Patent US5053673A successfully refreshed from Google Patents.
US5053673A
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Field emission cathodes and method of manufacture thereof
Assignee: Panasonic Holdings Corp
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Filing: 1989-10-17
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Granted: 1991-10-01
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Expires: 2009-10-17
Abstract
Abstract Structures and methods of manufacture for field emission cathodes having cathode tips of minute size, whereby a block formed of pairs of substrates each having a patterned thin layer of cathode material sandwiched therebetween is sliced into a plurality of sections, to obtain array substrates each having an array of exposed regions of cathode material. A metal layer for constituting electron extraction electrodes and corresponding extraction apertures is formed over these exposed regions and appropriately shaped, after first forming mask layer portions upon the exposed cathode material regions.
Inventors
- 👤 Kaoru Tomii
- 👤 Akira Kaneko
- 👤 Toru Kanno
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 15:52
CPC Classifications
H; H01; H01J; H01J31/00; H01J31/08; H01J31/10; H01J31/12; H01J31/123; H01J31/125; H01J31/127; H01J1/00; H01J1/02; H01J1/30; H01J1/304; H01J1/3042; H01J9/00; H01J9/02; H01J9/022; H01J9/025
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
149 words
A field emission cathode comprising: a pair of electrically insulating substrates having at least respective upper faces thereof aligned in a common plane and with a gap formed between opposing side faces thereof; a first metal layer formed within said gap, extending between said side faces; a layer of electrically insulating material formed within said gap, extending between said side faces and in contact with a surface of said first metal layer and having a surface thereof recessed below said common plane; a layer of cathode material formed extending substantially parallel to said side faces and positioned centrally between said side faces, extending within said metal layer and insulating layer, and with one end thereof protruding from said recessed surface of said electrically insulating layer; and a second metal layer formed on said upper faces of said substrates, extending to said gap, to function as an electron extraction electrode.
Claim 2
Dependent Claim
149 words
A field emission cathode comprising: a pair of electrically insulating substrates having at least respective upper faces thereof aligned in a common plane and with a gap formed between opposing side faces thereof; a first metal layer formed within said gap, extending between said side faces; a layer of electrically insulating material formed within said gap, extending between said side faces and in contact with a surface of said first metal layer and having a surface thereof recessed below said common plane; a layer of cathode material formed extending substantially parallel to said side faces and positioned centrally between said side faces, extending within said metal layer and insulating layer, and with one end thereof protruding from said recessed surface of said electrically insulating layer; and a second metal layer formed on said upper faces of said substrates, extending to said gap, to function as an electron extraction electrode.
Claim 3
Dependent Claim
36 words
A field emission cathode according to claim 1, in which the thickness of said cathode material, as measured in a direction perpendicular to said side faces, is in a range of 100 Å to 1 μm.
Claim 4
Dependent Claim
28 words
A field emission cathode according to claim 1, in which said second metal layer is formed of a material which is resistant to corrosion by predetermined etching liquids.
Claim 5
Dependent Claim
29 words
A field emission cathode according to claim 1, in which said first metal layer is formed of a metal selected from a group which consists of Al and Ta.
Claim 6
Dependent Claim
31 words
A field emission cathode according to claim 1, in which said cathode material is selected from a group of materials which consists of Mo, TiC, SiC, ZrC, and LaB 6 .
Claim 7
Dependent Claim
120 words
A field emission cathode comprising: a pair of electrically insulating substrates having at least respective upper faces thereof aligned in a common plane and with a gap formed between opposing side faces thereof; a layer of electrically insulating material formed within said gap, extending between said side faces, and having a surface thereof recessed below said common plane; a layer of cathode material formed extending substantially parallel to said side faces and positioned centrally between said faces, extending within said electrically insulating layer, with one end thereof protruding from said recessed surface of said insulating layer; and a second metal layer formed on said upper faces of said substrates, extending to said gap, to function as an electron extraction electrode.
Claim 8
Dependent Claim
120 words
A field emission cathode comprising: a pair of electrically insulating substrates having at least respective upper faces thereof aligned in a common plane and with a gap formed between opposing side faces thereof; a layer of electrically insulating material formed within said gap, extending between said side faces, and having a surface thereof recessed below said common plane; a layer of cathode material formed extending substantially parallel to said side faces and positioned centrally between said faces, extending within said electrically insulating layer, with one end thereof protruding from said recessed surface of said insulating layer; and a second metal layer formed on said upper faces of said substrates, extending to said gap, to function as an electron extraction electrode.
Claim 9
Dependent Claim
36 words
A field emission cathode according to claim 6, in which the thickness of said cathode material, as measured in a direction perpendicular to said side faces, is in a range of 100 Å to 2 μm.
Claim 10
Dependent Claim
31 words
A field emission cathode according to claim 6, in which said cathode material is selected from a group of materials which consists of Mo, TiC, SiC, ZrC, and LaB 6 .
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-09-30 | 1995-04-01 | 1995-10-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-09-30 | 1999-04-01 | 1999-10-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-09-30 | 2003-04-01 | 2003-10-01 | $7700.00 | Window Closed / Lapsed |