Method for manufacturing a DRAM using selective epitaxial growth on a contact

Claim 1

A method for manufacturing a dynamic RAM semiconductor device, comprising the steps of: selectively growing a field oxide layer on a surface of a first conduction type semiconductor substrate to define an active region; providing a gate oxide layer on said active region in a gate electrode pattern; forming a first conductive layer according to said gate electrode pattern; doping said active region of said semiconductor substrate with an impurity of a second conduction type using said gate electrode pattern and said field oxide layer as a mask; forming a first insulating layer on the whole surface of said semiconductor substrate; etching selectively said first insulating layer to expose a surface of said impurity-doped region in a first location, thereby forming a first contact hole; growing an epitaxial layer in said first contact hole using the exposed surface of said impurity-doped region in the first location as a seed; forming a second conductive layer upon said epitaxial layer; patterning said second conductive layer to form a lower electrode of a capacitor; forming a dielectric layer on said second conductive layer; forming a third conductive layer on said dielectric layer; patterning said third conductive layer to form an upper electrode of said capacitor; and forming a second insulating layer on said third conductive layer and said first insulating layer.

Claim 2

A method for manufacturing a dynamic RAM semiconductor device, comprising the steps of: selectively growing a field oxide layer on a surface of a first conduction type semiconductor substrate to define an active region; providing a gate oxide layer on said active region in a gate electrode pattern; forming a first conductive layer according to said gate electrode pattern; doping said active region of said semiconductor substrate with an impurity of a second conduction type using said gate electrode pattern and said field oxide layer as a mask; forming a first insulating layer on the whole surface of said semiconductor substrate; etching selectively said first insulating layer to expose a surface of said impurity-doped region in a first location, thereby forming a first contact hole; growing an epitaxial layer in said first contact hole using the exposed surface of said impurity-doped region in the first location as a seed; forming a second conductive layer upon said epitaxial layer; patterning said second conductive layer to form a lower electrode of a capacitor; forming a dielectric layer on said second conductive layer; forming a third conductive layer on said dielectric layer; patterning said third conductive layer to form an upper electrode of said capacitor; and forming a second insulating layer on said third conductive layer and said first insulating layer.

Claim 6

A method for manufacturing a dynamic RAM semiconductor device, comprising the steps of: selectively growing a field oxide layer on a surface of a first conduction type semiconductor substrate to define an active region; providing a gate oxide layer on said active region in a gate electrode pattern; forming a first conductive layer according to the gate electrode pattern; forming a first insulating layer on the whole surface of said semiconductor substrate; etching selectively said first insulating layer to expose a surface of said impurity-doped region in a first location, thereby forming a first contact hole; etching said semiconductor substrate a certain depth through said first contact hole to form a trench; growing an epitaxial layer down to the interior of said first contact hole using an inside surface of said trench as a seed; forming a second conductive layer upon said epitaxial layer; patterning said second conductive layer to form a lower electrode of a capacitor; forming a dielectric layer on said second conductive layer; forming a third conductive layer on said dielectric layer; patterning said third conductive layer to form an upper electrode of said capacitor; and forming a second insulating layer on said third conductive layer and said first insulating layer.

Claim 7

A method for manufacturing a dynamic RAM semiconductor device, comprising the steps of: selectively growing a field oxide layer on a surface of a first conduction type semiconductor substrate to define an active region; providing a gate oxide layer on said active region in a gate electrode pattern; forming a first conductive layer according to the gate electrode pattern; forming a first insulating layer on the whole surface of said semiconductor substrate; etching selectively said first insulating layer to expose a surface of said impurity-doped region in a first location, thereby forming a first contact hole; etching said semiconductor substrate a certain depth through said first contact hole to form a trench; growing an epitaxial layer down to the interior of said first contact hole using an inside surface of said trench as a seed; forming a second conductive layer upon said epitaxial layer; patterning said second conductive layer to form a lower electrode of a capacitor; forming a dielectric layer on said second conductive layer; forming a third conductive layer on said dielectric layer; patterning said third conductive layer to form an upper electrode of said capacitor; and forming a second insulating layer on said third conductive layer and said first insulating layer.

