Patent US5084749A successfully refreshed from Google Patents.
US5084749A
Expired / Lapsed
US
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Image sensing device with reduced smear
Assignee: Eastman Kodak Co
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Filing: 1991-01-22
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Granted: 1992-01-28
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Expires: 2011-01-22
Abstract
Abstract In interline transfer type image sensing devices, image smear is produced when light is allowed to penetrate into the charge transfer regions of the device. In this disclosure, a device with improved light shielding, and, hence, reduced smear, is described. The device incorporates WSi x (wherein x<2) refractory opaque material for the light shield which is placed in close proximity to the semiconductor surface, and a flowed glass planarization layer is disposed over the light shield.
Inventors
- 👤 David L. Losee
- 👤 Madhav Mehra
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:15
CPC Classifications
H; H10; H10F; H10F77/00; H10F77/30; H10F77/306; H10F77/331; H10F77/334; H10F39/00; H10F39/10; H10F39/12; H10F39/15; H10F39/153
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
164 words
In an image sensor device having a plurality of photodiodes for storing charge in response to actinic light, charge transfer devices for receiving the stored charge from different ones of the photodiodes, and, gate means disposed over the charge transfer devices and effective in a first condition for causing charge to transfer from the photodiodes and in a second condition for transferring charge along the transfer devices, the improvement comprising: (a) a thin oxide layer disposed over the photodiode and the gate means; (b) an opaque refractory light shield of 3000 A or less provided on the oxide layer over the gate means and formed of silicide of tungsten, WSi x , where x is a number less than 2 and W 5 Si 3 is present in such light shield; and (c) a flowed glass layer disposed over the thin oxide over the photodiodes and the opaque refractory light shield providing a smooth surface suitable for subsequent fabrication of a color filter array.
Claim 2
Dependent Claim
164 words
In an image sensor device having a plurality of photodiodes for storing charge in response to actinic light, charge transfer devices for receiving the stored charge from different ones of the photodiodes, and, gate means disposed over the charge transfer devices and effective in a first condition for causing charge to transfer from the photodiodes and in a second condition for transferring charge along the transfer devices, the improvement comprising: (a) a thin oxide layer disposed over the photodiode and the gate means; (b) an opaque refractory light shield of 3000 A or less provided on the oxide layer over the gate means and formed of silicide of tungsten, WSi x , where x is a number less than 2 and W 5 Si 3 is present in such light shield; and (c) a flowed glass layer disposed over the thin oxide over the photodiodes and the opaque refractory light shield providing a smooth surface suitable for subsequent fabrication of a color filter array.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-01-27 | 1995-07-29 | 1996-01-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-01-27 | 1999-07-29 | 2000-01-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-01-27 | 2003-07-29 | 2004-01-28 | $7700.00 | Window Closed / Lapsed |