Abstract An image sensor comprises a light-receiving element array, switching elements for transferring electric charges from the light-receiving element array, multilayer interconnection, load capacitors for storing the transferred electric charges, which includes one electrode which is an individual electrode and the other electrode which is a common electrode, the electrodes interposing an insulating layer therebetween, a drive IC for sequentially applying the electric charges, and common signal lines guiding the electric charges form capacitors to the drive IC. The image sensor is characterized in that, the individual electrode of the load capacitor constitutes an upper electrode, the common electrode of the load capacitor constitutes a lower electrode; and the insulating layer is formed of a high dielectric constant material. Therefore, the lower common electrode can be formed free from irregularities and the respective upper individual electrodes are also formed consistently. Further, the load capacitors can be formed small in size with a large capacitance.
An image sensor comprising: a light-receiving element array having a plurality of light-receiving elements; switching elements for transferring electric charges generated at said light-receiving elements every block consisting of a predetermined number of light-receiving elements; multilayer interconnection for transferring said electric charges; load capacitors, connected to said multilayer interconnection and arranged by a number corresponding to said predetermined number of light-receiving elements within said block, for storing said transferred electric charges, said load capacitors comprising one electrode which is an individual electrode and the other electrode which is a common electrode, said electrodes interpose an insulating layer therebetween; a drive IC for sequentially applying said electric charges stored by said load capacitors as voltage values; and common signal lines guiding said electric charges from said load capacitors to said drive IC; wherein said individual electrode of said load capacitor constitutes an upper electrode; said common electrode of said load capacitor constitutes a lower electrode; and said insulating layer is formed of a high dielectric constant material.
Claim 2
Dependent Claim
166 words
An image sensor comprising: a light-receiving element array having a plurality of light-receiving elements; switching elements for transferring electric charges generated at said light-receiving elements every block consisting of a predetermined number of light-receiving elements; multilayer interconnection for transferring said electric charges; load capacitors, connected to said multilayer interconnection and arranged by a number corresponding to said predetermined number of light-receiving elements within said block, for storing said transferred electric charges, said load capacitors comprising one electrode which is an individual electrode and the other electrode which is a common electrode, said electrodes interpose an insulating layer therebetween; a drive IC for sequentially applying said electric charges stored by said load capacitors as voltage values; and common signal lines guiding said electric charges from said load capacitors to said drive IC; wherein said individual electrode of said load capacitor constitutes an upper electrode; said common electrode of said load capacitor constitutes a lower electrode; and said insulating layer is formed of a high dielectric constant material.
Claim 3
Dependent Claim
58 words
An image sensor as claimed in claim 1 wherein said high dielectric constant material is selected from the group consisting of BaTiO 3 , Y 2 O 3 , Sm 2 O 3 , Ta 2 O 5 , Al 2 O 3 , BaTa 2 O 6 , PbNb 2 O 6 , and SrTiO 3 .
Claim 4
Dependent Claim
44 words
An image sensor as claimed in claim 1, wherein said light-receiving element array, said switching elements, said multilayer interconnection are formed on a first substrate, said load capacitors are formed on a second substrate, and said drive IC is formed on a third substrate.