Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
85 words
A sintered body of silicon nitride having a relative density of 98% or more, comprising 80 to 94 wt % Si 3 N 4 , 2 to 10 wt % compound calculated in MgO equivalent, and 2 to 10 wt % Y compound calculated in Y 2 O 3 equivalent, wherein the Si 3 N 4 contains 5 to 40% α-phase and the Si 3 N 4 comprises grains 90 vol % or more of which have a minor axis of 1 μm or less.
Claim 2
Dependent Claim
85 words
A sintered body of silicon nitride having a relative density of 98% or more, comprising 80 to 94 wt % Si 3 N 4 , 2 to 10 wt % compound calculated in MgO equivalent, and 2 to 10 wt % Y compound calculated in Y 2 O 3 equivalent, wherein the Si 3 N 4 contains 5 to 40% α-phase and the Si 3 N 4 comprises grains 90 vol % or more of which have a minor axis of 1 μm or less.
Claim 3
Dependent Claim
186 words
A process for manufacture of a sintered body of silicon nitride comprising the steps of: (a) mixing 80 to 94 wt % powdery Si 3 N 4 with 2 to 10 wt % Mg compound calculated in MgO equivalent and with 2 to 10 wt % Y compound calculated in Y 2 O 3 equivalent, and then molding the mixture, in which the Si 3 N 4 powder contains 80% or more α- phase, and the grains are 1 μm or less in diameter on average; (b) performing primary sintering of the molded object in step (a) at 1,600° C. or less in an atmosphere of nitrogen or nitrogen and an inert gas at 1 to 20 atm to provide a sintered body having a relative density of 85% or more; and (c) performing secondary sintering of the sintered body in step (b) at 1,400° to 1,600° C. in an atmosphere of nitrogen and an inert gas at 300 atm or more, such that 90 vol % or more of the grains in the sintered body produced have a minor axis of 1 μm or less.
Claim 4
Dependent Claim
186 words
A process for manufacture of a sintered body of silicon nitride comprising the steps of: (a) mixing 80 to 94 wt % powdery Si 3 N 4 with 2 to 10 wt % Mg compound calculated in MgO equivalent and with 2 to 10 wt % Y compound calculated in Y 2 O 3 equivalent, and then molding the mixture, in which the Si 3 N 4 powder contains 80% or more α- phase, and the grains are 1 μm or less in diameter on average; (b) performing primary sintering of the molded object in step (a) at 1,600° C. or less in an atmosphere of nitrogen or nitrogen and an inert gas at 1 to 20 atm to provide a sintered body having a relative density of 85% or more; and (c) performing secondary sintering of the sintered body in step (b) at 1,400° to 1,600° C. in an atmosphere of nitrogen and an inert gas at 300 atm or more, such that 90 vol % or more of the grains in the sintered body produced have a minor axis of 1 μm or less.
Claim 5
Dependent Claim
48 words
A process for manufacture of a sintered body of silicon nitride as in claim 2 wherein said secondary sintering is conducted in an atmosphere of nitrogen and an inert gas, in which the nitrogen partial pressure in both the primary and secondary sintering is 1 atm or more.
Claim 6
Dependent Claim
32 words
A process for manufacture of a sintered body of silicon nitride as in claim 2 in which the temperature in the secondary sintering is in the range of 1,450° to 1,550° C.