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US5045435A Expired / Lapsed US ⏱️ 0.0 years remaining

Water-borne, alkali-developable, photoresist coating compositions and their preparation

Assignee: AWI Licensing LLC
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Filing: 1990-03-12
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Granted: 1991-09-03
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Expires: 2010-03-12
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Abstract

Abstract An aqueous photopolymer composition is produced by adding a monomer to a latex of a partially neutralized carboxylated acrylic copolymer, having an acid number greater than 80, along with photoinitator and components to produce an aqueous coatable and alkali developable photoresist composition. Preferred neutralization is 30-50% for dip-coating and 40-60% for screen-printing to produce 1 mil lines and 1 mil space after ultraviolet exposure and mild alkali development.

Inventors

  • 👤 Diane L. Adams
  • 👤 Wendell A. Ehrhart
  • 👤 Donald Jones

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 03:02
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/027; G03F7/032; G03F7/033

Claims Analysis

Total Claims: 25
Claim 1
Independent Claim 91 words
A photoresist coating composition comprising (a) a multifunctional acrylate monomer, (b) a photoinitiator, and (c) a latex of a water insoluble carboxylated acrylate copolymer having an acid number greater than about 80, wherein further the latex has been neutralized with a base in an amount of at least about 0.25 equivalents per equivalent of acid, and wherein (a), (b), and (c) together are a waterborne, stable, homogeneous coating mixture can form a uniform, homogeneous photoresist layer which is aqueous alkali developable and, after crosslinking, is resistant to etch and plating solutions.
Claim 2
Dependent Claim 91 words
A photoresist coating composition comprising (a) a multifunctional acrylate monomer, (b) a photoinitiator, and (c) a latex of a water insoluble carboxylated acrylate copolymer having an acid number greater than about 80, wherein further the latex has been neutralized with a base in an amount of at least about 0.25 equivalents per equivalent of acid, and wherein (a), (b), and (c) together are a waterborne, stable, homogeneous coating mixture can form a uniform, homogeneous photoresist layer which is aqueous alkali developable and, after crosslinking, is resistant to etch and plating solutions.
Claim 3
Dependent Claim 17 words
The coating composition of claim 1 which has a percent solids level of at least about 25%.
Claim 4
Dependent Claim 45 words
The coating composition of claim 1 wherein the copolymer of (c) has a glass transition temperature greater than 60° C., the ratio of the amount of polymer:monomer is about 58:42 or greater, and the stable homogeneous coating mixture is a contact imageable photoresist coating composition.
Claim 5
Dependent Claim 11 words
The coating composition of claim 1 which also has a photosensitizer.
Claim 6
Dependent Claim 37 words
The coating composition of claim 1 wherein the amount of base is in the range of from 0.4 to 0.6 equivalents per equivalent of acid to provide a coating composition that can be applied by screen printing.
Claim 7
Dependent Claim 36 words
The coating composition of claim 1 wherein the amount of base is in the range of from 0.3 to 0.5 equivalents per equivalent of acid to provide a coating composition that can be applied by dip-coating.
Claim 8
Dependent Claim 24 words
The coating composition of claim 1 wherein the base is ammonia, sodium hydroxide, potassium hydroxide, 4-methylmorpholine, 2-amino-2-methyl-1-propanol, 2-di-methylamino-2-methyl-1-propanol, monoethanol amine, N,N-dimethylethanolamine, methyldiethanol amine, morpholine.
Claim 9
Dependent Claim 36 words
The coating composition of claim 1 wherein the photoinitiator is selected from the group consisting of [4-(4-methylphenylthio)phenyl] phenylmethanone, orthochloro HABI, P,P'-bis-dimethylamino benzophenone, benzophenone, 2,2-dimethoxy-2-phenylacetophenone, 1-hydroxycyclohexyl phenyl ketone, isopropylthioxanthone (mixture of 2- and 4-isomers) and 2-methyl-1-[4-(methylthio) phenyl]-2-morpholinopropanone-1.
Claim 10
Dependent Claim 11 words
The coating composition of claim 7 wherein the base is ammonia.
Claim 11
Dependent Claim 14 words
The coating composition of claim 1 wherein the multifunctional acrylate monomer is water insoluble.
Claim 12
Independent Claim 100 words
A method for preparing a photoresist coating composition which is waterborne, and can form a photoresist layer that is aqueous alkali developable, and is resistant to etch and plating solutions after photopolymerization, the said method comprising the steps of: (a) adding a base to a latex of a water insoluble carboxylated acrylate copolymer, the said copolymer having an acid number greater than about 80, the base being added in an amount of at least about 0.25 equivalents per equivalent of acid, and (b) adding a multifunctional acrylate monomer and a photoinitiator to form a stable, homogeneous, waterborne, photoresist coating mixture.
Claim 13
Independent Claim 100 words
A method for preparing a photoresist coating composition which is waterborne, and can form a photoresist layer that is aqueous alkali developable, and is resistant to etch and plating solutions after photopolymerization, the said method comprising the steps of: (a) adding a base to a latex of a water insoluble carboxylated acrylate copolymer, the said copolymer having an acid number greater than about 80, the base being added in an amount of at least about 0.25 equivalents per equivalent of acid, and (b) adding a multifunctional acrylate monomer and a photoinitiator to form a stable, homogeneous, waterborne, photoresist coating mixture.
