US5055679A
Expired / Lapsed
US
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Surface analysis method and apparatus
Assignee: Hitachi Ltd
•
Filing: 1990-01-03
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Granted: 1991-10-08
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Expires: 2010-01-03
Abstract
Abstract A method of and an apparatus for analyzing a surface are disclosed, in which the intensity profile of a probe beam at the surface of a sample is measured, the intensity distribution of a detection signal along the surface of the sample is measured by scanning the surface of the sample with the probe beam, and mathematical transformation is carried out for each of the measured intensity profile and the measured signal-intensity distribution, to make surface analysis with high resolution.
Inventors
- 👤 Ken Ninomiya
- 👤 Keizo Suzuki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 16:44
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/62; G01N21/63; G01N23/00; G01N23/22; G01N21/17; G01N2021/178; G01N21/1702; G01N2201/00; G01N2201/10; G01N2201/103; G01N2201/1035; G01N2223/00; G01N2223/10; G01N2223/30; G01N2223/33; G01N2223/345; G01N23/2209
Claims Analysis
Total Claims: 36
Claim 1
Independent Claim
71 words
A method of analyzing a surface by using a probe beam, comprising the steps of: measuring the intensity profile of a probe beam at the surface of a sample; measuring the distribution of a detected signal along the surface of the sample by scanning the surface of the sample with the probe beam; and carrying out mathematic transformation for each of the intensity profile and the distribution of the detected signal.
Claim 2
Independent Claim
71 words
A method of analyzing a surface by using a probe beam, comprising the steps of: measuring the intensity profile of a probe beam at the surface of a sample; measuring the distribution of a detected signal along the surface of the sample by scanning the surface of the sample with the probe beam; and carrying out mathematic transformation for each of the intensity profile and the distribution of the detected signal.
Claim 3
Dependent Claim
19 words
A method of analyzing a surface as claimed in claim 1, wherein the probe beam is an electron beam.
Claim 4
Dependent Claim
19 words
A method of analyzing a surface as claimed in claim 1, wherein the probe beam is an ion beam.
Claim 5
Dependent Claim
20 words
A method of analyzing a surface as claimed in claim 1, wherein the probe beam is a neutral particle beam.
Claim 6
Dependent Claim
19 words
A method of analyzing a surface as claimed in claim 1, wherein the probe beam is a light beam.
Claim 7
Dependent Claim
23 words
A method of analyzing a surface as claimed in claim 1, wherein the probe beam are focused on the surface of the sample.
Claim 8
Dependent Claim
33 words
A method of analyzing surface as claimed in claim 6, wherein the detected signal is obtained by detecting electrons which are generated by irradiating the surface of the sample with the probe beam.
Claim 9
Dependent Claim
34 words
A method of analyzing a surface as claimed in claim 6, wherein the detected signal is obtained by detecting ions which are generated by irradiating the surface of the sample with the probe beam.
Claim 10
Dependent Claim
35 words
A method of analyzing a surface as claimed in claim 6, wherein the detected signal is obtained by detecting neutral particles which are generated by irradiating the surface of the sample with the probe beam.
Claim 11
Dependent Claim
34 words
A method of analyzing a surface as claimed in claim 6, wherein the detected signal is obtained by detecting light which is generated by irradiating the surface of the sample with the probe beam.
Claim 12
Dependent Claim
28 words
A method of analyzing a surface as claimed in claim 6, wherein the detected signal is obtained by detecting the probe beam which has passed through the sample.
Claim 13
Dependent Claim
34 words
A method of analyzing a surface as claimed in claim 6, wherein the detected signal is obtained by detecting the probe beam which has been reflected or scattered from the surface of the sample.
Claim 14
Dependent Claim
55 words
A method of analyzing a surface as claimed in claim 6, wherein the detected signal is obtained by detecting a current which is generated by irradiating the surface of the sample with the probe beam or by detecting a sound wave which is generated by irradiating the surface of the sample with the probe beam.
Claim 15
Dependent Claim
25 words
A method of analyzing a surface as claimed in claim 6, wherein the surface of the sample is scanned probe beam by moving the sample.
Claim 16
Dependent Claim
28 words
A method of analyzing a surface as claimed in claim 6, wherein the surface of the sample is scanned with the probe beam by deflecting the probe beam.
Claim 17
Dependent Claim
33 words
A method of analyzing a surface as claimed in claim 6, wherein the surface of the sample is scanned with the probe beam by changing a position where the probe beam is generated.
