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US5061068A
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Process for detection of sub-micron particulate contamination on a bare (planar) substrate
Assignee: RTI International
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Filing: 1990-02-22
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Granted: 1991-10-29
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Expires: 2010-02-22
Abstract
Abstract Particular contamination below about 0.3 microns in average diameter on an IC wafer substrate is detected by forming a film of a volatile liquid on the wafer's surface and observing interference patterns formed by particles during the evaporation process. These interference patterns magnify the "effective" particle size many times, making detection through an optical microscope possible.
Inventors
- 👤 Venugopal B. Menon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 16:26
CPC Classifications
G; G02; G02B; G02B27/00; G02B27/58; G01; G01N; G01N15/00; G01N15/02; G01N15/0205; G01N13/00; G01N2015/0238; G01N21/00; G01N21/84; G01N21/88; G01N21/94
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
100 words
A process for the detection of sub-micron particles on the surface of a substrate, comprising: forming a film of a low-boiling liquid alcohol on said substrate surface, elevating the temperature of said surface so as to cause slow evaporation of said film, shining light through said film and observing said light as said film evaporates to detect interference patterns formed in said film, wherein said interference patterns correspond to a particle on said surface, wherein interference patterns which occur early in the evaporation process correspond to particles larger than those indicated by interference patterns occurring later in the evaporation process.
Claim 2
Dependent Claim
100 words
A process for the detection of sub-micron particles on the surface of a substrate, comprising: forming a film of a low-boiling liquid alcohol on said substrate surface, elevating the temperature of said surface so as to cause slow evaporation of said film, shining light through said film and observing said light as said film evaporates to detect interference patterns formed in said film, wherein said interference patterns correspond to a particle on said surface, wherein interference patterns which occur early in the evaporation process correspond to particles larger than those indicated by interference patterns occurring later in the evaporation process.
Claim 3
Dependent Claim
12 words
The process of claim 1, wherein said alcohol is a C1-6 alcohol.
Claim 4
Dependent Claim
15 words
The process of claim 2, wherein said alcohol is ethanol, isopropanol or a mixture thereof.
Claim 5
Dependent Claim
18 words
The process of claim 1, wherein said observation is recorded visually and employed to monitor the evaporation process.
Claim 6
Dependent Claim
28 words
The process of claim 1, wherein said observation is recorded in digital form, and the number, time and size of each interference pattern is determined by computing means.
Claim 7
Dependent Claim
12 words
The process of claim 1, wherein said substrate is comprised of silicon.
Claim 8
Dependent Claim
16 words
The process of claim 1, wherein said particles are less than 0.3 microns in average diameter.
Claim 9
Dependent Claim
20 words
The process of claim 1, wherein said film is formed by condensation of vapor of said liquid on said surface.
Claim 10
Dependent Claim
17 words
The process claim 8, wherein said vapor is purified prior to film formation to remove particulates therefrom.
References Cited (Backward Citations)
US3767306A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1994-10-28 | 1995-04-29 | 1995-10-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-10-28 | 1999-04-29 | 1999-10-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-10-28 | 2003-04-29 | 2003-10-29 | $7700.00 | Window Closed / Lapsed |