Abstract A wafer scale test system for testing redundant integrated circuit dies formed on a semiconductor wafer includes wafer scale test pads formed on the wafer and interchip multiplexor means for directing test signals applied to the wafer scale test pads to the individual integrated circuit dies. The interchip multiplexor means includes an input/output buffer circuit for receiving test signals from the wafer pads and applying the test signals to selected interchip multiplexor lines routed to the individual circuit dies. Readouts from output pads on said integrated circuit dies are routed back through the input/output buffer circuit to the wafer test pads to provide test output signals. Low cross-section connecting means are provided across dicing lanes between the integrated circuit die contact pads and the interchip multiplexor lines to avoid shorting during the dicing operation. Additionally, line protection circuits are provided to prevent destruction of the integrated circuit dies should shorting occur during dicing. The integrated circuit dies and wafer scale test system may optionally be partitioned into several separate groups to prevent faults in the interchip multiplexor system from rendering the entire wafer useless.
A method for testing redundant integrated circuit dies designed to operate at cryogenic temperatures, said dies being formed in a semiconductor wafer, said wafer having a plurality of wafer test pads formed thereon, comprising the steps of: cooling the wafer to a cryogenic temperature corresponding to the desired operating temperature of said integrated circuit dies; providing a first plurality of electrical test signals to selected ones of said plurality of wafer test pads on said wafer, wherein said first plurality of electrical test signals are provided from external test equipment; converting said first plurality of electrical test signals to a second plurality of electrical test signals, said second plurality of electrical test signals including binary encoded die address signals; providing said second plurality of electrical test signals to a selected integrated circuit die determined by said binary encoded die address signals; and reading out a plurality of test readout signals from said integrated circuit die output leads in response to said second plurality of electrical test signals applied to said die.
Claim 2
Independent Claim
171 words
A method for testing redundant integrated circuit dies designed to operate at cryogenic temperatures, said dies being formed in a semiconductor wafer, said wafer having a plurality of wafer test pads formed thereon, comprising the steps of: cooling the wafer to a cryogenic temperature corresponding to the desired operating temperature of said integrated circuit dies; providing a first plurality of electrical test signals to selected ones of said plurality of wafer test pads on said wafer, wherein said first plurality of electrical test signals are provided from external test equipment; converting said first plurality of electrical test signals to a second plurality of electrical test signals, said second plurality of electrical test signals including binary encoded die address signals; providing said second plurality of electrical test signals to a selected integrated circuit die determined by said binary encoded die address signals; and reading out a plurality of test readout signals from said integrated circuit die output leads in response to said second plurality of electrical test signals applied to said die.
Claim 3
Dependent Claim
74 words
A method for testing redundant integrated circuit dies as set out in claim 1, further comprising the steps, after said step of reading out of plurality of test readout signals, the steps of: determining, based on said readout signals, which integrated circuit dies are defective; heating the wafer to room temperature; dicing said wafer so as to separate said integrated circuit dies into separate integrated circuit chips; and discarding the malfunctioning integrated circuit chips.
Claim 4
Dependent Claim
68 words
A method for testing redundant integrated circuit dies as set out in claim 1, wherein said wafer test pads are divided into groups on said wafer and wherein said dies are provided in said wafer in corresponding groups, and wherein said step of providing said second plurality of electrical test signals comprises providing electrical test signals from a group of test pads to the corresponding group of dies.