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Electrode structure with constant velocity and predetermined reflectivity

Assignee: RF Monolithics Inc
•
Filing: 1990-04-19
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Granted: 1991-09-24
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Expires: 2010-04-19
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Abstract

Abstract An electrode structure for use with a surface acoustic wave resonator which has the same velocity as the transducers and gratings but no reflections; a second embodiment provides an electrode structure having a velocity equal to the velocity of the transducers and gratings but that has a coefficient of reflectivity that can be predetermined by varying the width of the electrodes in the electrode structure.

Inventors

  • 👤 Peter Wright

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 21:49
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/02; H03H9/02535; H03H9/02818; H03H9/02842; H03H9/02637; H03H9/02685; H03H9/02771

Claims Analysis

Total Claims: 34
Claim 1
Independent Claim 118 words
An electrode structure for use in transducers and gratings in a surface acoustic wave device, said structure having no reflections and having the velocity of a uniform two electrode per wavelength structure and comprising: a piezo-electric substrate; only four spaced electrodes on said substrate for each 2λ distance of electrode structure; the first two electrodes having identical widths and a center-to-center spacing of 3λ/4 to cause wave cancellation between the first two electrodes; and the second two electrodes having identical widths and a center-to-center spacing of λ/4 to cause wave cancellation between the second two electrodes so as to create an electrode structure having the velocity of a uniform two electrode per wave length structure and no reflections.
Claim 2
Dependent Claim 118 words
An electrode structure for use in transducers and gratings in a surface acoustic wave device, said structure having no reflections and having the velocity of a uniform two electrode per wavelength structure and comprising: a piezo-electric substrate; only four spaced electrodes on said substrate for each 2λ distance of electrode structure; the first two electrodes having identical widths and a center-to-center spacing of 3λ/4 to cause wave cancellation between the first two electrodes; and the second two electrodes having identical widths and a center-to-center spacing of λ/4 to cause wave cancellation between the second two electrodes so as to create an electrode structure having the velocity of a uniform two electrode per wave length structure and no reflections.
Claim 3
Dependent Claim 31 words
An electrode structure as in claim 1 wherein: the width of each of the first two electrodes is 3λ/8; and the width of each of the second two electrodes is λ/8.
Claim 4
Dependent Claim 41 words
An electrode structure as in claim 2 wherein the space between the first two electrodes is 3λ/8, the space between the first two electrodes and the second two electrodes is λ/4; and the space between the second two electrodes is λ/8.
Claim 5
Dependent Claim 14 words
An electrode structure as in claim 3 wherein said structure is a reflector grating.
Claim 6
Dependent Claim 16 words
An electrode structure as in claim 3 wherein said structure is a transducer with interdigitated electrodes.
Claim 7
Dependent Claim 195 words
A withdrawal weighted electrode structure for a surface acoustic wave device, said electrode structure having the velocity of a uniform two electrode per wavelength structure and a predetermined reflection coefficient, K, said structure comprising: a piezo-electric substrate having multiple electrodes thereon with center-to-center spacing of λ/2; first alternate ones of at least a first continuous portion of said electrodes having a common width ranging from greater than λ/4 to a maximum of 3λ/8 over each selected wavelength, 2λ; and second alternate ones of said at least a first continuous portion of said electrodes over each selected wavelength, 2λ, having a common width ranging from less than λ/4 to a minimum of λ/8 in inverse relation to said first alternate electrode width such that the total reflection, K, from all of said electrodes in each selected wavelength, 2λ, varies from a value K=approaching a maximum when all electrodes have widths approaching λ/4 to a value K=√2/2 at electrode widths of said first and second alternate electrodes, respectively, of 3λ/8 and λ/8 so as to form an electrode structure having a predetermined reflection coefficient, K, and the constant velocity of a uniform two electrode per wavelength structure.
Claim 8
Dependent Claim 195 words
