US5045907A
Expired / Lapsed
US
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Graphotaxially formed photosensitive detector array
Assignee: Grumman Corp
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Filing: 1990-10-09
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Granted: 1991-09-03
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Expires: 2010-10-09
Abstract
Abstract A polycrystalline or amorphous substrate having a single crystallilne layer formed thereupon for making a photosensitive detector array and a method for forming the same are disclosed. The single crystalline layer is grown by graphotaxy, i.e. lateral epitaxy, upon the non-single crystalline substrate. A seed crystal of the material which will comprise the layer to be grown is embedded in the substrate. Graphotaxial growth occurs from the seed crystal and travels across the surface of the substrate. Various methods of obtaining graphotaxial growth are disclosed.
Inventors
- 👤 Allen L. Solomon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 03:13
CPC Classifications
H; H10; H10F; H10F39/00; H10F39/10; H10F39/107; H10F30/00; H10F30/20; H10F30/21; H10F30/22; H10F30/221; H10F30/2212; H10F71/00; H10F71/125; H10F71/1253; H10F77/00; H10F77/10; H10F77/16; H10F77/162; H10F77/164; H10P; H10P14/00; H10P14/20; H10P14/27; H10P14/271; H10P14/29; H10P14/2901; H10P14/2921; H10P14/32; H10P14/3202; H10P14/3238; H10P14/34; H10P14/3402; H10P14/3424; H10P14/3432; Y; Y02; Y02E; Y02E10/00; Y02E10/50
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
188 words
A detector-side illuminated photosensitive detector array having a plurality of detector elements comprising: (a) a substrate having first and second surfaces; (b) a glass layer formed upon the first surface of said substrate; (c) a plurality of electrodes formed upon the glass layer, the number of electrodes corresponding to the number of detector elements; (d) a conductive grid formed upon said glass layer, said conductive grid forming a common electrode for said plurality of detector elements; (e) a seed crystal disposed within said glass layer by liquefying the glass layer so as to cause the seed crystal to sink into and be sealed to the glass layer, the seed crystal abutting the first surface of said substrate; (f) a graphataxially grown single crystalline layer extending from said seed crystal across said glass layer; and (g) a plurality of P-N junctions disposed within said single crystalline layer above said plurality of electrodes such that said P-N junctions, said plurality of electrodes, and said grid define a photosensitive detector array; (h) wherein detector-side illumination is facilitated by the formation of said plurality of P-N junctions above said plurality of electrodes.
Claim 2
Dependent Claim
188 words
A detector-side illuminated photosensitive detector array having a plurality of detector elements comprising: (a) a substrate having first and second surfaces; (b) a glass layer formed upon the first surface of said substrate; (c) a plurality of electrodes formed upon the glass layer, the number of electrodes corresponding to the number of detector elements; (d) a conductive grid formed upon said glass layer, said conductive grid forming a common electrode for said plurality of detector elements; (e) a seed crystal disposed within said glass layer by liquefying the glass layer so as to cause the seed crystal to sink into and be sealed to the glass layer, the seed crystal abutting the first surface of said substrate; (f) a graphataxially grown single crystalline layer extending from said seed crystal across said glass layer; and (g) a plurality of P-N junctions disposed within said single crystalline layer above said plurality of electrodes such that said P-N junctions, said plurality of electrodes, and said grid define a photosensitive detector array; (h) wherein detector-side illumination is facilitated by the formation of said plurality of P-N junctions above said plurality of electrodes.
Claim 3
Dependent Claim
50 words
The photosensitive detector array as recited in claim 1 further comprising a plurality of vias extending from the second surface of the substrate through the substrate to the first surface thereof and through said glass layer to provide electrical conductivity from said electrodes to the second surface of said substrate.
Claim 4
Dependent Claim
29 words
The photosensitive detector array as recited in claim 2 further comprising a shim layer formed upon the second surface of said substrate to increase the height of said substrate.
Claim 5
Dependent Claim
17 words
The photosensitive detector array as recited in claim 3 wherein said shim layer is comprised of gold.
References Cited (Backward Citations)
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