Patent US5064337A successfully refreshed from Google Patents.
US5064337A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Handling apparatus for transferring carriers and a method of transferring carriers
Assignee: Tokyo Electron Ltd
•
Filing: 1990-07-12
•
Granted: 1991-11-12
•
Expires: 2010-07-12
Abstract
Abstract A handling apparatus, used for handling a carrier of semiconductor wafers, comprises a first mechanism for transferring a carrier between a loader/unloader table and a storage compartment, and a second mechanism, for moving the first mechanism in both vertical and horizontal directions. The first mechanism includes an arm, a loading portion for loading the carrier, and an arm-rocking mechanism. The second mechanism moves the first mechanism to the loader/unloader table, picks up the carrier, and then moves the first mechanism to the storage compartment, where the arm is rocked, so as to discharge the object from the loading portion.
Inventors
- 👤 Teruo Asakawa
- 👤 Tetsu Ohsawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 12:03
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/34; H10P72/3404; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/14
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
144 words
A handling apparatus operable in a clean room, comprising: transferring means for transferring a box-like carrier between a storage compartment and a loading/unloading stage in said clean room, said transferring means including an arm member which has a prongshaped loading portion by means of which said arm member picks up the box-like carrier and a main arm portion curved like a boomerang; rocking means, provided in a portion which is lower than said prongshaped loading portion, for rocking said arm member; and moving means for moving said transferring means to the loading/unloading stage, picking up the box-like carrier placed on the loading/unloading stage, moving the carrier so as to be overhead of the rocking means via said arm member, and moving said transferring means to the storage compartment where the arm member is rocked so as to discharge the carrier from the loading portion.
Claim 2
Dependent Claim
144 words
A handling apparatus operable in a clean room, comprising: transferring means for transferring a box-like carrier between a storage compartment and a loading/unloading stage in said clean room, said transferring means including an arm member which has a prongshaped loading portion by means of which said arm member picks up the box-like carrier and a main arm portion curved like a boomerang; rocking means, provided in a portion which is lower than said prongshaped loading portion, for rocking said arm member; and moving means for moving said transferring means to the loading/unloading stage, picking up the box-like carrier placed on the loading/unloading stage, moving the carrier so as to be overhead of the rocking means via said arm member, and moving said transferring means to the storage compartment where the arm member is rocked so as to discharge the carrier from the loading portion.
Claim 3
Dependent Claim
24 words
The handling apparatus according to claim 1, wherein said means for moving said means for transferring said carrier includes vertical and horizontal moving means.
Claim 4
Dependent Claim
28 words
The handling apparatus according to claim 1, wherein a contact preventive sensor and a sensor for confirming the presence of an object are attached to the loading portion.
Claim 5
Dependent Claim
53 words
The handling apparatus according to claim 1, wherein said loading portion is configured such that the arm member has a finger extending at right angles therefrom and said loading portion is capable of holding a picked-up object without allowing it to fall, even when the held position of the picked-up object is changed.
Claim 6
Dependent Claim
21 words
The handling apparatus according to claim 1, wherein said arm member is contoured so as to have a smooth aerofoil shape.
Claim 7
Dependent Claim
25 words
The handling apparatus according to claim 2, wherein said vertical moving means and said rocking means are contoured so as to have a streamlined shape.
Claim 8
Dependent Claim
21 words
The handling apparatus according to claim 1, wherein a direct driving mechanism is used as means for rocking said arm member.
Claim 9
Dependent Claim
22 words
The handling apparatus according to claim 1, wherein a wrapping connector driving mechanism is used as means for rocking said arm member.
Claim 10
Dependent Claim
20 words
The handling apparatus according to claim 2, wherein a ball screw and a nut are used as vertical moving means.
Claim 11
Dependent Claim
18 words
The handling apparatus according to claim 2, wherein a gear driving mechanism is used as horizontal driving means.
Claim 12
Dependent Claim
18 words
The handling apparatus according to claim 2, wherein a gear driving mechanism is used as vertical moving means.
Claim 13
Dependent Claim
19 words
The handling apparatus according to claim 2, wherein a linear guide mechanism is provided for the vertical moving means.
Claim 14
Dependent Claim
19 words
The handling apparatus according to claim 2, wherein a linear guide mechanism is provided for the horizontal moving means.
