Patent US5064989A successfully refreshed from Google Patents.
US5064989A
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US
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Surface shaping and finishing apparatus and method
Assignee: LEMELSON MEDICAL EDUCATION & RESEARCH FOUNDATION
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Filing: 1989-05-15
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Granted: 1991-11-12
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Expires: 2009-05-15
Abstract
Abstract A method for selectively operating on a substrate by radiation controlled and caused to scan a portion of the surface of an article in such a manner as to selectively produce changes in material at the substrate surface. Miniature explosions of small quantities of material, such as particles thereof, may be employed to erode or otherwise remove material from the surface of the substrate. The method may be carried out in a closed chamber having a controlled atmosphere or pumped free of air to effect control of an erosion process. In a specific embodiment, a narrow beam of collimated radiation effects a scanning movement across the substrate while synchronously controlling the operation of a beam generating mechanism to cause the narrow beam to selectively irradiate a select portion of the substrate surface producing a select physical change in select material of the substrate.
Inventors
- 👤 Jerome H. Lemelson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 00:16
CPC Classifications
B; B29; B29C; B29C45/00; B29C45/14; B29C45/14778; B22; B22C; B22C9/00; B22C9/06; B29C37/00; B29C37/0025; B29C37/0028; B29C37/0032; B29C41/00; B29C41/02; B29C41/08; B29C41/22; B29C41/34; B29C41/36; B29C41/38; B29C45/17; B29C45/1703; C; C03; C03B; C03B23/00; C03B23/02; C03B23/20; C03B23/203; C03B23/24; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/487; H; H01; H01J; H01J9/00; H01J9/24; H01J9/245; H01J9/247; B29C35/00; B29C35/02; B29C35/08; B29C35/0805; B29C2035/0838; B29C35/0866; B29C2035/0877; B29C2037/0039; B29C2795/00; B29C2795/002; B29C33/00; B29C33/02; B29C33/06; B29C41/04; B29C41/042; B29K; B29K2995/00; B29K2995/0018; B29K2995/002; B29K2995/0037; B29K2995/0087; B29L; B29L2031/00; B29L2031/30; B29L2031/3076; B29L2031/3085; H05; H05K; H05K1/00; H05K1/16; H05K1/162; H05K2203/00; H05K2203/03; H05K2203/0315; H05K2203/11; H05K2203/1142; H05K2203/17; H05K2203/175
Claims Analysis
Total Claims: 35
Claim 1
Independent Claim
178 words
A method for predeterminately operating on select separate portions of a substrate with radiation, said method comprising: (a) predeterminately relatively positioning a radiation beam generating means and a substrate a distance apart with respect to each other with a select portion of said substrate located to permit it to be intermittently operated on with radiation of said beam generating means, (b) intermittently generating radiation in the form of a narrow beam of collimated radiation by controllably energizing said beam generating means, (c) guiding said narrow radiation beam between said beam generating means and said substrate to cause said beam to travel a select path to said substrate, and (d) effecting controlled relative movement between said substrate and said beam generating means while controllably energizing said beam generating means in synchronization with said movement to cause the intermittently generated radiation of said beam to intersect and intermittently react on a plurality of select spaced-apart portions of said substrate in a manner to effect select changes in the material of each of said select portions intersected by said radiation beam.
Claim 2
Independent Claim
178 words
A method for predeterminately operating on select separate portions of a substrate with radiation, said method comprising: (a) predeterminately relatively positioning a radiation beam generating means and a substrate a distance apart with respect to each other with a select portion of said substrate located to permit it to be intermittently operated on with radiation of said beam generating means, (b) intermittently generating radiation in the form of a narrow beam of collimated radiation by controllably energizing said beam generating means, (c) guiding said narrow radiation beam between said beam generating means and said substrate to cause said beam to travel a select path to said substrate, and (d) effecting controlled relative movement between said substrate and said beam generating means while controllably energizing said beam generating means in synchronization with said movement to cause the intermittently generated radiation of said beam to intersect and intermittently react on a plurality of select spaced-apart portions of said substrate in a manner to effect select changes in the material of each of said select portions intersected by said radiation beam.