A withdrawal weighted electrode structure for a surface acoustic wave device, said electrode structure having the velocity of a uniform two electrode per wavelength structure and a predetermined reflection coefficient, K, said structure comprising: a piezo-electric substrate having multiple electrodes thereon with center-to-center spacing of λ/2; first alternate ones of at least a first continuous portion of said electrodes having a common width ranging from greater than λ/4 to a maximum of 3λ/8 over each selected wavelength, 2λ; and second alternate ones of said at least a first continuous portion of said electrodes over each selected wavelength, 2λ, having a common width ranging from less than λ/4 to a minimum of λ/8 in inverse relation to said first alternate electrode width such that the total reflection, K, from all of said electrodes in each selected wavelength, 2λ, varies from a value K=approaching a maximum when all electrodes have widths approaching λ/4 to a value K=√2/2 at electrode widths of said first and second alternate electrodes, respectively, of 3λ/8 and λ/8 so as to form an electrode structure having a predetermined reflection coefficient, K, and the constant velocity of a uniform two electrode per wavelength structure.
Claim 9
Dependent Claim 14 words
An electrode structure as in claim 6 wherein said structure is a reflector grating.
Claim 10
Dependent Claim 16 words
An electrode structure as in claim 6 wherein said structure is a transducer with interdigitated electrodes.
Claim 11
Dependent Claim 120 words
An electrode structure as in claim 6 further comprising: at least a second continuous portion of said electrodes; the first two electrodes of each 2λ wavelength of said second continuous portion of said electrodes having identical widths and a center-to-center spacing of 3λ/4 to cause wave cancellation between said first two electrodes; and the second two electrodes of each 2λ wavelength of the second continuous portion of the electrodes having identical widths and a center-to-center spacing of λ/4 to cause wave cancellation between the second two electrodes thereby creating a withdrawal weighted electrode structure with at least the first continuous electrode portion having a predetermined reflection coefficient, K, and at least the second continuous portion having a reflection coefficient, K=0.
Claim 12
Dependent Claim 13 words
An electrode structure as in claim 9 wherein the structure is a grating.
Claim 13
Dependent Claim 13 words
An electrode structure as in claim 9 wherein the structure is a transducer.
Claim 14
Dependent Claim 222 words
A resonator having external gratings separated by spaced transducers with the gratings and the transducers having only two electrodes per wavelength, λ, and the same velocity, said gratings having a predetermined reflection coefficient, K, said resonator comprising: a piezo-electric substrate; first and second spaced gratings attached to said substrate; and input and output spaced transducer structures attached to said substrate between said first and second gratings for generating standing waves in said substrate; each of said first and second gratings having at least a first continuous electrode portion having electrodes with a center-to-center spacing of λ/2 and having first alternate ones of said electrodes with a common width ranging from greater than λ/4 to a maximum of 3λ/8 over each selected wavelength, 2λ, of said first electrode portion and second alternate ones of said electrodes over each selected wavelength, 2λ, of said first electrode portion, said second alternate electrode having a common width ranging from less than λ/4 to a minimum of λ/8 in inverse relation to said first alternate electrode widths such that the total reflection, K, from all of said electrodes in each selected wavelength, 2λ, of said first continuous electrode portion varies from K=approaching a maximum when all electrodes have widths approaching λ/4 to K=√2/2 electrode widths of said first and second alternate electrodes, respectively, of 3λ/8 and λ/8.
Claim 15
Dependent Claim 222 words
A resonator having external gratings separated by spaced transducers with the gratings and the transducers having only two electrodes per wavelength, λ, and the same velocity, said gratings having a predetermined reflection coefficient, K, said resonator comprising: a piezo-electric substrate; first and second spaced gratings attached to said substrate; and input and output spaced transducer structures attached to said substrate between said first and second gratings for generating standing waves in said substrate; each of said first and second gratings having at least a first continuous electrode portion having electrodes with a center-to-center spacing of λ/2 and having first alternate ones of said electrodes with a common width ranging from greater than λ/4 to a maximum of 3λ/8 over each selected wavelength, 2λ, of said first electrode portion and second alternate ones of said electrodes over each selected wavelength, 2λ, of said first electrode portion, said second alternate electrode having a common width ranging from less than λ/4 to a minimum of λ/8 in inverse relation to said first alternate electrode widths such that the total reflection, K, from all of said electrodes in each selected wavelength, 2λ, of said first continuous electrode portion varies from K=approaching a maximum when all electrodes have widths approaching λ/4 to K=√2/2 electrode widths of said first and second alternate electrodes, respectively, of 3λ/8 and λ/8.
Claim 16
Dependent Claim 18 words
A resonator as in claim 12 wherein said resonator has a middle grating to form a coupled resonator.
Claim 17
Dependent Claim 28 words
A resonator as in claim 13 wherein said middle grating has a velocity identical to the velocity of the transducers and the external gratings and has no reflections.
