Autofocus method and apparatus for electron microscope

Claim 2

An autofocus method used in electron microscopy, comprising the steps of: varying the excitation current fed to the objective lens of an electron microscope between different values while causing the electron beam emitted from the microscope to hit a specimen continuously at a first angle; sampling the resulting video signal representing a projected image at predetermined intervals and storing the obtained samples in a memory to obtain a first set of data; then varying the excitation current fed to the objective lens between different values while causing the electron beam to continuously hit the specimen at a second angle; sampling the resulting video signal representing a projected image at predetermined intervals and storing the obtained samples in the memory to obtain a second set of data; and comparing the first set of data with the second set of data to find the focal point.

Claim 3

The autofocus method of claim 1, wherein the number of samples taken in each step of sampling is increased or decreased, depending on whether the magnification is increased or decreased, respectively.

Claim 4

An autofocus method used in electron microscopy, comprising the steps of: varying the excitation current fed to the objective lens of the electron microscope coarsely between different values while continuously causing the electron beam emitted from the microscope to hit a specimen at a first angle; sampling the resulting video signal representing a projected image at predetermined intervals and storing the obtained samples in a memory to obtain a first set of data; then varying the excitation current fed to the objective lens coarsely while causing the electron beam to continuously hit the specimen at a second angle; sampling the resulting video signal representing a projected image at predetermined intervals and storing the obtained samples in the memory to obtain a second set of data; comparing the first set of image data with the second set of image data to roughly find the focal point; subsequently varying the excitation current fed to the objective lens finely between different values within such a range that the excitation current takes in the vicinity of the roughly found focal point while causing the beam to hit the specimen at the first angle; sampling the resulting video signal representing a projected image at predetermined intervals and storing the obtained samples in the memory to obtain a third set of data; varying the excitation current finely between said different values in the vicinity of the roughly found focal point while causing the electron beam to hit the specimen at the second angle; sampling the resulting video signal representing a projected image at the predetermined intervals and storing the obtained samples in the memory to obtain a fourth set of data; and comparing the third set of data with the fourth set of data to find the focal point.

Claim 5

An autofocus method used in electron microscopy, comprising the steps of: varying the excitation current fed to the objective lens of the electron microscope coarsely between different values while continuously causing the electron beam emitted from the microscope to hit a specimen at a first angle; sampling the resulting video signal representing a projected image at predetermined intervals and storing the obtained samples in a memory to obtain a first set of data; then varying the excitation current fed to the objective lens coarsely while causing the electron beam to continuously hit the specimen at a second angle; sampling the resulting video signal representing a projected image at predetermined intervals and storing the obtained samples in the memory to obtain a second set of data; comparing the first set of image data with the second set of image data to roughly find the focal point; subsequently varying the excitation current fed to the objective lens finely between different values within such a range that the excitation current takes in the vicinity of the roughly found focal point while causing the beam to hit the specimen at the first angle; sampling the resulting video signal representing a projected image at predetermined intervals and storing the obtained samples in the memory to obtain a third set of data; varying the excitation current finely between said different values in the vicinity of the roughly found focal point while causing the electron beam to hit the specimen at the second angle; sampling the resulting video signal representing a projected image at the predetermined intervals and storing the obtained samples in the memory to obtain a fourth set of data; and comparing the third set of data with the fourth set of data to find the focal point.

Claim 6

An autofocus apparatus for use with an electron microscope comprising: a deflection system capable of varying the angle at which the electron beam emitted from the electron microscope hits a specimen without moving the irradiated point on the specimen; a deflection control means which controls the deflection system so that the electron beam may hit the irradiated point at a first angle and then at a second angle; an objective lens control means which brings about a first continuous change and a second continuous change in the excitation current fed to the objective lens of the microscope when the beam hits the specimen at the first angle and at the second angle, respectively; an image pickup means converting the image of the specimen taken by the microscope into a video signal; a control means which samples the video signal from the image pickup means at the predetermined intervals and stores the obtained samples in a memory during the periods in which the first and second changes are respectively brought about, to obtain first and second sets of data; and a means which compares the corresponding data items of the first and second sets of data to find the excitation current value that causes the objective lens to focus the electron beam.

Claim 7

An autofocus apparatus for use with an electron microscope comprising: a deflection system capable of varying the angle at which the electron beam emitted from the electron microscope hits a specimen without moving the irradiated point on the specimen; a deflection control means which controls the deflection system so that the electron beam may hit the irradiated point at a first angle and then at a second angle; an objective lens control means which brings about a first continuous change and a second continuous change in the excitation current fed to the objective lens of the microscope when the beam hits the specimen at the first angle and at the second angle, respectively; an image pickup means converting the image of the specimen taken by the microscope into a video signal; a control means which samples the video signal from the image pickup means at the predetermined intervals and stores the obtained samples in a memory during the periods in which the first and second changes are respectively brought about, to obtain first and second sets of data; and a means which compares the corresponding data items of the first and second sets of data to find the excitation current value that causes the objective lens to focus the electron beam.

Claim 8

The autofocus apparatus of claim 4, further including a means which automatically controls the intervals at which the video signal is sampled, according to a signal indicative of the magnification of the electron microscope.

Claim 9

The autofocus apparatus of claim 4, wherein said first change and said second change in the excitation current fed to the objective lens are linear changes and equal in amount.