US5055445A
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Method of forming oxidic high Tc superconducting materials on substantially lattice matched monocrystalline substrates utilizing liquid phase epitaxy
Assignee: Northrop Grumman Guidance and Electronics Co Inc
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Filing: 1989-09-25
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Granted: 1991-10-08
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Expires: 2009-09-25
Abstract
Abstract A method of forming an epitaxial layer of an oxidic high T c superconductor on a substantially lattice matched monocrystalline substrate is described. The film is formed by liquid phase epitaxy utilizing a melt containing a nutriment composed of oxides of each element of the oxidic superconductor and a non-oxidic flux for such oxides. The preferred flux is an alkali halide. The monocrystalline substrate on which the film is dsposited is introduced into the melt and an epitaxial layer of oxidic superconductor is formed on the substrate.
Inventors
- 👤 Roger F. Belt
- 👤 John B. Ings
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 23:14
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0576; H10N60/0604; C; C30; C30B; C30B19/00; C30B19/02; C30B29/00; C30B29/10; C30B29/16; C30B29/22; C30B29/225; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/729
Claims Analysis
Total Claims: 48
Claim 1
Independent Claim
101 words
In a method of forming an epitaxial layer of an oxidic high T c superconductor on a substantially lattice matched monocrystalline substrate the improvement which comprises: a) forming a melt wherein the primary phase to crystallize out on cooling of the melt to effect film growth is the phase of the high T c oxidic superconductor, said melt comprising a nutriment composed of oxides of each element of said oxidic superconductor and a non-oxidic flux for said oxides; b) introducing the substrate into the melt; and c) cooling the melt to deposit an epitaxial layer of oxidic superconductor on said substrate.
Claim 2
Dependent Claim
101 words
In a method of forming an epitaxial layer of an oxidic high T c superconductor on a substantially lattice matched monocrystalline substrate the improvement which comprises: a) forming a melt wherein the primary phase to crystallize out on cooling of the melt to effect film growth is the phase of the high T c oxidic superconductor, said melt comprising a nutriment composed of oxides of each element of said oxidic superconductor and a non-oxidic flux for said oxides; b) introducing the substrate into the melt; and c) cooling the melt to deposit an epitaxial layer of oxidic superconductor on said substrate.
Claim 3
Dependent Claim
12 words
The method of claim 1, wherein the flux is an alkali halide.
Claim 4
Dependent Claim
27 words
The method of claim 2, wherein the flux is comprised of an alkali halide selected from the group consisting of KCl, KF, NaCl, NaF and combinations thereof.
Claim 5
Dependent Claim
11 words
The method of claim 3, wherein the alkali halide is KCl.
Claim 6
Dependent Claim
28 words
The method of claim 1, wherein the melt is inert to Platinum, non-wetting and has a viscosity of about 0.5 to about 10 centipoise measured at growth temperature.
Claim 7
Dependent Claim
28 words
The method of claim 2, wherein the melt is inert to Platinum, non-wetting and has a viscosity of about 0.5 to about 10 centipoise measured at growth temperature.
Claim 8
Dependent Claim
28 words
The method of claim 3, wherein the melt is inert to Platinum, non-wetting and has a viscosity of about 0.5 to about 10 centipoise measured at growth temperature.
Claim 9
Dependent Claim
28 words
The method of claim 4, wherein the melt is inert to Platinum, non-wetting and has a viscosity of about 0.5 to about 10 centipoise measured at growth temperature.
Claim 10
Dependent Claim
17 words
The method of claim 1, wherein the oxidic superconductor is a 123 superconductor or a 2212 superconductor.
Claim 11
Dependent Claim
17 words
The method of claim 2, wherein the oxidic superconductor is a 123 superconductor or a 2212 superconductor.
Claim 12
Dependent Claim
17 words
The method of claim 3, wherein the oxidic superconductor is a 123 superconductor or a 2212 superconductor.
Claim 13
Dependent Claim
17 words
The method of claim 4, wherein the oxidic superconductor is a 123 superconductor or a 2212 superconductor.
Claim 14
Dependent Claim
17 words
The method of claim 5, wherein the oxidic superconductor is a 123 superconductor or a 2212 superconductor.
Claim 15
Dependent Claim
17 words
The method of claim 6, wherein the oxidic superconductor is a 123 superconductor or a 2212 superconductor.
Claim 16
Dependent Claim
17 words
The method of claim 7, wherein the oxidic superconductor is a 123 superconductor or a 2212 superconductor.
Claim 17
Dependent Claim
17 words
The method of claim 8, wherein the oxidic superconductor is a 123 superconductor or a 2212 superconductor.
Claim 18
Dependent Claim
142 words
In a method of forming an epitaxial layer of an oxidic perovskite-related superconductor on a substantially lattice matched monocrystalline perovskite-type substrate, the improvement which comprises: a) forming a melt wherein the primary phase to crystallize out of the cooling of the melt to effect film growth is the phase of the high T c oxidic superconductor, said melt comprising a nutriment composed of oxides of each element of said oxidic superconductor and a non-oxidic flux for said oxides; b) immersing the substrate into the melt; c) cooling the melt to form a film consisting essentially of said oxidic superconductor on a surface of the substrate; d) withdrawing the substrate from the melt, said substrate having an epitaxial film of oxidic superconductor formed thereon and said film having a residue of flux thereon; and, e) removing said residue of flux from said film.