Claim 18
Dependent Claim 39 words
A resonator as in claim 12 wherein said middle grating comprises an electrode structure having a velocity common to the transducers and the external gratings, but has a variable reflectivity from a maximum to √2/2 times the maximum reflectivity.
Claim 19
Dependent Claim 180 words
A coupled resonator having external gratings separated by spaced transducers and having a center grating, all of which have only two electrodes per wavelength, λ, and all of which have the same velocity, said center grating having a reflection coefficient, K, of zero, said coupled resonator comprising: a piezo-electric substrate; first and second spaced gratings attached to said substrate; input and output spaced transducer structures attached to said substrate between said first and second gratings for generating standing waves in said substrate; a center grating located between said input and output transducer structures to couple said transducer structures acoustically; two electrodes of each 2λ wavelength of said center grating having identical widths and a center-to-center spacing of 3λ/4 to cause wave cancellation between said first two electrodes; and the second two electrodes of each 2λ wavelength of said center grating having identical widths and a center-to-center spacing of λ/4 to cause wave cancellation between said second two electrodes so as to create a center grating structure having the same velocity as the transducers and external gratings and having no reflections.
Claim 20
Dependent Claim 180 words
A coupled resonator having external gratings separated by spaced transducers and having a center grating, all of which have only two electrodes per wavelength, λ, and all of which have the same velocity, said center grating having a reflection coefficient, K, of zero, said coupled resonator comprising: a piezo-electric substrate; first and second spaced gratings attached to said substrate; input and output spaced transducer structures attached to said substrate between said first and second gratings for generating standing waves in said substrate; a center grating located between said input and output transducer structures to couple said transducer structures acoustically; two electrodes of each 2λ wavelength of said center grating having identical widths and a center-to-center spacing of 3λ/4 to cause wave cancellation between said first two electrodes; and the second two electrodes of each 2λ wavelength of said center grating having identical widths and a center-to-center spacing of λ/4 to cause wave cancellation between said second two electrodes so as to create a center grating structure having the same velocity as the transducers and external gratings and having no reflections.
Claim 21
Independent Claim 110 words
A method of forming an electrode structure for use in transducers and gratings in a surface acoustic wave device, said structure having no reflections and a velocity that is constant, said method comprising the steps of forming only four spaced electrodes on a piezo-electric substrate for each 2λ distance of structure; forming the first two electrodes with identical widths and a center-to-center spacing of 3λ/4 to cause wave cancellation between the first two electrodes; and forming the second two electrodes with identical widths and a center-to-center spacing λ/4 to cause wave cancellation between the second two electrodes so as to create an electrode structure with constant velocity and no reflections.
Claim 22
Independent Claim 110 words
A method of forming an electrode structure for use in transducers and gratings in a surface acoustic wave device, said structure having no reflections and a velocity that is constant, said method comprising the steps of forming only four spaced electrodes on a piezo-electric substrate for each 2λ distance of structure; forming the first two electrodes with identical widths and a center-to-center spacing of 3λ/4 to cause wave cancellation between the first two electrodes; and forming the second two electrodes with identical widths and a center-to-center spacing λ/4 to cause wave cancellation between the second two electrodes so as to create an electrode structure with constant velocity and no reflections.
Claim 23
Dependent Claim 25 words
A method as in claim 17 wherein said electrodes are formed with a mask that is created with an E-beam structure that is digitally operated.
Claim 24
Independent Claim 139 words
A method of forming a withdrawal weighted electrode structure for a surface acoustic wave device having multiple electrodes with only two electrodes per wavelength, λ, with a constant velocity and a predetermined reflection coefficient, K, said method comprising the steps of: forming first alternate ones of said electrodes with a common width ranging from λ/4 to 3λ/8; and forming second alternate ones of said electrodes with a common width ranging from λ/4 to λ/8 in inverse relation to the first alternate electrodes widths such that the total reflection, K, from all of said electrodes in each wavelength, λ, varies from K=maximum when all electrodes have widths of λ/4 to K=when the electrode widths of said first and second alternate electrodes, respectively, are of 3λ/8 and λ/8 so as to form an electrode structure having a predetermined reflection coefficient, K.
