US5081202A
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High purity phenyl silicone ladder polymer and method for producing the same
Assignee: Mitsubishi Electric Corp
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Filing: 1989-11-17
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Granted: 1992-01-14
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Expires: 2009-11-17
Abstract
Abstract High purity phenyl silicone ladder polymer, and a method for producing such polymer, suitable for use as the protective film, the interlayer insulating film, etc. in the fabrication of semiconductor elements, which polymer contains therein 1 ppm or below of each of sodium, potassium, iron, copper, lead and chlorine, and 1 ppb or below of each of uranium and thorium, and which is represented by the following general formula (I): <IMAGE> (I) (where: R1 to R4 denote respectively hydrogen or a lower alkyl group; n is an integer of from 8 to 1,000); or the following general formula (II): <IMAGE> (II) (where: n is an integer of from 8 to 1,600).
Inventors
- 👤 Hiroshi Adachi
- 👤 Etsushi Adachi
- 👤 Osamu Hayashi
- 👤 Kazuo Okahashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 08:55
CPC Classifications
C; C08; C08G; C08G77/00; C08G77/04; C08G77/32; C08G77/34; C08G77/14; C08G77/16; C08G77/18
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
68 words
High purity phenyl silicone ladder polymer, which contains therein 1 ppm or below of each of sodium, potassium, iron, copper, lead and chlorine, and 1 ppb or below of each of uranium and thorium, and which is represented by the following formula (I): ##STR15## where R 1 and R 4 denote respectively hydrogen or a lower alkyl group; and n is an integer of from 8 to 1,600.
Claim 2
Dependent Claim
68 words
High purity phenyl silicone ladder polymer, which contains therein 1 ppm or below of each of sodium, potassium, iron, copper, lead and chlorine, and 1 ppb or below of each of uranium and thorium, and which is represented by the following formula (I): ##STR15## where R 1 and R 4 denote respectively hydrogen or a lower alkyl group; and n is an integer of from 8 to 1,600.
Claim 3
Dependent Claim
36 words
High purity phenyl silicone ladder polymer according to claim 1, wherein R 1 to R 4 in said formula (I) represent respectively a lower alkyl group, and n is an integer of from 8 to 1,000.
Claim 4
Dependent Claim
36 words
High purity phenyl silicone ladder polymer according to claim 1, wherein R 1 to R 4 in said formula (I) represent respectively a lower alkyl group, and n is an integer of from 13 to 1,000.
Claim 5
Dependent Claim
36 words
High purity phenyl silicone ladder polymer according to claim 1, wherein R 1 to R 4 in said formula (I) represent respectively a lower alkyl group, and n is an integer of from 8 to 12.
Claim 6
Dependent Claim
36 words
High purity phenyl silicone ladder polymer according to claim 1, wherein R 1 to R 4 in said formula (I) represent respectively a lower alkyl group selected from the group consisting of methyl, ethyl and propyl.
Claim 7
Dependent Claim
33 words
High purity phenyl silicone ladder polymer according to claim 1, wherein R 1 to R 4 in said formula (I) represent respectively hydrogen, and n is an integer of from 8 to 1,600.
Claim 8
Dependent Claim
20 words
High purity phenyl silicone ladder polymer according to claim 6, wherein n is an integer of from 8 to 16.
Claim 9
Independent Claim
116 words
A method for producing high purity phenyl silicone ladder polymer, which contains therein 1 ppm or below of sodium, potassium, iron, copper, lead and chlorine, and 1 ppb or below of each of uranium and thorium, and which is represented by the following formula (I): ##STR16## where R 1 to R 4 are respectively a lower alkyl group; and n is an integer of from 8 to 12, said method being characterized by dissolving phenyl tri(lower)alkoxy silane in an organic solvent; dripping super-demineralized water containing 0.02-0.23 mol hydrogen chloride based on 1 mol phenyl tri(lower)alkoxy silane into said phenyl tri(lower)alkoxy silane, under cooling, thereby hydrolyzing said compound; and thereafter washing said hydrolyzed substance with super-demineralized water.
Claim 10
Independent Claim
116 words
A method for producing high purity phenyl silicone ladder polymer, which contains therein 1 ppm or below of sodium, potassium, iron, copper, lead and chlorine, and 1 ppb or below of each of uranium and thorium, and which is represented by the following formula (I): ##STR16## where R 1 to R 4 are respectively a lower alkyl group; and n is an integer of from 8 to 12, said method being characterized by dissolving phenyl tri(lower)alkoxy silane in an organic solvent; dripping super-demineralized water containing 0.02-0.23 mol hydrogen chloride based on 1 mol phenyl tri(lower)alkoxy silane into said phenyl tri(lower)alkoxy silane, under cooling, thereby hydrolyzing said compound; and thereafter washing said hydrolyzed substance with super-demineralized water.
