Abstract A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member. The main insulator member is formed of ceramic material and is located intermediate to the one wall of the housing and the other electrode but is spaced from the one wall of the housing to have the main insulator member floating relative to the housing structure. The main ceramic insulator member is compressively supported at a central position of the member and extends outward from this central position without any additional support to have the floating main insulator respond to any bending forces within the laser without any constraint other than the central support.
A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity, a gas located within the laser cavity and with the gas capable of lasing action, a pair of spaced electrodes located within the laser cavity and forming an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes, one of the pair of electrodes located along a central position within the cavity and grounded to the housing structure, the other of the pair of electrodes located adjacent to one of the walls of the housing structure and with the other electrode mounted on a main insulator member, the main insulator member formed of ceramic material, and the one wall of the housing including inwardly extending wall portions to form an integral spacer and central position support for the main insulator from the one wall on one side of the main insulator.
Claim 2
Dependent Claim
164 words
A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity, a gas located within the laser cavity and with the gas capable of lasing action, a pair of spaced electrodes located within the laser cavity and forming an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes, one of the pair of electrodes located along a central position within the cavity and grounded to the housing structure, the other of the pair of electrodes located adjacent to one of the walls of the housing structure and with the other electrode mounted on a main insulator member, the main insulator member formed of ceramic material, and the one wall of the housing including inwardly extending wall portions to form an integral spacer and central position support for the main insulator from the one wall on one side of the main insulator.
Claim 3
Dependent Claim
43 words
The compact excimer laser of claim 1 wherein the housing structure is formed of two half housing members joined to form the laser cavity and with the one electrode supported by a support member mounted by the joining of the half housing members.
Claim 4
Dependent Claim
48 words
The compact excimer laser of claim 2 including an additional spacer member located on the other side of the main insulator between the main insulator and the other electrode to have the main insulator supported at the central position between the extending wall portions and the spacer member.
Claim 5
Dependent Claim
38 words
The compact excimer laser of claim 3 additionally including O-ring seals on both sides of the main insulator and located between the main insulator and the extending wall portions and between the main insulator and the spacer member.
Claim 6
Dependent Claim
32 words
The compact excimer laser of claim 1 including additional ceramic material located on the one wall opposite the main insulation to prevent elevational discharge between the main insulator and the one wall.