Claim 14
Dependent Claim 47 words
The method of claim 11 wherein the water insoluble carboxylated acrylate copolymer has a glass transition temperature greater than 60° C.; wherein further the ratio of the amount of polymer:monomer is about 58:42 or greater, and the stable, homogenous, water-borne photoresist coating mixture formed provides contact imageability.
Claim 15
Dependent Claim 26 words
The method of claim 11 wherein the base was added in an amount in the range of from 0.4 to 0.6 equivalents per equivalent of acid.
Claim 16
Dependent Claim 26 words
The method of claim 11 wherein the base was added in an amount in the range of from 0.3 to 0.5 equivalents per equivalent of acid.
Claim 17
Dependent Claim 11 words
The method of claim 11 wherein the base added was ammonia.
Claim 18
Dependent Claim 11 words
The method of claim 11 wherein a photosensitizer is also added.
Claim 19
Dependent Claim 33 words
The method of claim 11 wherein before step (b) a monomer pre-mix was formed by mixing the photoinitiator with the monomer while heating, and then as step (b) this monomer pre-mix was added.
Claim 20
Dependent Claim 74 words
An aqueous liquid photoresist for dip-coating or spraying comprising in parts by weight: ______________________________________ A water insoluble carboxylated acrylic 55-75 parts copolymer latex (30-50% solids) Water 25-30 parts 28% aqueous ammonia 1.0-3.6 parts A multifunctional acrylate monomer 8-12 parts A water immiscible photoinitiator 1.5-3 parts A photosensitizer 0.2-0.8 parts ______________________________________ further providing that the latex has an acid number greater than about 80 and that the aqueous ammonia provides at least about 25% neutralization.
Claim 21
Dependent Claim 74 words
An aqueous liquid photoresist for dip-coating or spraying comprising in parts by weight: ______________________________________ A water insoluble carboxylated acrylic 55-75 parts copolymer latex (30-50% solids) Water 25-30 parts 28% aqueous ammonia 1.0-3.6 parts A multifunctional acrylate monomer 8-12 parts A water immiscible photoinitiator 1.5-3 parts A photosensitizer 0.2-0.8 parts ______________________________________ further providing that the latex has an acid number greater than about 80 and that the aqueous ammonia provides at least about 25% neutralization.
Claim 22
Dependent Claim 73 words
An aqueous liquid photoresist for screen printing comprising in parts by weight: ______________________________________ A water insoluble carboxylated acrylic 70-85 parts copolymer latex (30-50% solids) Water 5-10 parts 28% aqueous ammonia 1.4-4.0 parts A multifunctional acrylate monomer 10-15 parts A water immiscible photoinitiator 1.5-3 parts A photosensitizer 0.2-0.8 parts ______________________________________ further providing that the latex has an acid number greater than about 80 and that the aqueous ammonia provides at least about 25% neutralization.
Claim 23
Dependent Claim 73 words
An aqueous liquid photoresist for screen printing comprising in parts by weight: ______________________________________ A water insoluble carboxylated acrylic 70-85 parts copolymer latex (30-50% solids) Water 5-10 parts 28% aqueous ammonia 1.4-4.0 parts A multifunctional acrylate monomer 10-15 parts A water immiscible photoinitiator 1.5-3 parts A photosensitizer 0.2-0.8 parts ______________________________________ further providing that the latex has an acid number greater than about 80 and that the aqueous ammonia provides at least about 25% neutralization.
Claim 24
Independent Claim 107 words
A method for producing patterns on a substrate comprising the steps: (a) applying to a metal substrate a water-borne photoresist coating composition of a water insoluble carboxylated acrylate copolymer latex, the said copolymer having a glass transition temperature greater than 60° C. and an acid number greater than about 80 which further is neutralized with a base in an amount of at least about 0.25 equivalents per equivalent of acid, a multifunctional acrylate monomer and a photoinitiator; (b) drying the composition to produce a 0.2 to 2.0 mil contact imageable photoresist film; (c) imaging the photoresist film; and (d) developing the film with a mild alkaline solution.
Claim 25
Independent Claim 107 words
A method for producing patterns on a substrate comprising the steps: (a) applying to a metal substrate a water-borne photoresist coating composition of a water insoluble carboxylated acrylate copolymer latex, the said copolymer having a glass transition temperature greater than 60° C. and an acid number greater than about 80 which further is neutralized with a base in an amount of at least about 0.25 equivalents per equivalent of acid, a multifunctional acrylate monomer and a photoinitiator; (b) drying the composition to produce a 0.2 to 2.0 mil contact imageable photoresist film; (c) imaging the photoresist film; and (d) developing the film with a mild alkaline solution.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-09-02 1995-03-04 1995-09-03 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-09-02 1999-03-04 1999-09-03 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-09-02 2003-03-04 2003-09-03 $7700.00 Window Closed / Lapsed

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