Claim 11
Independent Claim
154 words
A method for producing high purity phenyl silicone ladder polymer, which contains therein 1 ppm or below of sodium, potassium, iron, copper, lead and chlorine, and 1 ppb or below of each of uranium and thorium, and which is represented by the following formula (I): ##STR17## where R 1 to R 4 are respectively a lower alkyl group; and n is an integer of from 13 to 1,000, said method being characterized by the steps of: dissolving phenyl tri(lower)alkoxy silane in an organic solvent; dripping super-demineralized water containing 0.02-0.23 mol hydrogen chloride based on 1 mol phenyl tri(lower)alkoxy silane into said solvent solution of phenyl tri(lower)alkoxy silane, under cooling, thereby hydrolyzing said compound; then washing the resulting hydrolyzed substance with super-demineralized water; thereafter subjecting said solution containing therein said hydrolyzed substance to dehydration-condensation reaction by addition of a nucleophilic reagent; and finally refining the thus obtained high molecular weight substance by a dissolution-and-reprecipitation method.
Claim 12
Independent Claim
154 words
A method for producing high purity phenyl silicone ladder polymer, which contains therein 1 ppm or below of sodium, potassium, iron, copper, lead and chlorine, and 1 ppb or below of each of uranium and thorium, and which is represented by the following formula (I): ##STR17## where R 1 to R 4 are respectively a lower alkyl group; and n is an integer of from 13 to 1,000, said method being characterized by the steps of: dissolving phenyl tri(lower)alkoxy silane in an organic solvent; dripping super-demineralized water containing 0.02-0.23 mol hydrogen chloride based on 1 mol phenyl tri(lower)alkoxy silane into said solvent solution of phenyl tri(lower)alkoxy silane, under cooling, thereby hydrolyzing said compound; then washing the resulting hydrolyzed substance with super-demineralized water; thereafter subjecting said solution containing therein said hydrolyzed substance to dehydration-condensation reaction by addition of a nucleophilic reagent; and finally refining the thus obtained high molecular weight substance by a dissolution-and-reprecipitation method.
Claim 13
Independent Claim
97 words
A method for producing high purity phenyl silicone ladder polymer, which contains therein 1 ppm or below of sodium, potassium, iron, copper, lead and chlorine, and 1 ppb or below of each of uranium and thorium, and which is represented by the following formula (II): ##STR18## where n is an integer of from 8 to 16, said method being characterized by the steps of: dissolving phenyl trichlorosilane in an organic solvent; dripping super-demineralized water into said solvent solution of phenyl trichlorosilane, under cooling, to hydrolyze said compound; and thereafter washing the resulting hydrolyzed substance with super-demineralized water.
Claim 14
Independent Claim
97 words
A method for producing high purity phenyl silicone ladder polymer, which contains therein 1 ppm or below of sodium, potassium, iron, copper, lead and chlorine, and 1 ppb or below of each of uranium and thorium, and which is represented by the following formula (II): ##STR18## where n is an integer of from 8 to 16, said method being characterized by the steps of: dissolving phenyl trichlorosilane in an organic solvent; dripping super-demineralized water into said solvent solution of phenyl trichlorosilane, under cooling, to hydrolyze said compound; and thereafter washing the resulting hydrolyzed substance with super-demineralized water.
Claim 15
Independent Claim
128 words
A method for producing high purity phenyl silicone ladder polymer, which contains therein 1 ppm or below of sodium, potassium, iron, copper, lead and chlorine, and 1 ppb or below of each of uranium and thorium, and which is represented by the following formula (II): ##STR19## where n is an integer of from 17 to 1,600, said method being characterized by the steps of: dissolving phenyl trichlorosilane in an organic solvent; dripping super-demineralized water into said solvent solution of phenyl trichlorosilane, under cooling, thereby hydrolyzing said compound; then washing the resulting hydrolyzed substance with super-demineralized water; subsequently adding a nucleophilic reagent to said organic solvent phase to subject said hydrolyzed substance to dehydration-condensation reaction under heat; and refining the resulting high molecular weight substance by a dissolution-and-recipitation method.
Claim 16
Independent Claim
128 words
A method for producing high purity phenyl silicone ladder polymer, which contains therein 1 ppm or below of sodium, potassium, iron, copper, lead and chlorine, and 1 ppb or below of each of uranium and thorium, and which is represented by the following formula (II): ##STR19## where n is an integer of from 17 to 1,600, said method being characterized by the steps of: dissolving phenyl trichlorosilane in an organic solvent; dripping super-demineralized water into said solvent solution of phenyl trichlorosilane, under cooling, thereby hydrolyzing said compound; then washing the resulting hydrolyzed substance with super-demineralized water; subsequently adding a nucleophilic reagent to said organic solvent phase to subject said hydrolyzed substance to dehydration-condensation reaction under heat; and refining the resulting high molecular weight substance by a dissolution-and-recipitation method.
References Cited (Backward Citations)
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