Patent US5048800A successfully refreshed from Google Patents.
US5048800A
Expired / Lapsed
US
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Vertical heat treatment apparatus
Assignee: Toshiba Corp
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Filing: 1990-08-07
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Granted: 1991-09-17
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Expires: 2010-08-07
Abstract
Abstract A vertical heat treatment apparatus includes a reaction furnace constituted by a reaction chamber having an inner tube and an outer tube and a heater arranged outside the reaction chamber, a manifold communicating with a lower portion of the reaction chamber to support the reaction chamber and a gas being supplied and exhausted through the mainfold, a hollow vessel, arranged together with the boat in the reaction furnace, for supporting a lower end of a boat having objects, and a plurality of first heat-insulating members detachably arranged in the hollow vessel, wherein the number of the first insulating members is adjusted to adjust a heat-insulating effect. The first heat-insulating member includes a fin unit constituted by fins horizontally arranged at predetermined intervals and spacers for keeping the intervals between the fins.
Inventors
- 👤 Shinji Miyazaki
- 👤 Takahiko Moriya
- 👤 Yasushi Yagi
- 👤 Mituaki Komino
- 👤 Katuhiko Iwabuchi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 19:42
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0431; H10P72/0436; C; C23; C23C; C23C16/00; C23C16/44; C23C16/54; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C30B31/00; C30B31/06; C30B31/12; F; F27; F27B; F27B17/00; F27B17/0016; F27B17/0025; F27D; F27D1/00; F27D1/0003; F27D1/0033
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
144 words
A vertical heat treatment apparatus, comprising: a reaction furnace constituted by a reaction chamber having an inner tube and an outer tube and a heater arranged outside said reaction chamber; a manifold means communicating with a lower portion of said reaction chamber to support said reaction chamber, a gas being supplied an exhausted through said manifold means; a wafer boat having a plurality of wafers mounted thereon and arranged in a uniform temperature region in said reaction furnace; a hollow vessel for leading a gas to said uniform temperature region and for supporting a lower end of said wafer boat; and a plurality of first heat-insulating members made of a material selected from the group consisting of quartz, SiC, quartz-SiC and graphite-SiC, and arranged in said hollow vessel; wherein said hollow vessel prevents a gas from being in contact with said first insulating members.
Claim 2
Dependent Claim
144 words
A vertical heat treatment apparatus, comprising: a reaction furnace constituted by a reaction chamber having an inner tube and an outer tube and a heater arranged outside said reaction chamber; a manifold means communicating with a lower portion of said reaction chamber to support said reaction chamber, a gas being supplied an exhausted through said manifold means; a wafer boat having a plurality of wafers mounted thereon and arranged in a uniform temperature region in said reaction furnace; a hollow vessel for leading a gas to said uniform temperature region and for supporting a lower end of said wafer boat; and a plurality of first heat-insulating members made of a material selected from the group consisting of quartz, SiC, quartz-SiC and graphite-SiC, and arranged in said hollow vessel; wherein said hollow vessel prevents a gas from being in contact with said first insulating members.
Claim 3
Dependent Claim
32 words
An apparatus according to claim 1, wherein said first heat-insulating member comprises a fin unit constituted by fins horizontally arranged at predetermined intervals and spacers for keeping the intervals between said fins.
Claim 4
Dependent Claim
41 words
An apparatus according to claim 2, wherein a surface of said fin is made of a material selected from the group consisting of opaque quartz, a quartz having a sandblasted surface, and a material which is treated to prevent heat radiation.
Claim 5
Dependent Claim
20 words
An apparatus according to claim 2, wherein said hollow vessel comprises at east one second insulating ember which is detachable.
Claim 6
Dependent Claim
22 words
An apparatus according to claim 4, wherein said second heat-insulating member is a hollow member evacuated or filled with a heat insulator.
Claim 7
Dependent Claim
38 words
An apparatus according to claim 1, wherein said first heat-insulating members are detachably arranged within the region defined by said hollow vessel, and the number of said first heat-insulating members is selected in view of a treatment temperature.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-09-16 | 1995-03-18 | 1995-09-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-09-16 | 1999-03-18 | 1999-09-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-09-16 | 2003-03-18 | 2003-09-17 | $7700.00 | Window Closed / Lapsed |