Patent US5072128A successfully refreshed from Google Patents.
US5072128A
Expired / Lapsed
US
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Defect inspecting apparatus using multiple color light to detect defects
Assignee: Nikon Corp
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Filing: 1990-07-20
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Granted: 1991-12-10
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Expires: 2010-07-20
Abstract
Abstract A defect inspecting apparatus for discriminating one of two surfaces of a flat transparent object such as a pericle. The flat object is irradiated with a beam of light which is supplied from a light source and which is multiple-color light having predetermined wavelength ranges or white light of a broad band, scattered light from the defect is received by an optical element having wavelength selectivity, and scattered lights thereby separated with respect to the particular wavelength ranges are photoelectrically detected. The intensities of photoelectric signals thereby obtained are compared with each other.
Inventors
- 👤 Fuminori Hayano
- 👤 Sunao Murata
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 20:27
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/94; G01J; G01J3/00; G01J3/28; G01J3/30; G01J3/36; G01N21/8806; G01N2021/8845; G01N21/8851; G01N2021/8854; G01N2021/8867; G01N2021/887; G01N21/89; G01N21/892; G01N21/896; G01N2021/8967
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
114 words
An apparatus for inspecting surfaces of a flat transparent object, comprising: means for directing multiple-color light having an intensity distribution through a predetermined wavelength range to one of the surfaces of the flat object to illuminate same; detection means for detecting scattered light produced by a defect existing on one of the surfaces of the flat object with respect to a plurality of different wavelength ranges, and for producing a plurality of outputs corresponding to the intensities of scattered light of the plurality of wavelength ranges; and means for discriminating the surface of the flat object on which the defect exists based on the comparison between the plurality of outputs from said detection means.
Claim 2
Independent Claim
114 words
An apparatus for inspecting surfaces of a flat transparent object, comprising: means for directing multiple-color light having an intensity distribution through a predetermined wavelength range to one of the surfaces of the flat object to illuminate same; detection means for detecting scattered light produced by a defect existing on one of the surfaces of the flat object with respect to a plurality of different wavelength ranges, and for producing a plurality of outputs corresponding to the intensities of scattered light of the plurality of wavelength ranges; and means for discriminating the surface of the flat object on which the defect exists based on the comparison between the plurality of outputs from said detection means.
Claim 3
Dependent Claim
26 words
An apparatus according to claim 1, wherein said detection means includes wavelength selection means for separating the scattered light with respect to the particular wavelength ranges.
Claim 4
Dependent Claim
26 words
An apparatus according to claim 2, wherein said detection means includes a plurality of photoelectric detectors for receiving respective lights separated by said wavelength selection means.
Claim 5
Independent Claim
140 words
An apparatus for inspecting surfaces of a flat transparent object, comprising: irradiation means for directing multiple-color light having an intensity distribution through a predetermined wavelength range to one of the surfaces of the flat object to illuminate same; first detection means for detecting the quantities of multiple-color light from said illumination means with respect to a plurality of wavelength ranges and for producing corresponding outputs; second detection means for detecting the quantities of scattered light produced by a defect existing on one of the surfaces of the flat object with respect to a plurality of different wavelength ranges generally equal to the wavelength ranges with which said first detection means effects the detection, and for producing corresponding outputs; and comparison means for comparing the outputs from said first and second detection means with respect to the plurality of wavelength ranges.
Claim 6
Independent Claim
140 words
An apparatus for inspecting surfaces of a flat transparent object, comprising: irradiation means for directing multiple-color light having an intensity distribution through a predetermined wavelength range to one of the surfaces of the flat object to illuminate same; first detection means for detecting the quantities of multiple-color light from said illumination means with respect to a plurality of wavelength ranges and for producing corresponding outputs; second detection means for detecting the quantities of scattered light produced by a defect existing on one of the surfaces of the flat object with respect to a plurality of different wavelength ranges generally equal to the wavelength ranges with which said first detection means effects the detection, and for producing corresponding outputs; and comparison means for comparing the outputs from said first and second detection means with respect to the plurality of wavelength ranges.
Claim 7
Dependent Claim
28 words
An apparatus according to claim 4, further comprising means for discriminating in response to said comparison means the surface of the flat object on which the defect exists.