Claim 3
Dependent Claim
69 words
A method in accordance with claim 1 wherein said substrate is controllably moved along a plurality of axes with respect to said beam generating means while said narrow beam of collimated radiation is intermittently generated in synchronization with the movement of said substrate and is directed at select spaced-apart portions of the surface of said substrate to sequentially react on the material of said spaced-apart portions of said substrate.
Claim 4
Dependent Claim
44 words
A method in accordance with claim 1 wherein said intermittently generated narrow beam of collimated radiation is operable to change the shapes of said select portions of said substrate which are intersected by and intermittently reacted on by the radiation of said radiation beam.
Claim 5
Dependent Claim
47 words
A method in accordance with claim 3 wherein said change in shapes of said select portions of said substrate is defined by the formation of a plurality of spaced-apart cavities in the surface stratum of said substrate by means of the pulsed radiation of said narrow beam.
Claim 6
Dependent Claim
29 words
A method in accordance with claim 1 including synchronizing the intermittent generation of said beam with controlled multi-axis movement of said substrate with respect to said beam generating means.
Claim 7
Independent Claim
161 words
A method for operating on a substrate to diffuse material into a select portion of the surface stratum thereof, said method comprising: (a) predeterminately relatively positioning a beam generating means and a substrate of solid material a distance apart with respect to each other with a select portion of the surface of said substrate located to be intersected by radiation of said beam generating means, (b) disposing particles of matter to be selectively applied to a select portion of said substrate in the vicinity of said substrate, and (c) controllably operating said beam generating means to cause it to generate and direct a beam of collimated radiation against said particles and said select portion of said substrate, which radiation is of sufficient intensity to cause matter of said particles disposed in the vicinity of said substrate to be forced by the radiation of said beam to diffuse into a select portion of the material of the surface stratum of said substrate.
Claim 8
Independent Claim
161 words
A method for operating on a substrate to diffuse material into a select portion of the surface stratum thereof, said method comprising: (a) predeterminately relatively positioning a beam generating means and a substrate of solid material a distance apart with respect to each other with a select portion of the surface of said substrate located to be intersected by radiation of said beam generating means, (b) disposing particles of matter to be selectively applied to a select portion of said substrate in the vicinity of said substrate, and (c) controllably operating said beam generating means to cause it to generate and direct a beam of collimated radiation against said particles and said select portion of said substrate, which radiation is of sufficient intensity to cause matter of said particles disposed in the vicinity of said substrate to be forced by the radiation of said beam to diffuse into a select portion of the material of the surface stratum of said substrate.
Claim 9
Dependent Claim
41 words
A method in accordance with claim 6 including effecting controlled relative scanning movement between said beam of collimated radiation and said substrate to cause matter of said particles to be diffused into the material of the surface stratum of said substrate.
Claim 10
Dependent Claim
27 words
A method in accordance with claim 1 wherein said controlled relative scanning movement is effected by controllably moving said substrate with respect to said beam generating means.
Claim 11
Dependent Claim
20 words
A method in accordance with claim 7 wherein said controlled relative scanning movement is effected by controllably moving said beam.
Claim 12
Independent Claim
66 words
A method for depositing matter onto a substrate, said method comprising: (a) generating a beam of intense radiation, (b) directing said intense radiation beam against solid matter, (c) vaporizing material of said solid matter with radiation of said beam to form a vapor thereof, and (d) causing a portion of the vapor of said matter to impinge and deposit on a select portion of said substrate.
Claim 13
Independent Claim
66 words
A method for depositing matter onto a substrate, said method comprising: (a) generating a beam of intense radiation, (b) directing said intense radiation beam against solid matter, (c) vaporizing material of said solid matter with radiation of said beam to form a vapor thereof, and (d) causing a portion of the vapor of said matter to impinge and deposit on a select portion of said substrate.
