Patent US5067218A successfully refreshed from Google Patents.
US5067218A
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Vacuum wafer transport and processing system and method using a plurality of wafer transport arms
Assignee: NXP USA Inc
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Filing: 1990-05-21
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Granted: 1991-11-26
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Expires: 2010-05-21
Abstract
Abstract A vacuum wafer transport and processing system and method includes a central vacuum chamber having wafer holding means disposed therein. A plurality of wafer transport arms are disposed between the central vacuum chamber and a plurality of wafer process chambers. The wafer transport arms transport wafers between the various process chambers and the central vacuum chamber so that multiple processing steps may be performed in a vacuum.
Inventors
- 👤 Owen P. Williams
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 17:20
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0451; H10P72/0452; H10P72/0454; H10P72/0462; H10P72/0464; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/137; Y10S414/139
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
75 words
A vacuum wafer transport and processing system comprising: a central vacumm chamber; wafer holding means disposes in said central vacuum chamber; a plurality of wafer transport arms to transfer wafers to and from said central vacuum chamber, each having a first end coupled to said central vacuum chamber and a second end; and a plurality of wafer process chambers coupled to said second ends of at least some of said plurality of wafer transport arms.
Claim 2
Dependent Claim
75 words
A vacuum wafer transport and processing system comprising: a central vacumm chamber; wafer holding means disposes in said central vacuum chamber; a plurality of wafer transport arms to transfer wafers to and from said central vacuum chamber, each having a first end coupled to said central vacuum chamber and a second end; and a plurality of wafer process chambers coupled to said second ends of at least some of said plurality of wafer transport arms.
Claim 3
Dependent Claim
22 words
The system of claim 1 wherein interchamber wafer transport arms are disposed between various members of the plurality of wafer process chambers.
Claim 4
Dependent Claim
63 words
The system of claim 1 wherein first valve means are disposed between the central vacuum chamber and the first ends of the plurality of wafer transport arms, said first valve means serving to seal said central vacuum chamber from said wafer transport arms and also to enable removal of said wafer transport arms from said central vacuum chamber while maintaining a vacuum therein.
Claim 5
Dependent Claim
68 words
The system of claim 3 wherein second valve means are disposed between the second ends of at least some of the wafer transport arms and the plurality of wafer process chambers, said second valve means serving to seal said wafer process chambers during processing and also to seal said wafer process chambers so that they may be removed from said wafer transport arms while maintaining a vacuum therein.
Claim 6
Dependent Claim
12 words
The system of claim 4 wherein wafer holding means are vertically movable.
Claim 7
Dependent Claim
15 words
The system of claim 4 wherein the plurality of wafer transport arms are vertically movable.
Claim 8
Dependent Claim
19 words
The system of claim 4 wherein members of the plurality of wafer transport arms are employed for wafer storage.
Claim 9
Dependent Claim
16 words
The system of claim 4 wherein the plurality of wafer transport arms are of varying lengths.
Claim 10
Dependent Claim
13 words
The system of claim 4 wherein non-vacuum equipment is coupled to said system.
Claim 11
Dependent Claim
21 words
The system of claim 4 wherein evacuation chambers are disposed between portions of members of the plurality of wafer transport arms.
Claim 12
Dependent Claim
190 words
A vacuum wafer transport and processing system comprising: a central vacuum chamber; wafer holding means disposed in said central vacuum chamber; a plurality of wafer transport arms to transfer wafers to and from said central vacuum chamber, each having a first end and a second end; first valve means disposed between and coupling said central vacuum chamber and said first ends of said plurality of wafer transport arms, said first valve means serving to seal said central vacuum chamber from said wafer transport arms and also to enable removal of said wafer transport arms from said central vacuum chamber while maintaining a vacumm therein; a plurality of wafer process chambers coupled to said second ends of at least some of said plurality of wafer transport arms; and second valve means disposed between and coupling said second ends of at least some of said wafer transport arms and said plurality of wafer process chambers, said second valve means serving to seal said wafer process chambers during processing and also to seal said wafer process chambers so that they may be removed from said wafer transport arms while maintaining a vacuum therein.