Claim 8
Dependent Claim
61 words
An apparatus according to claim 4, wherein said first detection means includes first spectroscopic means for separating multiple-color from said irradiation means with respect to the plurality of wavelength ranges, and a plurality of detectors for detecting the quantities of light with respect to the plurality of wavelength ranges with which the multiple-color light is separated by said first spectroscopic means.
Claim 9
Dependent Claim
89 words
An apparatus according to claim 6, wherein said second detection means includes second spectroscopic means for separating the scattered light produced by the defect existing on the surface of that flat object with respect to a plurality of wavelength ranges generally equal to the wavelength ranges with which the multiple-color light is separated by said first spectroscopic means, and a plurality of detectors for detecting the quantities of light with respect to the plurality of wavelength ranges with which the scattered light is separated by said second spectroscopic means.
Claim 10
Dependent Claim
37 words
An apparatus according to claim 4, wherein said comparison means obtains the ratio of the output from said first detection means and the output from said second detection means with respect to the plurality of wavelength ranges.
Claim 11
Dependent Claim
35 words
An apparatus according to claim 8, further comprising means for discriminating the surface of the flat object on which the defect exists by comparing the ratios obtained by said comparison means between different wavelength ranges.
Claim 12
Independent Claim
210 words
An apparatus for inspecting surfaces of a flat transparent object, comprising: irradiation means for directing multiple-color light having an intensity distribution through a predetermined wavelength range to one of the surfaces of the flat object to illuminate same; a first light receiving system for receiving scattered light produced by a defect existing on one of the surfaces of the flat object in a direction at a predetermined angle to the surface of the flat object; a second light receiving system for receiving the scattered light in a direction at a angle to the surface of the flat object different from the angle at which said first light receiving system receives the scattered light; first detection means for detecting the quantity of scattered light received by said first light receiving system with respect to wavelength ranges according to predetermined spectral characteristics, and for outputting corresponding outputs; second detection means for detecting the quantity of scattered light received by said second light receiving system with respect to wavelength ranges according to substantially the same spectral characteristics as said first detection means; and comparison means for obtaining the ratio of the output from said first detection means and the output from said second detection means with respect to the plurality of wavelength ranges.
Claim 13
Independent Claim
210 words
An apparatus for inspecting surfaces of a flat transparent object, comprising: irradiation means for directing multiple-color light having an intensity distribution through a predetermined wavelength range to one of the surfaces of the flat object to illuminate same; a first light receiving system for receiving scattered light produced by a defect existing on one of the surfaces of the flat object in a direction at a predetermined angle to the surface of the flat object; a second light receiving system for receiving the scattered light in a direction at a angle to the surface of the flat object different from the angle at which said first light receiving system receives the scattered light; first detection means for detecting the quantity of scattered light received by said first light receiving system with respect to wavelength ranges according to predetermined spectral characteristics, and for outputting corresponding outputs; second detection means for detecting the quantity of scattered light received by said second light receiving system with respect to wavelength ranges according to substantially the same spectral characteristics as said first detection means; and comparison means for obtaining the ratio of the output from said first detection means and the output from said second detection means with respect to the plurality of wavelength ranges.
Claim 14
Dependent Claim
34 words
An apparatus according to claim 10, further comprising means for discriminating the surfaces of the flat object on which the defect exists based on the relationship between the ratios obtained by said comparison means.
Claim 15
Dependent Claim
34 words
An apparatus according to claim 10, wherein said irradiation means includes a single light source capable of supplying light having a continuous broad wavelength range or light having a plurality of discrete lime spectra.
Claim 16
Dependent Claim
41 words
An apparatus according to claim 10, wherein said irradiation means includes a plurality of light sources capable of supplying lights having different central wavelengths, and means for combining the lights from said plurality of light sources on a common optical axis.
Claim 17
Dependent Claim
56 words
An apparatus according to claim 10, wherein each of said first and second detection means includes a wavelength selecting element for separating the scattered light with respect to the wavelength ranges, and a plurality of photoelectric conversion elements for independently receiving the quantities of light of the respective wavelength ranges separated by said wavelength selecting means.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1994-12-09 | 1995-06-10 | 1995-12-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-12-09 | 1999-06-10 | 1999-12-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-12-09 | 2003-06-10 | 2003-12-10 | $7700.00 | Window Closed / Lapsed |