Claim 15
Dependent Claim
20 words
The handling apparatus according to claim 2, wherein a wrapping connector driving mechanism is provided for the horizontal moving means.
Claim 16
Dependent Claim
16 words
The handling apparatus according to claim 1, wherein said transferring means is mounted on a carriage.
Claim 17
Dependent Claim
24 words
The handling apparatus according to claim 1, wherein the transferring means is mounted on a carriage and said carriage is guided along a rail.
Claim 18
Dependent Claim
30 words
The apparatus according to claim 1, which comprises vertical movement means wherein said arm member comprises a pair of parallel arms connected at one end to said vertical movement means.
Claim 19
Independent Claim
268 words
A method for transferring box-like carriers by use of a handling apparatus in a clean room, comprising: means for transferring a box-like carrier between a storage compartment and a loading/unloading stage in said clean room, said means for transferring said carrier including an arm member which has a prongshaped loading portion by means of which said arm member picks up the box-like carrier and a main arm portion curved like a boomerang; rocking means, provided in a portion which is lower than said prongshaped loading portion, for rocking said arm member; and moving means for moving said transferring means to the loading/unloading stage, picking up the box-like carrier placed in the loading/unloading stage, moving the carrier so as to be overhead of the rocking means via said arm member, and moving said transferring means to the storage compartment where the arm member is rocked so as to discharge the carrier from the loading portion, said method comprising the steps of: picking up at least one of a plurality of box-like carriers placed on the loading/unloading stage and loading the picked-up carrier onto the loading portion of the means for transferring said carrier, bu use of the means for moving said means for transferring said carrier and rocking means; moving the carrier from the loading/unloading stage to the storage compartment, bu use of the means for moving said means for transferring said carrier, while making the rocking means unswayable; and discharging the picked-up carrier from the loading portion in the stage compartment, bu use of said means for moving said means for transferring said carrier and said rocking means.
Claim 20
Independent Claim
268 words
A method for transferring box-like carriers by use of a handling apparatus in a clean room, comprising: means for transferring a box-like carrier between a storage compartment and a loading/unloading stage in said clean room, said means for transferring said carrier including an arm member which has a prongshaped loading portion by means of which said arm member picks up the box-like carrier and a main arm portion curved like a boomerang; rocking means, provided in a portion which is lower than said prongshaped loading portion, for rocking said arm member; and moving means for moving said transferring means to the loading/unloading stage, picking up the box-like carrier placed in the loading/unloading stage, moving the carrier so as to be overhead of the rocking means via said arm member, and moving said transferring means to the storage compartment where the arm member is rocked so as to discharge the carrier from the loading portion, said method comprising the steps of: picking up at least one of a plurality of box-like carriers placed on the loading/unloading stage and loading the picked-up carrier onto the loading portion of the means for transferring said carrier, bu use of the means for moving said means for transferring said carrier and rocking means; moving the carrier from the loading/unloading stage to the storage compartment, bu use of the means for moving said means for transferring said carrier, while making the rocking means unswayable; and discharging the picked-up carrier from the loading portion in the stage compartment, bu use of said means for moving said means for transferring said carrier and said rocking means.
Claim 21
Dependent Claim
23 words
The method of transferring carriers according to claim 18, wherein a single handling apparatus transfers two or more carriers at the same time.
Claim 22
Dependent Claim
50 words
The method according to claim 18, wherein while the box-like carrier is transferred by said means for transferring said carrier, an inclination of the carrier is changed in accordance with a direction of flow of clean air, so as to decrease air resistance to the carrier during the transfer thereof.
References Cited (Backward Citations)
NL275269A
Cited
US3185320A
Cited
US3822025A
Cited
US4016987A
Cited
JPS5320268A
Cited
JPS5320263A
Cited
JPS5552802A
Cited
JPS5648309A
Cited
US4364706A
Cited
DD159317A1
Cited
US4766322A
Cited
JPS61124404A
Cited
JPS61127502A
Cited
US4708566A
Cited
US4659281A
Cited
US4802809A
Cited
US4735539A
Cited
US4770590A
Cited
US4726725A
Cited
US4867629A
Cited
US4775281A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-11-11 | 1995-05-13 | 1995-11-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-11-11 | 1999-05-13 | 1999-11-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-11-11 | 2003-05-13 | 2003-11-12 | $7700.00 | Window Closed / Lapsed |