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US5050429A
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Microbridge flow sensor
Assignee: Azbil Corp
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Filing: 1990-02-20
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Granted: 1991-09-24
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Expires: 2010-02-20
Abstract
Abstract A microbridge flow sensor includes integral bridge portions and temperature-measuring resistive elements. The bridge portions are integrally formed above the right and left openings of a substrate, respectively. The temperature-measuring resistive elements are respectively formed on the surfaces of the bridge portions.
Inventors
- 👤 Ikuo Nishimoto
- 👤 Takashi Kurosawa
- 👤 Tomoshige Yamamoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 19:31
CPC Classifications
G; G01; G01F; G01F1/00; G01F1/68; G01F1/684; G01F1/6845; G01P; G01P5/00; G01P5/10; G01P5/12
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
162 words
A microbridge flow sensor for detecting material flow comprising: integral bridge portions formed on a surface of a semiconductor substrate so as to be spatially isolated from said semiconductor substrate and defining a through hole passing under the bridge portions communicating a right opening to a left opening; a detecting portion mounted on a surface of the bridge portions including a heating element extending substantially the length of a bridge portion, and temperature-measuring elements which extend alongside the heating element, wherein a first pair of temperature-measuring elements straddle and abut the heating element and a second pair of temperature-measuring elements straddle the heating element and are disposed in a spaced-apart relationship with respect to the heating element, said microbridge flow sensor detecting a flow speed on the basis of changes in resistance of said temperature-measuring elements; and wherein said bridge portions are integrally formed adjacent to the right and left openings, respectively, and substantially at right angles to a direction of flow.
Claim 2
Dependent Claim
162 words
A microbridge flow sensor for detecting material flow comprising: integral bridge portions formed on a surface of a semiconductor substrate so as to be spatially isolated from said semiconductor substrate and defining a through hole passing under the bridge portions communicating a right opening to a left opening; a detecting portion mounted on a surface of the bridge portions including a heating element extending substantially the length of a bridge portion, and temperature-measuring elements which extend alongside the heating element, wherein a first pair of temperature-measuring elements straddle and abut the heating element and a second pair of temperature-measuring elements straddle the heating element and are disposed in a spaced-apart relationship with respect to the heating element, said microbridge flow sensor detecting a flow speed on the basis of changes in resistance of said temperature-measuring elements; and wherein said bridge portions are integrally formed adjacent to the right and left openings, respectively, and substantially at right angles to a direction of flow.
References Cited (Backward Citations)
US4733559A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-09-23 | 1995-03-25 | 1995-09-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-09-23 | 1999-03-25 | 1999-09-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-09-23 | 2003-03-25 | 2003-09-24 | $7700.00 | Window Closed / Lapsed |