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Process for forming a coating on a substrate using a silsesquioxane resin

Assignee: Dow Silicones Corp
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Filing: 1991-04-29
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Granted: 1992-02-04
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Expires: 2011-04-29
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Abstract

Abstract The present invention provides a relatively simple synthesis procedure for the formation of silane hydrolyzate compositions of the formula ##STR1## where R is hydrogen or a methyl group, n is an integer greater than about 8, and x is a number between 0 and 2. The hydrolyzate compositions are metastable in solvent solution, but become insoluble after coating on a substrate. The resins are useful as planarizing coatings for substrates such as electronic devices and can be ceramified by subjecting them to an oxidizing atmosphere at a temperature of between about 100° to 1000° C. to form ceramic or ceramic-like coatings on such substrates.

Inventors

  • 👤 Keith D. Weiss
  • 👤 Cecil L. Frye

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 22:26
CPC Classifications
C; C08; C08G; C08G77/00; C08G77/04; C08G77/14; C08G77/16; C08G77/045; C08G77/06; C08G77/08

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 109 words
A method for the formation of a protective coating of a silsesquioxane resin on a substrate comprising the steps of: a) coating said substrate with a solution comprising a non-sulfur containing polar organic solvent containing therein a composition of the formula (RSi(OH) x O 3-x/2 ) n where R is a hydrogen or a methyl group, provided R is at least 50% hydrogen, n is an integer greater than about 8, and x is a number between 0 and 2, and where the silanol content in said composition is from about 1-10% by weight, and b) evaporating said solvent and thereby deposit an insoluble silsesquioxane coating on said substrate.
Claim 2
Independent Claim 109 words
A method for the formation of a protective coating of a silsesquioxane resin on a substrate comprising the steps of: a) coating said substrate with a solution comprising a non-sulfur containing polar organic solvent containing therein a composition of the formula (RSi(OH) x O 3-x/2 ) n where R is a hydrogen or a methyl group, provided R is at least 50% hydrogen, n is an integer greater than about 8, and x is a number between 0 and 2, and where the silanol content in said composition is from about 1-10% by weight, and b) evaporating said solvent and thereby deposit an insoluble silsesquioxane coating on said substrate.
Claim 3
Independent Claim 136 words
A method for the formation of a ceramic or ceramic-like coating on a substrate comprising the steps of: a) coating said substrate with a solution comprising a non-sulfur containing polar organic solvent containing therein a composition of the formula (RSi(OH) x O 3-x/2 ) n where R is a hydrogen or a methyl group, provided R is at least 50% hydrogen, n is an integer greater than about 8, and x is a number between 0 and 2, and where the silanol content in said composition is from about 1-10% by weight, b) evaporating said solvent and thereby deposit an insoluble silsesquioxane coating on said substrate, and c) converting said silsesquioxane coating to a silicon dioxide-containing ceramic by subjecting said coating to an oxidizing atmosphere at a temperature of between about 100° to about 1000° C.
Claim 4
Independent Claim 136 words
A method for the formation of a ceramic or ceramic-like coating on a substrate comprising the steps of: a) coating said substrate with a solution comprising a non-sulfur containing polar organic solvent containing therein a composition of the formula (RSi(OH) x O 3-x/2 ) n where R is a hydrogen or a methyl group, provided R is at least 50% hydrogen, n is an integer greater than about 8, and x is a number between 0 and 2, and where the silanol content in said composition is from about 1-10% by weight, b) evaporating said solvent and thereby deposit an insoluble silsesquioxane coating on said substrate, and c) converting said silsesquioxane coating to a silicon dioxide-containing ceramic by subjecting said coating to an oxidizing atmosphere at a temperature of between about 100° to about 1000° C.
Claim 5
Dependent Claim 27 words
The method of claim 2 in which said solution containing said composition is coated onto said substrate by spray coating, dip coating, flow coating, or spin coating.
Claim 6
Dependent Claim 13 words
The method of claim 2 in which said substrate is an electronic device.

References Cited (Backward Citations)

US4382109A Cited
US4753855A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1995-02-03 1995-08-05 1996-02-04 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1999-02-03 1999-08-05 2000-02-04 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2003-02-03 2003-08-05 2004-02-04 $7700.00 Window Closed / Lapsed

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