Claim 14
Dependent Claim
28 words
A method in accordance with claim 10 wherein said radiation beam is employed to form particles of said solid matter and to deposit said particles onto said substrate.
Claim 15
Dependent Claim
33 words
A method in accordance with claim 10 wherein said radiation beam is directed to cause particles of matter from said vapor to deposit onto a select portion of the surface of said substrate.
Claim 16
Dependent Claim
20 words
A method in accordance with claim 10 wherein particles of matter from said vapor form a coating on said substrate.
Claim 17
Dependent Claim
31 words
A method in accordance with claim 10 wherein particles of said matter are selectively applied to said substrate to form a plurality of elements of an electrical circuit on said substrate.
Claim 18
Dependent Claim
34 words
A method in accordance with claim 10 wherein particles of said matter from said vapor are selectively applied to said substrate to form a plurality of elements of an electrical circuit on said substrate.
Claim 19
Dependent Claim
35 words
A method in accordance with claim 10 wherein select portions of said vapor are selectively applied by said beam of radiation to select portions of said substrate to form a plurality of electrical circuit elements.
Claim 20
Independent Claim
63 words
A method for operating on solid matter in the form of a substrate, said method comprising: a) generating intense radiation, b) directing said intense radiation at a plurality of select separate areas of a surface of a solid substrate, and c) apply said radiation to effect controlled physical changes in the material of said select separate areas of said surface of said substrate.
Claim 21
Independent Claim
63 words
A method for operating on solid matter in the form of a substrate, said method comprising: a) generating intense radiation, b) directing said intense radiation at a plurality of select separate areas of a surface of a solid substrate, and c) apply said radiation to effect controlled physical changes in the material of said select separate areas of said surface of said substrate.
Claim 22
Dependent Claim
18 words
A method in accordance with claim 17 wherein said radiation is generated as a beam of collimated radiation.
Claim 23
Dependent Claim
20 words
A method in accordance with claim 18 including scanning said select areas of said substrate with said collimated radiation beam.
Claim 24
Dependent Claim
20 words
A method in accordance with claim 19 wherein said scanning is effected by controllably deflecting said beam of collimated radiation.
Claim 25
Dependent Claim
25 words
A method in accordance with claim 19 wherein said scanning is effected by controllably moving said substrate with respect to said beam of collimated radiation.
Claim 26
Independent Claim
138 words
A method for selectively scanning the surface of a substrate with radiation to fabricate said substrate, said method comprising: a) predeterminately relatively positioning a laser beam generating means and a substrate a distance apart with respect to each other to permit the beam of said beam generating means to intersect a select portion of a surface of the substrate, b) generating a narrow beam of collimated laser radiation by controllably energizing said laser beam generating means, c) effecting controlled relative scanning movement between said beam generating means and said substrate while synchronously controlling the operation of said beam generating means to cause said narrow beam to be pulsed and to selectively irradiate a select portion of the surface of said substrate with pulsed radiation producing a select physical change in material of said select portion of said substrate.
Claim 27
Independent Claim
138 words
A method for selectively scanning the surface of a substrate with radiation to fabricate said substrate, said method comprising: a) predeterminately relatively positioning a laser beam generating means and a substrate a distance apart with respect to each other to permit the beam of said beam generating means to intersect a select portion of a surface of the substrate, b) generating a narrow beam of collimated laser radiation by controllably energizing said laser beam generating means, c) effecting controlled relative scanning movement between said beam generating means and said substrate while synchronously controlling the operation of said beam generating means to cause said narrow beam to be pulsed and to selectively irradiate a select portion of the surface of said substrate with pulsed radiation producing a select physical change in material of said select portion of said substrate.
Claim 28
Dependent Claim
40 words
A method in accordance with claim 22 wherein said synchronous control of the operation of said beam generating means and said control of relative scanning movement between said beam generating means and said substrate is effected by a master controller.
