Method for purifying disilane

Abstract

Abstract PURPOSE:To adsorb and remove phosphine in disilane selectively, by treating the disilane containing a very small amount of phosphine with a specific adsorbent. CONSTITUTION:Synthetic zeolite of 3A type is immersed in an aqueous solution of a water-soluble salt [e.g. Mn(NO3)2] such as metallic hydrochloride, nitrate, etc., to form a bivalent cation selected from Mn ion, Ca ion, Mg ion and Zn ion and calcined under reduced pressure or in an inert gas at 200-400 deg.C to give an adsorbent having 20-100% exchangeable cation of the synthetic zeolite of 3A type replaced with the bivalent cation. Then disilane containing a very small amount of phosphine is passed through an adsorption pipe packed with the adsorbent kept at -50-50 deg.C to give disilane having <=10<-9> phosphine con tent.

Inventors

• 👤 Masayoshi Ito
• 👤 正義 伊藤
• 👤 Hiroji Miyagawa
• 👤 博治 宮川
• 👤 Toshihiro Abe
• 👤 智弘 安部
• 👤 Kaoru Inoue
• 👤 薫 井上
• 👤 Keiichi Ikeda
• 👤 圭一 池田
• 👤 Masami Murakami
• 👤 雅美 村上

Bibliographic Details