Claim 11

The method for manufacturing a dynamic RAM semiconductor device comprising the steps of: selectively growing a field oxide layer on the surface of a first conduction type semiconductor substrate to define an active region; providing a gate oxide layer on said active region in a gate electrode pattern; forming a first conductive layer according to said gate electrode pattern; doping said active region of said semiconductor substrate with an impurity of a second conduction type using said gate electrode pattern and said field oxide layer as a mask; forming a thick first insulating layer on the whole surface of said semiconductor substrate; etching selectively said first insulating layer to expose a surface of said impurity-doped region in a first location, thereby forming a first contact hole; growing an epitaxial layer in said first contact hole using the exposed surface of said impurity doped region in the first location as a seed; forming a second conductive layer on said epitaxial layer and said thick first insulating layer, wherein a central region of said second conductive layer over said epitaxial layer is depressed; patterning said second conductive layer to form a lower electrode of a capacitor; forming a dielectric layer on said second conductive layer; forming a third conductive layer on said dielectric layer; patterning said third conductive layer to form an upper electrode of said capacitor; and forming a second insulating layer on said third conductive layer and said first insulating layer.

Claim 12

The method for manufacturing a dynamic RAM semiconductor device comprising the steps of: selectively growing a field oxide layer on the surface of a first conduction type semiconductor substrate to define an active region; providing a gate oxide layer on said active region in a gate electrode pattern; forming a first conductive layer according to said gate electrode pattern; doping said active region of said semiconductor substrate with an impurity of a second conduction type using said gate electrode pattern and said field oxide layer as a mask; forming a thick first insulating layer on the whole surface of said semiconductor substrate; etching selectively said first insulating layer to expose a surface of said impurity-doped region in a first location, thereby forming a first contact hole; growing an epitaxial layer in said first contact hole using the exposed surface of said impurity doped region in the first location as a seed; forming a second conductive layer on said epitaxial layer and said thick first insulating layer, wherein a central region of said second conductive layer over said epitaxial layer is depressed; patterning said second conductive layer to form a lower electrode of a capacitor; forming a dielectric layer on said second conductive layer; forming a third conductive layer on said dielectric layer; patterning said third conductive layer to form an upper electrode of said capacitor; and forming a second insulating layer on said third conductive layer and said first insulating layer.

Claim 15

A method for manufacturing a dynamic RAM semiconductor device, comprising the steps of: selectively growing a field oxide layer on a surface of a first conduction type semiconductor substrate to define an active region; providing a gate oxide layer on said active region in a gate electrode pattern; forming a first conductive layer according to said gate electrode pattern; doping said active region of said semiconductor substrate with an impurity of a second conduction type using said gate electrode pattern and said field oxide layer as a mask; forming a thick first insulating layer on the whole surface of said substrate; flattening said first insulating layer; etching selectively said first insulating layer to expose a surface of said impurity-doped region in a first location, thereby forming a first contact hole; growing an epitaxial layer is said first contact hole until at least level with said flattened first insulating layer, using the exposed surface of said impurity doped region in the first location as a seed; etching the whole face of said first insulating layer by a predetermined depth; forming a second conductive layer upon said epitaxial layer; patterning said second conductive layer to form a lower electrode of a capacitor, wherein a central portion of said second conductive layer projects upward over the epitaxial layer; forming a dielectric layer on said second conductive layer; forming a third conductive layer on said dielectric layer; patterning said third conductive layer to form an upper electrode of said capacitor; and forming a second insulating layer on said third conductive layer and said first insulating layer.

Claim 16

A method for manufacturing a dynamic RAM semiconductor device, comprising the steps of: selectively growing a field oxide layer on a surface of a first conduction type semiconductor substrate to define an active region; providing a gate oxide layer on said active region in a gate electrode pattern; forming a first conductive layer according to said gate electrode pattern; doping said active region of said semiconductor substrate with an impurity of a second conduction type using said gate electrode pattern and said field oxide layer as a mask; forming a thick first insulating layer on the whole surface of said substrate; flattening said first insulating layer; etching selectively said first insulating layer to expose a surface of said impurity-doped region in a first location, thereby forming a first contact hole; growing an epitaxial layer is said first contact hole until at least level with said flattened first insulating layer, using the exposed surface of said impurity doped region in the first location as a seed; etching the whole face of said first insulating layer by a predetermined depth; forming a second conductive layer upon said epitaxial layer; patterning said second conductive layer to form a lower electrode of a capacitor, wherein a central portion of said second conductive layer projects upward over the epitaxial layer; forming a dielectric layer on said second conductive layer; forming a third conductive layer on said dielectric layer; patterning said third conductive layer to form an upper electrode of said capacitor; and forming a second insulating layer on said third conductive layer and said first insulating layer.