Claim 19
Dependent Claim
142 words
In a method of forming an epitaxial layer of an oxidic perovskite-related superconductor on a substantially lattice matched monocrystalline perovskite-type substrate, the improvement which comprises: a) forming a melt wherein the primary phase to crystallize out of the cooling of the melt to effect film growth is the phase of the high T c oxidic superconductor, said melt comprising a nutriment composed of oxides of each element of said oxidic superconductor and a non-oxidic flux for said oxides; b) immersing the substrate into the melt; c) cooling the melt to form a film consisting essentially of said oxidic superconductor on a surface of the substrate; d) withdrawing the substrate from the melt, said substrate having an epitaxial film of oxidic superconductor formed thereon and said film having a residue of flux thereon; and, e) removing said residue of flux from said film.
Claim 20
Dependent Claim
27 words
The method of claim 17, wherein the flux is comprised of an alkali halide selected from the group consisting of KCl, KF, NaCl, NaF and combinations thereof.
Claim 21
Dependent Claim
13 words
The method of claim 18, wherein the alkali halide is KCl of KF.
Claim 22
Dependent Claim
11 words
The method of claim 17, wherein the substrate is an orthogallate.
Claim 23
Dependent Claim
11 words
The method of claim 18, wherein the substrate is an orthogallate.
Claim 24
Dependent Claim
11 words
The method of claim 19, wherein the substrate is an orthogallate.
Claim 25
Dependent Claim
13 words
The method of claim 20, wherein the orthogallate is a rare earth orthogallate.
Claim 26
Dependent Claim
13 words
The method of claim 21, wherein the orthogallate is a rare earth orthogallate.
Claim 27
Dependent Claim
13 words
The method of claim 22, wherein the orthogallate is a rare earth orthogallate.
Claim 28
Dependent Claim
13 words
The method of claim 23, wherein the rare earth orthogallate is lanthanum orthogallate.
Claim 29
Dependent Claim
13 words
The method of claim 24, wherein the rare earth orthogallate is lanthanum orthogallate.
Claim 30
Dependent Claim
13 words
The method of claim 25, wherein the rare earth orthogallate is lanthanum orthogallate.
Claim 31
Dependent Claim
46 words
The method of claim 23, wherein the rare earth orthogallate is a rare earth orthogallate of the following formula: R.sub.x La.sub.1-x GaO.sub.3 wherein R is a rare earth element of smaller ionic radius than La and wherein x has a value of from 0.001 to 0.5.
Claim 32
Dependent Claim
46 words
The method of claim 24, wherein the rare earth orthogallate is a rare earth orthogallate of the following formula: R.sub.x La.sub.1-x GaO.sub.3 wherein R is a rare earth element of smaller ionic radius than La and wherein x has a value of from 0.001 to 0.5.
Claim 33
Dependent Claim
46 words
The method of claim 25, wherein the rare earth orthogallate is a rare earth orthogallate of the following formula: R.sub.x La.sub.1-x GaO.sub.3 wherein R is a rare earth element of smaller ionic radius than La and wherein x has a value of from 0.001 to 0.5.
Claim 34
Dependent Claim
80 words
A melt for liquid phase epitaxial growth of High T c oxidic superconductor film on a substantially lattice matched substrate comprising: a) nutriment comprised of oxides of each element of the oxidic superconductor; and b) a flux which does not react with any of the oxides at the growth temperature of the oxidic film, wherein the primary phase to crystallize out on cooling of the melt to effect film growth is the phase of the High T c oxidic superconductor.
Claim 35
Dependent Claim
80 words
A melt for liquid phase epitaxial growth of High T c oxidic superconductor film on a substantially lattice matched substrate comprising: a) nutriment comprised of oxides of each element of the oxidic superconductor; and b) a flux which does not react with any of the oxides at the growth temperature of the oxidic film, wherein the primary phase to crystallize out on cooling of the melt to effect film growth is the phase of the High T c oxidic superconductor.
Claim 36
Dependent Claim
12 words
The melt of claim 32, wherein the flux is an alkali halide.
Claim 37
Dependent Claim
23 words
The melt of claim 33, wherein the alkali halide is selected from the group consisting of KCl, KF, NaCl, NaF and mixtures thereof.
Claim 38
Dependent Claim
13 words
The melt of claim 34, wherein the alkali halide is KF or KCl.
Claim 39
Dependent Claim
11 words
The melt of claim 35, wherein the alkali halide is KCl.
Claim 40
Dependent Claim
11 words
The melt of claim 35, wherein the alkali halide is KF.
Claim 41
Dependent Claim
32 words
The method of claim 5 wherein the non-oxidic flux is present in an amount of from about 5% to about 50% by weight based on the combined weight of nutrient and flux.
Claim 42
Dependent Claim
32 words
The method of claim 6 wherein the non-oxidic flux is present in an amount of from about 5% to about 50% by weight based on the combined weight of nutrient and flux.
Claim 43
Dependent Claim
32 words
The method of claim 7 wherein the non-oxidic flux is present in an amount of from about 5% to about 50% by weight based on the combined weight of nutrient and flux.
Claim 44
Dependent Claim
32 words
The method of claim 8 wherein the non-oxidic flux is present in an amount of from about 5% to about 50% by weight based on the combined weight of nutrient and flux.
Claim 45
Dependent Claim
30 words
The method of claim 5 wherein the non-oxidic flux is present in an amount of up to about 20% by weight based on the combined weight of nutrient and flux.
Claim 46
Dependent Claim
30 words
The method of claim 6 wherein the non-oxidic flux is present in an amount of up to about 20% by weight based on the combined weight of nutrient and flux.
Claim 47
Dependent Claim
30 words
The method of claim 7 wherein the non-oxidic flux is present in an amount of up to about 20% by weight based on the combined weight of nutrient and flux.
Claim 48
Dependent Claim
30 words
The method of claim 8 wherein the non-oxidic flux is present in an amount of up to about 20% by weight based on the combined weight of nutrient and flux.
References Cited (Backward Citations)
US4865681A
Cited
US4824826A
Cited
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