Claim 13
Dependent Claim
190 words
A vacuum wafer transport and processing system comprising: a central vacuum chamber; wafer holding means disposed in said central vacuum chamber; a plurality of wafer transport arms to transfer wafers to and from said central vacuum chamber, each having a first end and a second end; first valve means disposed between and coupling said central vacuum chamber and said first ends of said plurality of wafer transport arms, said first valve means serving to seal said central vacuum chamber from said wafer transport arms and also to enable removal of said wafer transport arms from said central vacuum chamber while maintaining a vacumm therein; a plurality of wafer process chambers coupled to said second ends of at least some of said plurality of wafer transport arms; and second valve means disposed between and coupling said second ends of at least some of said wafer transport arms and said plurality of wafer process chambers, said second valve means serving to seal said wafer process chambers during processing and also to seal said wafer process chambers so that they may be removed from said wafer transport arms while maintaining a vacuum therein.
Claim 14
Dependent Claim
24 words
The system of claim 11 wherein one or both of said wafer holding means and the plurality of wafer transport arms are vertically movable.
Claim 15
Dependent Claim
22 words
The system of claim 11 wherein interchamber wafer transport arms are disposed between various members of the plurality of wafer process chambers.
Claim 16
Dependent Claim
16 words
The system of claim 12 wherein the plurality of wafer transport arms are of varying lengths.
Claim 17
Dependent Claim
19 words
The system of claim 12 wherein members of the plurality of wafer transport arms are employed for wafer storage.
Claim 18
Dependent Claim
13 words
The system of claim 12 wherein non-vacuum equipment is coupled to said system.
Claim 19
Dependent Claim
21 words
The system of claim 12 wherein evacuation chambers are disposed between portions of members of the plurality of wafer transport arms.
Claim 20
Independent Claim
246 words
A method of transporting and processing wafers under vacuum comprising the steps of: providing at least one wafer to be processed; disposing said at least one wafer in a central vacuum chamber of a vacuum wafer transport and processing system, said system including wafer holding means disposed in said central vacuum chamber, a plurality of wafer transport arms to transfer said at least one wafer to and from said central vacuum chamber, each having a first end coupled to said central vacuum chamber and a second end, and a plurality of wafer process chambers coupled to said second ends of at least some of said plurality of wafer transport arms; transporting said at least one wafer from said central vacuum chamber to a first of said plurality of process chambers via one of said plurality of wafer transport arms; sealing said first of said plurality of after process chambers from said one of said plurality of wafer transport arms; performing a first process step on said at least one wafer in said first of said plurality of process chambers; transporting said at least one wafer from said first of said plurality of process chambers to a second of said plurality of process chambers, sealing said second of said plurality of process chamber and performing a second process step on said at least one wafer; and removing said at least one wafer from said second of said plurality of wafer process chambers following the second process step.
Claim 21
Independent Claim
246 words
A method of transporting and processing wafers under vacuum comprising the steps of: providing at least one wafer to be processed; disposing said at least one wafer in a central vacuum chamber of a vacuum wafer transport and processing system, said system including wafer holding means disposed in said central vacuum chamber, a plurality of wafer transport arms to transfer said at least one wafer to and from said central vacuum chamber, each having a first end coupled to said central vacuum chamber and a second end, and a plurality of wafer process chambers coupled to said second ends of at least some of said plurality of wafer transport arms; transporting said at least one wafer from said central vacuum chamber to a first of said plurality of process chambers via one of said plurality of wafer transport arms; sealing said first of said plurality of after process chambers from said one of said plurality of wafer transport arms; performing a first process step on said at least one wafer in said first of said plurality of process chambers; transporting said at least one wafer from said first of said plurality of process chambers to a second of said plurality of process chambers, sealing said second of said plurality of process chamber and performing a second process step on said at least one wafer; and removing said at least one wafer from said second of said plurality of wafer process chambers following the second process step.
Claim 22
Dependent Claim
32 words
The method of claim 18 further including employing an interchamber wafer transport arm to transport said at least one wafer directly between the first and second of the plurality of process chambers.
Claim 23
Dependent Claim
19 words
The method of claim 18 further including emloying members of the plurality of wafer transport arms for wafer storage.
Claim 24
Dependent Claim
27 words
The method of claim 18 further including performing non-vacuum steps on the at least one wafer by equipment coupled to the vacuum wafer transport and processing system.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-11-25 | 1995-05-27 | 1995-11-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-11-25 | 1999-05-27 | 1999-11-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-11-25 | 2003-05-27 | 2003-11-26 | $7700.00 | Window Closed / Lapsed |