Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
135 words
A method for forming an array of detector elements directly upon a detector interface device the method comprising the steps of: (a) disposing an encapsulated seed crystal within a cavity formed within a surface of a substrate; (b) forming a glass layer upon the surface of the substrate, the glass layer having an aperture formed therein, the aperture being disposed above the seed crystal; (c) graphotaxially growing a single crystalline layer from the seed crystal across the glass layer to form a detector element support layer upon which infrared detector elements may be formed; (d) forming an array of detector elements upon the detector element support layer; (e) forming a plurality of conductive bumps upon a surface of the substrate, the plurality of conductive bumps suitable for electrically interfacing the detector elements to external circuitry.
Claim 2
Independent Claim
135 words
A method for forming an array of detector elements directly upon a detector interface device the method comprising the steps of: (a) disposing an encapsulated seed crystal within a cavity formed within a surface of a substrate; (b) forming a glass layer upon the surface of the substrate, the glass layer having an aperture formed therein, the aperture being disposed above the seed crystal; (c) graphotaxially growing a single crystalline layer from the seed crystal across the glass layer to form a detector element support layer upon which infrared detector elements may be formed; (d) forming an array of detector elements upon the detector element support layer; (e) forming a plurality of conductive bumps upon a surface of the substrate, the plurality of conductive bumps suitable for electrically interfacing the detector elements to external circuitry.
Claim 3
Dependent Claim
34 words
The method as recited in claim 1 wherein the step of forming a glass layer upon the surface of the substrate comprises forming a glass layer upon the surface of an alumina ceramic material.
Claim 4
Dependent Claim
30 words
The method as recited in claim 2 wherein the step of disposing an encapsulated seed crystal within a substrate comprises disposing a ceramic encapsulated CdTe seed crystal within the substrate.
Claim 5
Independent Claim
257 words
A method for forming an array of infrared detector elements directly upon a detector interface device, the method comprising the steps of: (a) disposing a substrate having at least one cavity formed therein within a sealable container; (b) filling the container with a single crystalline material of a first type such that the single crystalline material will flow into the cavities formed within the substrate When the single crystalline material of a first type is melted; (c) reducing the pressure within the container to a pressure less than atmospheric pressure; (d) sealing the container; (e) heating the container to a temperature greater than the melting point of the single crystalline material and lower than the melting point of the substrate to melt the single crystalline material; (f) cooling the container through a temperature gradient to permit the crystallization of the single crystalline material; (g) cutting the any excess single crystalline material from the substrate such that substantially only the single crystalline material formed within the cavities remains in contact with the substrate; (h) polishing the surface of the substrate upon which the cavities are disposed; (i) forming conductive conduits upon the surface of the substrate to define a common detector element electrode grid; (j) forming first layers of photosensitive material of a first type over the single crystalline material which crystallized within the cavities; and (k) forming second layers of photosensitive material of a second type substantially over the first layers of photosensitive material of a first type to form an array of individual photosensitive detector elements.
Claim 6
Independent Claim
257 words
A method for forming an array of infrared detector elements directly upon a detector interface device, the method comprising the steps of: (a) disposing a substrate having at least one cavity formed therein within a sealable container; (b) filling the container with a single crystalline material of a first type such that the single crystalline material will flow into the cavities formed within the substrate When the single crystalline material of a first type is melted; (c) reducing the pressure within the container to a pressure less than atmospheric pressure; (d) sealing the container; (e) heating the container to a temperature greater than the melting point of the single crystalline material and lower than the melting point of the substrate to melt the single crystalline material; (f) cooling the container through a temperature gradient to permit the crystallization of the single crystalline material; (g) cutting the any excess single crystalline material from the substrate such that substantially only the single crystalline material formed within the cavities remains in contact with the substrate; (h) polishing the surface of the substrate upon which the cavities are disposed; (i) forming conductive conduits upon the surface of the substrate to define a common detector element electrode grid; (j) forming first layers of photosensitive material of a first type over the single crystalline material which crystallized within the cavities; and (k) forming second layers of photosensitive material of a second type substantially over the first layers of photosensitive material of a first type to form an array of individual photosensitive detector elements.
Claim 7
Dependent Claim
49 words
The method as recited in claim 4 wherein the steps of disposing a substrate within a sealable container, filling the container with a single crystalline material, reducing the pressure with the container, sealing the container, heating the container, and cooling the container are performed according to the Stockbarger method.
Claim 8
Dependent Claim
51 words
The method as recited in claim 5 further comprising the steps of: (a) forming an insulator over said conductive conduits; and (b) forming a conductive bump onto each of said layers of photosensitive material of a second type, the conductive bumps suitable for electrically interfacing said detector elements to external circuitry.
Claim 9
Dependent Claim
62 words
The method as recited in claim 6 wherein the step of forming conductive conduits comprises forming a metal film substantially over the surface of the substrate prior to the step of forming a first layer of photosensitive material of a first type over the single crystalline material, the metal film having apertures formed above the single crystalline material formed within the cavities.
Claim 10
Dependent Claim
75 words
The method as recited in claim 6 wherein the step of forming conductive conduits comprises forming a metal film within a plurality of cavities of the substrate prior to the step of disposing the substrate within a sealable container to improve the adhesion of said single crystalline seed crystals to the substrate, the metal film also extending across the planar surface of the substrate to function as a common electrode grid for the detector elements.