Claim 29
Dependent Claim
41 words
A method in accordance with claim 22 wherein the steps of synchronously controlling the operation of said beam generating means and said controlled scanning movement between said beam generating means on said substrate is affected by means of an electronic computer.
Claim 30
Independent Claim
181 words
A method for predeterminately operating on select separate portions of a substrate with radiation comprising: a) predeterminately relatively positioning a beam generating means and a substrate a distance apart with respect to each other wherein a select portion of said substrate is located to be operated on with radiation of the beam of said beam generating means, b) intermittently generating a narrow beam of collimated radiation by controllably energizing said beam generating means, c) guiding said narrow beam to cause it to travel a select path between said beam generating means and said substrate, and d) effecting controlled multi-axes movement of said substrate with respect to said beam generating means while controllably energizing said beam generating means while controllably energizing said beam generating means in synchronization with said movement to cause said intermittently generated radiation beam to intersect select spaced-apart portions of said substrate in a manner to effect select changes in the material of the outer stratum of said select portions of said substrate intersected by said radiation beam as said substrate moves with respect to said beam generating means.
Claim 31
Independent Claim
181 words
A method for predeterminately operating on select separate portions of a substrate with radiation comprising: a) predeterminately relatively positioning a beam generating means and a substrate a distance apart with respect to each other wherein a select portion of said substrate is located to be operated on with radiation of the beam of said beam generating means, b) intermittently generating a narrow beam of collimated radiation by controllably energizing said beam generating means, c) guiding said narrow beam to cause it to travel a select path between said beam generating means and said substrate, and d) effecting controlled multi-axes movement of said substrate with respect to said beam generating means while controllably energizing said beam generating means while controllably energizing said beam generating means in synchronization with said movement to cause said intermittently generated radiation beam to intersect select spaced-apart portions of said substrate in a manner to effect select changes in the material of the outer stratum of said select portions of said substrate intersected by said radiation beam as said substrate moves with respect to said beam generating means.
Claim 32
Dependent Claim
54 words
A method in accordance with claim 25 wherein said substrate is controllably moved along a plurality of axes which are substantially normal to each other and with respect to said radiation beam intersecting said substrate while said beam is intermittently generated and directed to intersect a select path along the surface of said substrate.
Claim 33
Dependent Claim
42 words
A method in accordance with claim 25, wherein said intermittently generated narrow beam of collimated radiation is operable to form a plurality of cavities in the surface stratum of said substrate along spaced-apart portions thereof which are intersected by said radiation beam.
Claim 34
Independent Claim
132 words
A method for selectively scanning the surface of a substrate with radiation to fabricate said substrate, said method comprising: a) predeterminately relatively positioning a beam generating means and a substrate a distance apart with respect to each other to permit the beam of said beam generating means to intersect a select portion of a surface of said substrate, b) generating a narrow beam of collimated radiation by controllably energizing said beam generating means, and c) effecting controlled relative scanning movement between said beam generating means and said substrate while synchronously controlling the operation of said beam generating means with such controlled relative scanning movement to cause said narrow beam to predeterminately irradiate select portions of said substrate surface producing select physical changes in the material of said select portions of said substrate.
Claim 35
Independent Claim
132 words
A method for selectively scanning the surface of a substrate with radiation to fabricate said substrate, said method comprising: a) predeterminately relatively positioning a beam generating means and a substrate a distance apart with respect to each other to permit the beam of said beam generating means to intersect a select portion of a surface of said substrate, b) generating a narrow beam of collimated radiation by controllably energizing said beam generating means, and c) effecting controlled relative scanning movement between said beam generating means and said substrate while synchronously controlling the operation of said beam generating means with such controlled relative scanning movement to cause said narrow beam to predeterminately irradiate select portions of said substrate surface producing select physical changes in the material of said select portions of said substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-11-11 | 1995-05-13 | 1995-11-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-11-11 | 1999-05-13 | 1999-11-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-11-11 | 2003-05-13 | 2003-11-12 | $7700.00 | Window Closed / Lapsed |