposited from a gaseous feedstock having a charged species; said heating means including a body of material having two distinct regions; one of said regions having a lower electrical resistance than said other of said regions; placing a substrate adjacent said body in a chemical vapor deposition apparatus having a chamber such that said body and said substrate reside in said chamber and such that said one of said regions of said body is closer to said substrate than said other of said regions; heating said substrate to a predetermined temperature with said heating means; introducing a gaseous feedstock into said chamber under conditions wherein said gaseous feedstock includes electrically charged species in said chamber; a portion of said gaseous feedstock flowing to an area adjacent said substrate; electrically biasing said one region of said body with electrical biasing means in a manner which interacts with said charged species of said gaseous feedstock; and contacting said substrate with said gaseous feedstock under conditions which promote the formation of a deposit of a material on said substrate originating from said gaseous feedstock.
Claim 28
Independent Claim
222 words
A method of forming a deposit of material on a substrate by chemical vapor deposition in the chamber of a chemical vapor deposition apparatus comprising the following steps: providing means for heating a substrate on which a material is to be deposited from a gaseous feedstock having a charged species; said heating means including a body of material having two distinct regions; one of said regions having a lower electrical resistance than said other of said regions; placing a substrate adjacent said body in a chemical vapor deposition apparatus having a chamber such that said body and said substrate reside in said chamber and such that said one of said regions of said body is closer to said substrate than said other of said regions; heating said substrate to a predetermined temperature with said heating means; introducing a gaseous feedstock into said chamber under conditions wherein said gaseous feedstock includes electrically charged species in said chamber; a portion of said gaseous feedstock flowing to an area adjacent said substrate; electrically biasing said one region of said body with electrical biasing means in a manner which interacts with said charged species of said gaseous feedstock; and contacting said substrate with said gaseous feedstock under conditions which promote the formation of a deposit of a material on said substrate originating from said gaseous feedstock.
Claim 29
Dependent Claim
112 words
A composite susceptor, comprising: a susceptor body for use in a deposition apparatus of the type in which a material is deposited on a substrate adjacent said susceptor body; said susceptor body having a first region of a first preselected material, said first region having a first predetermined electrical resistance; said susceptor body further having a second region of a second preselected material, said second region having a second predetermined electrical resistance; said first predetermined electrical resistance being less than said second predetermined electrical resistance, and wherein said second preselected material can be inductively heated to a temperature of from 100° C. to 1500° C. and is thermally stable at said temperatures.
Claim 30
Dependent Claim
112 words
A composite susceptor, comprising: a susceptor body for use in a deposition apparatus of the type in which a material is deposited on a substrate adjacent said susceptor body; said susceptor body having a first region of a first preselected material, said first region having a first predetermined electrical resistance; said susceptor body further having a second region of a second preselected material, said second region having a second predetermined electrical resistance; said first predetermined electrical resistance being less than said second predetermined electrical resistance, and wherein said second preselected material can be inductively heated to a temperature of from 100° C. to 1500° C. and is thermally stable at said temperatures.
Claim 31
Dependent Claim
105 words
A composite susceptor, comprising: a susceptor body for use in a deposition apparatus of the type in which a material is deposited on a substrate adjacent said susceptor body; said susceptor body having a first region of a first preselected material, said first region having a first predetermined electrical resistance; said susceptor body further having a second region of a second preselected material, said second region having a second predetermined electrical resistance; said first predetermined electrical resistance being less than said second predetermined electrical resistance, and wherein said second preselected material is selected from the group consisting of polycrystalline graphite and doped cubic boron nitride.
Claim 32
Dependent Claim
105 words
A composite susceptor, comprising: a susceptor body for use in a deposition apparatus of the type in which a material is deposited on a substrate adjacent said susceptor body; said susceptor body having a first region of a first preselected material, said first region having a first predetermined electrical resistance; said susceptor body further having a second region of a second preselected material, said second region having a second predetermined electrical resistance; said first predetermined electrical resistance being less than said second predetermined electrical resistance, and wherein said second preselected material is selected from the group consisting of polycrystalline graphite and doped cubic boron nitride.
Claim 33
Dependent Claim
104 words
A composite susceptor, comprising: a susceptor body for use in a deposition apparatus of the type in which a material is deposited on a substrate adjacent said susceptor body; said susceptor body having a first region of a first preselected material, said first region having a first predetermined electrical resistance; said susceptor body further having a second region of a second preselected material, said second region having a second predetermined electrical resistance; said first predetermined electrical resistance being less than said second predetermined electrical resistance, and wherein said first preselected material has a specific resistance of from about 2 microohm-cm to about 200 microohm-cm.
Claim 34
Dependent Claim
104 words
A composite susceptor, comprising: a susceptor body for use in a deposition apparatus of the type in which a material is deposited on a substrate adjacent said susceptor body; said susceptor body having a first region of a first preselected material, said first region having a first predetermined electrical resistance; said susceptor body further having a second region of a second preselected material, said second region having a second predetermined electrical resistance; said first predetermined electrical resistance being less than said second predetermined electrical resistance, and wherein said first preselected material has a specific resistance of from about 2 microohm-cm to about 200 microohm-cm.
Claim 35
Dependent Claim
104 words
A composite susceptor, comprising: a susceptor body for use in a deposition apparatus of the type in which a material is deposited on a substrate adjacent said susceptor body; said susceptor body having a first region of a first preselected material, said first region having a first predetermined electrical resistance; said susceptor body further having a second region of a second preselected material, said second region having a second predetermined electrical resistance; said first predetermined electrical resistance being less than said second predetermined electrical resistance, and wherein said second preselected material has a specific resistance of from about 50 microohm-cm to about 50,000 microohm-cm.
Claim 36
Dependent Claim
104 words
A composite susceptor, comprising: a susceptor body for use in a deposition apparatus of the type in which a material is deposited on a substrate adjacent said susceptor body; said susceptor body having a first region of a first preselected material, said first region having a first predetermined electrical resistance; said susceptor body further having a second region of a second preselected material, said second region having a second predetermined electrical resistance; said first predetermined electrical resistance being less than said second predetermined electrical resistance, and wherein said second preselected material has a specific resistance of from about 50 microohm-cm to about 50,000 microohm-cm.
Claim 37
Dependent Claim
116 words
A composite susceptor, comprising: a susceptor body for use in a deposition apparatus of the type in which a material is deposited on a substrate, said substrate being adjacent said susceptor body; said susceptor body having a first region having a first predetermined electrical resistance; said susceptor body having a second region having a second predetermined electrical resistance; said second region defining a cavity to receive an induction heating coil, wherein the value of said first predetermined electrical resistance is less than the value of said second predetermined electrical resistance, and wherein the material from which said second region of material is formed has a specific resistance of from about 50 microohm-cm to about 50,000 microohm-cm.
Claim 38
Dependent Claim
116 words
A composite susceptor, comprising: a susceptor body for use in a deposition apparatus of the type in which a material is deposited on a substrate, said substrate being adjacent said susceptor body; said susceptor body having a first region having a first predetermined electrical resistance; said susceptor body having a second region having a second predetermined electrical resistance; said second region defining a cavity to receive an induction heating coil, wherein the value of said first predetermined electrical resistance is less than the value of said second predetermined electrical resistance, and wherein the material from which said second region of material is formed has a specific resistance of from about 50 microohm-cm to about 50,000 microohm-cm.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-02-24 | 1995-08-26 | 1996-02-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-02-24 | 1999-08-26 | 2000-02-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-02-24 | 2003-08-26 | 2004-02-25 | $7700.00 | Window Closed / Lapsed |