Claim 25
Independent Claim 139 words
A method of forming a withdrawal weighted electrode structure for a surface acoustic wave device having multiple electrodes with only two electrodes per wavelength, λ, with a constant velocity and a predetermined reflection coefficient, K, said method comprising the steps of: forming first alternate ones of said electrodes with a common width ranging from λ/4 to 3λ/8; and forming second alternate ones of said electrodes with a common width ranging from λ/4 to λ/8 in inverse relation to the first alternate electrodes widths such that the total reflection, K, from all of said electrodes in each wavelength, λ, varies from K=maximum when all electrodes have widths of λ/4 to K=when the electrode widths of said first and second alternate electrodes, respectively, are of 3λ/8 and λ/8 so as to form an electrode structure having a predetermined reflection coefficient, K.
Claim 26
Dependent Claim 20 words
A method as in claim 19 wherein said withdrawal weighted electrode structure is formed with electrodes as a uniform grid.
Claim 27
Dependent Claim 67 words
In a resonator structure having external gratings with λ/4 electrodes and separated by spaced transducers and having a constant velocity through said structure, the improvement comprising: middle grating means between said transducers and having multiple electrodes with widths and a predetermined spacing to provide a reflection coefficient of 0 and a constant velocity that is essentially the same as the velocity of the remainder of the structure.
Claim 28
Dependent Claim 67 words
In a resonator structure having external gratings with λ/4 electrodes and separated by spaced transducers and having a constant velocity through said structure, the improvement comprising: middle grating means between said transducers and having multiple electrodes with widths and a predetermined spacing to provide a reflection coefficient of 0 and a constant velocity that is essentially the same as the velocity of the remainder of the structure.
Claim 29
Dependent Claim 60 words
In a resonator structure having external gratings with λ/4 electrodes and separated by spaced transducers and having a constant velocity throughout the structure, the improvement comprising: a middle grating having a predetermined reflectivity in the range between and less than a maximum and a constant velocity that is essentially the same as the velocity of the remainder of the structure.
Claim 30
Dependent Claim 60 words
In a resonator structure having external gratings with λ/4 electrodes and separated by spaced transducers and having a constant velocity throughout the structure, the improvement comprising: a middle grating having a predetermined reflectivity in the range between and less than a maximum and a constant velocity that is essentially the same as the velocity of the remainder of the structure.
Claim 31
Dependent Claim 63 words
In a resonator structure having spaced external gratings with λ/4 electrodes and a constant velocity through said gratings, the improvement comprising: spaced transducer means separating said gratings, each of said transducer means having multiple electrodes with widths and a predetermined spacing to provide a reflection coefficient of 0 and a constant velocity that is essentially the same as the velocity through the gratings.
Claim 32
Dependent Claim 63 words
In a resonator structure having spaced external gratings with λ/4 electrodes and a constant velocity through said gratings, the improvement comprising: spaced transducer means separating said gratings, each of said transducer means having multiple electrodes with widths and a predetermined spacing to provide a reflection coefficient of 0 and a constant velocity that is essentially the same as the velocity through the gratings.
Claim 33
Dependent Claim 64 words
In a resonator structure having external gratings with λ/4 electrodes and a constant velocity through said gratings, the improvement comprising: spaced transducers separating said gratings; each of said transducers having multiple electrodes with a predetermined reflectivity in the range between 0 and less than a maximum and a constant velocity that is essentially the same as the velocity of the remainder of the structure.
Claim 34
Dependent Claim 64 words
In a resonator structure having external gratings with λ/4 electrodes and a constant velocity through said gratings, the improvement comprising: spaced transducers separating said gratings; each of said transducers having multiple electrodes with a predetermined reflectivity in the range between 0 and less than a maximum and a constant velocity that is essentially the same as the velocity of the remainder of the structure.

References Cited (Backward Citations)

US4162465A Cited
US4635009A Cited
US4616197A Cited
US4731595A Cited
US4965479A Cited
US4890369A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-09-23 1995-03-25 1995-09-24 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-09-23 1999-03-25 1999-09-24 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-09-23 2003-03-25 2003-09-24 $7700.00 Window Closed / Lapsed

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