US5065697A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Laser sputtering apparatus
Assignee: Panasonic Holdings Corp
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Filing: 1990-07-27
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Granted: 1991-11-19
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Expires: 2010-07-27
Abstract
Abstract A laser sputtering apparatus includes a vacuum chamber, a laser for radiating a laser beam, a vacuum sealing window arranged at the chamber for introducing the beam into the chamber, a film transporting device for transporting a film while the film is passing near the window and a substrate holder arranged opposite to the window with the film therebetween for holding a substrate. The film has high laser transmission and a surface over which material for a thin film to be formed on the substrate is deposited. The device transports the film while the surface of the film is opposed to the substrate. The laser beam sputters the material on the thin film onto the substrate.
Inventors
- 👤 Yoshikazu Yoshida
- 👤 Kunio Tanaka
- 👤 Yukio Nishikawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 06:59
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28; C23C14/246; C23C14/34
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
129 words
A laser sputtering apparatus, comprising: a vacuum chamber; a laser for radiating a laser beam; a vacuum sealing window disposed in said chamber for transmitting the laser beam from said laser into said chamber; a film transporting means for transporting a film in said chamber such that said film passes by said window, said film having a high laser transmission characteristic and a surface over which a material to be sputtered onto a substrate is deposited, said surface being directed toward a position of the substrate; a substrate holder arranged in said vacuum chamber facing said film and said window for holding the substrate; and an evaporation device arranged in said vacuum chamber for evaporating and depositing the material to be sputtered onto said film inside said vacuum chamber.
Claim 2
Dependent Claim
129 words
A laser sputtering apparatus, comprising: a vacuum chamber; a laser for radiating a laser beam; a vacuum sealing window disposed in said chamber for transmitting the laser beam from said laser into said chamber; a film transporting means for transporting a film in said chamber such that said film passes by said window, said film having a high laser transmission characteristic and a surface over which a material to be sputtered onto a substrate is deposited, said surface being directed toward a position of the substrate; a substrate holder arranged in said vacuum chamber facing said film and said window for holding the substrate; and an evaporation device arranged in said vacuum chamber for evaporating and depositing the material to be sputtered onto said film inside said vacuum chamber.
Claim 3
Dependent Claim
118 words
The laser sputtering apparatus of claim 1, wherein: a partition is provided in said vacuum chamber dividing said chamber into a depositing chamber wherein said evaporation device is disposed for depositing the material on said film and a sputtering chamber wherein said substrate holder and said vacuum sealing window are disposed for sputtering the material on said film onto the substrate with the laser beam of said laser, said film having the material thereon passing through said partition; a gas exhaust means connected to each of said depositing chamber and said sputtering chamber for exhausting the gas therefrom to generate a vacuum therein; and a reactive gas supply means for supplying a reactive gas to said sputtering chamber.
Claim 4
Dependent Claim
35 words
The sputtering apparatus of claim 1, wherein said film transporting means has a winding reel in said sputtering chamber for winding the film and an unwinding reel in said depositing chamber for unwinding the film.
Claim 5
Dependent Claim
51 words
The sputtering apparatus of claim 1, wherein an additional said evaporation device is arranged in said vacuum chamber for evaporating and depositing a second material to be sputtered onto the film inside said vacuum chamber, whereby alloys and compounds of the two materials can be formed by sputtering on the substrate.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-11-18 | 1995-05-20 | 1995-11-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-11-18 | 1999-05-20 | 1999-11-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-11-18 | 2003-05-20 | 2003-11-19 | $7700.00 | Window Closed / Lapsed |