Claim 18
Dependent Claim
29 words
A method of analyzing a surface as claimed in claim 6, wherein the probe beam is directed to the surface of the sample so that grazing incidence is realized.
Claim 19
Independent Claim
103 words
An apparatus for analyzing a surface, comprising: means for generating a probe beam; means for irradiating the surface of a sample with the probe beam; means for measuring the intensity profile of the probe beam at the surface of the sample; means for scanning the surface of the sample with the probe beam; means for detecting a signal caused by irradiating the surface of the sample with the probe beam, and for measuring the distribution of the signal along the surface of the sample; and means for carrying out mathematical transformation for each of the measured intensity profile and the measured signal distribution.
Claim 20
Independent Claim
103 words
An apparatus for analyzing a surface, comprising: means for generating a probe beam; means for irradiating the surface of a sample with the probe beam; means for measuring the intensity profile of the probe beam at the surface of the sample; means for scanning the surface of the sample with the probe beam; means for detecting a signal caused by irradiating the surface of the sample with the probe beam, and for measuring the distribution of the signal along the surface of the sample; and means for carrying out mathematical transformation for each of the measured intensity profile and the measured signal distribution.
Claim 21
Dependent Claim
19 words
An apparatus for analyzing a surface as claimed in claim 18, wherein the probe beam is an electron beam.
Claim 22
Dependent Claim
19 words
An apparatus for analyzing a surface as claimed in claim 18, wherein the probe beam is an ion beam.
Claim 23
Dependent Claim
20 words
An apparatus for analyzing a surface as claimed in claim 18, wherein the probe beam is a neutral particle beam.
Claim 24
Dependent Claim
19 words
An apparatus for analyzing a surface as claimed in claim 18, wherein the probe beam is a light beam.
Claim 25
Dependent Claim
25 words
An apparatus for analyzing a surface as claimed in claim 18, further comprising means for focusing the probe beam on the surface of the sample.
Claim 26
Dependent Claim
32 words
An apparatus for analyzing a surface as claimed in claim 23, wherein the signal detection means detects electrons which are generated by irradiating the surface of the sample with the probe beam.
Claim 27
Dependent Claim
32 words
An apparatus for analyzing a surface as claimed in claim 23, wherein the signal detection means detects ions which are generated by irradiating the surface of the sample with the probe beam.
Claim 28
Dependent Claim
33 words
An apparatus for analyzing a surface as claimed in claim 23, wherein the signal detection means detects neutral particles which are generated by irradiating the surface of the sample with the probe beam.
Claim 29
Dependent Claim
32 words
An apparatus for analyzing a surface as claimed in claim 23, wherein the signal detection means detects light which is generated by irradiating the surface of the sample with the probe beam.
Claim 30
Dependent Claim
26 words
An apparatus for analyzing a surface as claimed in claim 23, wherein the signal detection means detects the probe beam which has passed through the sample.
Claim 31
Dependent Claim
32 words
An apparatus for analyzing a surface as claimed in claim 23, wherein the signal detection means detects the probe beam which has been reflected or scattered from the surface of the sample.
Claim 32
Dependent Claim
52 words
An apparatus for analyzing a surface as claimed in claim 23, wherein the signal detection means detects a current which is generated by irradiating the surface of the sample with the probe beam or detects a sound wave which is generated by irradiating the surface of the sample with the probe beam.
Claim 33
Dependent Claim
27 words
An apparatus for analyzing a surface as claimed in claim 23, wherein the surface of the sample is scanned with the probe beam by moving the sample.
Claim 34
Dependent Claim
28 words
An apparatus for analyzing a surface as claimed in claim 23, wherein the surface of the sample is scanned with the probe beam by deflecting the probe beam.
Claim 35
Dependent Claim
33 words
An apparatus for analyzing a surface as claimed in claim 23, wherein the surface of the sample is scanned with the probe beam by changing a position where the probe beam is generated.
Claim 36
Dependent Claim
31 words
An apparatus for analyzing a surface as claimed in claim 23, further comprising means for changing an angle, at which the probe beam is incident on the surface of the sample.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-10-07 | 1995-04-08 | 1995-10-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-10-07 | 1999-04-08 | 1999-10-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-10-07 | 2003-04-08 | 2003-10-08 | $7700.00 | Window Closed / Lapsed |