US5089244A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for preparing disilane by using molecular sieves
Assignee: LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
•
Filing: 1990-09-24
•
Granted: 1992-02-18
•
Expires: 2010-09-24
Abstract
Abstract Process for preparing disilane, wherein a raw gas including monosilane, disilane, trisilane and impurities such as phosphine, hydrogen sulfide, arsine, disiloxane and higher siloxanes, undergoes a step of separation by distillation for the substantial elimination of the other compounds of silicon, except disiloxane, and the substantial elimination of phosphine, hydrogen sulfide and arsine impurities, wherein a final purification of the disilane takes place by selective adsorption on molecular sieves, in which one is a sieve of type 3 A and which is used for the elimination of the siloxanes and hydrogen sulfide and the other is a sieve of type 4 A for the elimination of phosphine and arsine.
Inventors
- 👤 Jean-Claude Parent
- 👤 Marie-Helene Renaudin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 19:41
CPC Classifications
C; C01; C01B; C01B33/00; C01B33/04; C01B33/046
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
85 words
A process for preparing substantially purified disilane from a raw gas including monosilane, disilane, trisilane and impurities of phosphine, hydrogen sulfide, arsine, disiloxane and higher siloxanes, comprising: separating by distillation to substantially eliminate compounds of silicon, except disiloxane, and substantially eliminating impurities comprising phosphine, hydrogen sulfide and arsine by selective adsorption on molecular sieves, wherein one sieve is type 3 A and eliminates siloxanes and hydrogen sulfide and another sieve is type 4 A and eliminates phosphine and arsine to provide a substantially purified disilane.
Claim 2
Dependent Claim
85 words
A process for preparing substantially purified disilane from a raw gas including monosilane, disilane, trisilane and impurities of phosphine, hydrogen sulfide, arsine, disiloxane and higher siloxanes, comprising: separating by distillation to substantially eliminate compounds of silicon, except disiloxane, and substantially eliminating impurities comprising phosphine, hydrogen sulfide and arsine by selective adsorption on molecular sieves, wherein one sieve is type 3 A and eliminates siloxanes and hydrogen sulfide and another sieve is type 4 A and eliminates phosphine and arsine to provide a substantially purified disilane.
Claim 3
Dependent Claim
26 words
The process according to claim 1, wherein molecular sieve 4 A for elimination of phosphine and arsine is modified by substituting cadmium ions for sodium ions.
Claim 4
Dependent Claim
32 words
The process according to claim 1, wherein the siloxanes and hydrogen sulfide are first eliminated on a molecular sieve 3 A, and phosphine and arsine are eliminated on molecular sieve 4 A.
References Cited (Backward Citations)
DE150599C
Cited
US3982912A
Cited
JPS5869715A
Cited
JPS5930711A
Cited
US4554141A
Cited
JPS6153106A
Cited
JPS6325210A
Cited
JPS63147815A
Cited
JPH01101411A
Cited
EP0314542A1
Cited
US4976944A
Cited
JPH0336835A
Cited
JPH02191413A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-02-17 | 1995-08-19 | 1996-02-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-02-17 | 1999-08-19 | 2000-02-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-02-17 | 2003-08-19 | 2004-02-18 | $7700.00 | Window Closed / Lapsed |