US5047363A
Expired / Lapsed
US
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Method and apparatus for reducing heterostructure acoustic charge transport device saw drive power requirements
Assignee: Motorola Solutions Inc
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Filing: 1990-11-26
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Granted: 1991-09-10
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Expires: 2010-11-26
Abstract
Abstract A HACT device employing a thin-film overlay of a more strongly piezoelectric material can operate as a delay line and as a tapped delay line, or transversal filter, while requiring less total power for the SAW clock signal. The increased electrical potential per unit total SAW power thus realized facilitates coupling between the total SAW energy and the mobile charge carriers. Some materials systems, such as a GaAs substrate and a ZnO thin-film overlay, will require an intervening thin-film dielectric layer in between the HACT substrate and epitaxial layers and the thin-film piezoelectric overlay. This may be necessitated by chemical, semiconductor device processing, or adhesion incompatibilities between the substrate material and the thin-film overlay material.
Inventors
- 👤 Fred S. Hickernell
- 👤 Frederick Cho
- 👤 Frederick M. Fliegel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 06:21
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/02; H03H9/02535; H03H9/0296; H03H9/02976; Y; Y10; Y10T; Y10T29/00; Y10T29/42
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
101 words
A method for increasing the charge carrying capacity of a heterostructure acoustic charge transport device, comprising the steps of: providing a semiconductor substrate having a surface; fabricating an interdigital metallic surface acoustic wave transducer along said surface of said semiconductor substrate; providing a channel including epitaxial layers of semiconductor material along said surface of said semiconductor substrate; depositing a thin-film layer of piezoelectric material along said channel of said semiconductor substrate said thin-layer of dielectric material being more strongly dielectric than said semiconductor substrate; providing electric charge to said channel of said substrate; and transporting said electric charge through said channel.
Claim 2
Independent Claim
101 words
A method for increasing the charge carrying capacity of a heterostructure acoustic charge transport device, comprising the steps of: providing a semiconductor substrate having a surface; fabricating an interdigital metallic surface acoustic wave transducer along said surface of said semiconductor substrate; providing a channel including epitaxial layers of semiconductor material along said surface of said semiconductor substrate; depositing a thin-film layer of piezoelectric material along said channel of said semiconductor substrate said thin-layer of dielectric material being more strongly dielectric than said semiconductor substrate; providing electric charge to said channel of said substrate; and transporting said electric charge through said channel.
Claim 3
Dependent Claim
55 words
A method for increasing the charge carrying capacity for a heterostructure acoustic charge transport device as claimed in claim 1, wherein there is further included the step of interposing a thin-film dielectric layer between said channel and said piezoelectric thin-film layer, said thin-film dielectric layer for promoting adhesion-of said piezoelectric thin-film layer to said channel.
Claim 4
Dependent Claim
49 words
A method for increasing the charge carrying capacity of a heterostructure acoustic charge transport device as claimed in claim 1, wherein there is further included the step of attaching an acoustic absorber means attached to said surface of said semiconductor substrate to prevent reflection of said surface acoustic wave.
Claim 5
Dependent Claim
103 words
A method for increasing the charge carrying capacity of a heterostructure acoustic charge transport device as claimed in claim 1, wherein there is further included the steps of: providing an input ohmic contact for coupling said electric charge to said channel; providing an input Schottky contact for controlling the transportation of said electric charge through said channel, providing a Schottky nondestructive sensing electrode array coupled to said channel for monitoring said transported electric charge; providing an output Schottky contact for controlling the flow of electric charge through said channel; and providing an output contact for receiving a replica of said input electric charge.
Claim 6
Independent Claim
103 words
A method for reducing drive power requirements of a SAW transducer in a heterostructure acoustic charge transport device, comprising the steps of: providing a semiconductor substrate having a surface; fabricating an interdigital metallic surface acoustic wave transducer along said surface of said semiconductor substrate; providing a channel including epitaxial layers of semiconductor material along said surface of said semiconductor substrate; depositing a thin-film layer of piezoelectric material along said channel of said semiconductor substrate; providing electric charge to said channel of said substrate; and transporting said electric charge through said channel with approximately 50 milliWatts of power applied to said surface wave transducer.
Claim 7
Independent Claim
103 words
A method for reducing drive power requirements of a SAW transducer in a heterostructure acoustic charge transport device, comprising the steps of: providing a semiconductor substrate having a surface; fabricating an interdigital metallic surface acoustic wave transducer along said surface of said semiconductor substrate; providing a channel including epitaxial layers of semiconductor material along said surface of said semiconductor substrate; depositing a thin-film layer of piezoelectric material along said channel of said semiconductor substrate; providing electric charge to said channel of said substrate; and transporting said electric charge through said channel with approximately 50 milliWatts of power applied to said surface wave transducer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1994-09-09 | 1995-03-11 | 1995-09-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-09-09 | 1999-03-11 | 1999-09-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-09-09 | 2003-03-11 | 2003-09-10 | $7700.00 | Window Closed / Lapsed |