Patent US5071694A successfully refreshed from Google Patents.
US5071694A
Expired / Lapsed
US
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Multi-layer resist
Assignee: Kanegafuchi Chemical Industry Co Ltd
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Filing: 1990-02-20
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Granted: 1991-12-10
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Expires: 2010-02-20
Abstract
Abstract A multi-layer resist comprising (A) a layer of a Langmuir-Blodgett film, (B) a layer of at least one thin film and (C) a substrate, said layer (B) being placed between said layer, (A) and said substrate (C). The multi-layer resists of the invention are applicable to ultra fine processing on the order of submicron, half-micron or quarter-micron, and the number of defects can be remarkably decreased.
Inventors
- 👤 Masakazu Uekita
- 👤 Hiroshi Awaji
- 👤 Satoshi Mizunuma
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 12:59
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/094; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24942; Y10T428/2495; Y10T428/24967; Y10T428/24975; Y10T428/25; Y10T428/256; Y10T428/257; Y10T428/31504; Y10T428/31551; Y10T428/31645; Y10T428/31649; Y10T428/31678; Y10T428/31692; Y10T428/31699; Y10T428/31721
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
91 words
A multilayer resist comprising an uneven substrate layer (C); an intermediate layer (B), comprising at least one inorganic thin film, which is at least as thick as the greatest unevenness of said substrate, disposed on said substrate; and a Langmuir-Blodgett film layer (A) disposed on said intermediate layer remote from said substrate which has an uncovered surface which is sufficiently smoother than the surface of said substrate to at least reduce the number of defects therein as compared to an otherwise identical film which does not have said intermediate layer (B).
Claim 2
Dependent Claim
91 words
A multilayer resist comprising an uneven substrate layer (C); an intermediate layer (B), comprising at least one inorganic thin film, which is at least as thick as the greatest unevenness of said substrate, disposed on said substrate; and a Langmuir-Blodgett film layer (A) disposed on said intermediate layer remote from said substrate which has an uncovered surface which is sufficiently smoother than the surface of said substrate to at least reduce the number of defects therein as compared to an otherwise identical film which does not have said intermediate layer (B).
Claim 3
Dependent Claim
20 words
The resist of claim 1, wherein said thin film is prepared from an inorganic material soluble in an organic solvent.
Claim 4
Dependent Claim
40 words
The resist of claim 1, wherein said thin film is a two-layer film of a layer of a film prepared from an inorganic material and a layer of a film prepared from an organic polymer material having dry etching resistance.
Claim 5
Dependent Claim
58 words
A resist as claimed in claim 1 wherein said intermediate layer (B) comprises an organic polymer thin film second layer (B-2), which is resistant to dry etching, and is disposed on an uneven surface of said substrate, and an inorganic thin film first layer (B-1) disposed on said second layer (B-2) and proximate to said L-B layer (A).
Claim 6
Dependent Claim
19 words
A resist as claimed in claim 1 wherein said thin film is about 0.1 to 0.3 microns in thickness.
Claim 7
Dependent Claim
35 words
A resist as claimed in claim 4 wherein said inorganic thin film first layer is about 0.1 to 0.3 microns thick, and said organic thin film second layer is about 1 to 2 microns thick.
Claim 8
Dependent Claim
30 words
A resist as claimed in claim 4 wherein said inorganic thin film first layer comprises at least one member selected from the group consisting of aluminum oxide and silicon dioxide.
Claim 9
Dependent Claim
50 words
A resist as claimed in claim 4 wherein said organic thin film second layer comprises at least one member selected from the group consisting of polymethyl methacrylate, polyacrylate, polymethyl isopropenyl ketone, polyglycidyl methacrylate, polystyrene, polymethyl styrene, styrene-maleic anhydride copolymer, polyhydroxy styrene, phenol formaldehyde resin, cresol formaldehyde resin and polyimide resin.
Claim 10
Dependent Claim
34 words
A resist as claimed in claim 1 wherein said substrate is at least one member selected from glass, alumina, quartz, silicon, gallium arsenide, zinc sulfide, lead titanate, barium titanate, lithium niobate and lithium tantalate.
Claim 11
Dependent Claim
114 words
In a process for producing a multi-layer composite resist comprising applying a Langmuir-Blodgett film (A) on an uneven substrate (C), the improvement, whereby substantially reducing the number of defect sites in the surface of said composite resist which comprises: applying an intermediate layer inorganic film, of a thickness at least as great as the height of the unevenness of said substrate, to said substrate; then applying said Langmuir-Blodgett film to the surface of said intermediate layer remote from said substrate to produce an uncovered surface on said Langmuir-Blodgett film which is substantially smoother than it would have been without the interposition of said intermediate layer; and the recovering a composite resist having reduced defects.
Claim 12
Dependent Claim
114 words
In a process for producing a multi-layer composite resist comprising applying a Langmuir-Blodgett film (A) on an uneven substrate (C), the improvement, whereby substantially reducing the number of defect sites in the surface of said composite resist which comprises: applying an intermediate layer inorganic film, of a thickness at least as great as the height of the unevenness of said substrate, to said substrate; then applying said Langmuir-Blodgett film to the surface of said intermediate layer remote from said substrate to produce an uncovered surface on said Langmuir-Blodgett film which is substantially smoother than it would have been without the interposition of said intermediate layer; and the recovering a composite resist having reduced defects.
Claim 13
Dependent Claim
18 words
The process as claimed in claim 10 wherein said intermediate film is 0.1 to 0.3 micron in thickness.
Claim 14
Dependent Claim
23 words
The process as claimed in claim 10 wherein said intermediate film is at least one member selected from aluminum oxide and silicon dioxide.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-12-09 | 1995-06-10 | 1995-12-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-12-09 | 1999-06-10 | 1999-12-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-12-09 | 2003-06-10 | 2003-12-10 | $7700.00 | Window Closed / Lapsed |