Patent US5045419A successfully refreshed from Google Patents.
US5045419A
Expired / Lapsed
US
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Pattern exposure/transfer method and pattern exposure/transfer mask apparatus
Assignee: Toshiba Corp
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Filing: 1989-12-26
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Granted: 1991-09-03
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Expires: 2009-12-26
Abstract
Abstract According to a pattern exposure/transfer method disclosed in the present invention, an optical modulating mask whose optical contrast can be changed by electrical control is used and an optical pattern image of the optical modulating mask is exposed/transferred to an object to be exposed. The present invention also discloses a pattern exposure/transfer mask apparatus whose optical contrast can be changed by electrical control. According to the pattern exposure/transfer method of the present invention, an arbitrary pattern image can be easily formed by the optical modulating mask. The pattern exposure/transfer mask apparatus of the present invention is able to change optical contrast by electrical control, and allows easy formation of an arbitrary pattern image.
Inventors
- 👤 Katsuya Okumura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 00:46
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70216; G03F7/70283; G03F7/70291; G03F1/00; G03F1/50
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
189 words
A method of exposing a pattern onto a photoresist layer deposited on a semiconductor substrate, comprising the steps of: providing an optical modulating mask including first and second glass plates facing each other, a liquid crystal layer sandwiched between the first and second glass plates, said liquid crystal layer having a liquid crystal molecules, first stripes arranged on an inner surface of said first glass plate, and second stripes arranged on an inner surface of said second glass plate in a direction perpendicular to that of said first stripes to define a plurality of stripe crossing areas in the liquid crystal layer; selectively applying voltages to said first and second stripes for orienting the liquid crystal molecules in a direction perpendicular to the surfaces of the first and second glass plates at the crossing areas of the voltage-applied selected stripes that correspond to the pattern being exposed; and applying parallel light beams onto an entire surface of the optical modulating mask with the light beams being transmitted only through the stripe crossing areas of the voltage-applied selected stripes of the liquid crystal layer to produce a desired optical image.
Claim 2
Independent Claim
189 words
A method of exposing a pattern onto a photoresist layer deposited on a semiconductor substrate, comprising the steps of: providing an optical modulating mask including first and second glass plates facing each other, a liquid crystal layer sandwiched between the first and second glass plates, said liquid crystal layer having a liquid crystal molecules, first stripes arranged on an inner surface of said first glass plate, and second stripes arranged on an inner surface of said second glass plate in a direction perpendicular to that of said first stripes to define a plurality of stripe crossing areas in the liquid crystal layer; selectively applying voltages to said first and second stripes for orienting the liquid crystal molecules in a direction perpendicular to the surfaces of the first and second glass plates at the crossing areas of the voltage-applied selected stripes that correspond to the pattern being exposed; and applying parallel light beams onto an entire surface of the optical modulating mask with the light beams being transmitted only through the stripe crossing areas of the voltage-applied selected stripes of the liquid crystal layer to produce a desired optical image.
Claim 3
Dependent Claim
31 words
A method according to claim 1, which further comprises the steps of reducing the optical image, and transmitting the reduced optical image onto the photoresist layer deposited on the semiconductor substrate.
Claim 4
Dependent Claim
169 words
A pattern exposure mask apparatus comprising: a first glass plate; a second glass plate facing said first glass plate; a liquid crystal layer, including liquid crystal molecules, sandwiched between said first and second glass plates; first stripes arranged on an inner surface of said first glass plate; second stripes arranged on an inner surface of said second glass plate in a direction perpendicular to that of said first stripes for defining a plurality of stripe crossing areas in the liquid crystal layer; means for selectively applying voltages to said first and second stripes for orienting the liquid crystal molecules in a direction perpendicular to the surfaces of the first and second glass plates at the crossing areas of the voltage-applied selected stripes that correspond to the pattern being exposed; and means for applying parallel light beams onto an entire surface of the optical modulating mask with the light beings being transmitted only through the selected stripe crossing areas of the liquid crystal layer to produce a desired optical image.
Claim 5
Dependent Claim
169 words
A pattern exposure mask apparatus comprising: a first glass plate; a second glass plate facing said first glass plate; a liquid crystal layer, including liquid crystal molecules, sandwiched between said first and second glass plates; first stripes arranged on an inner surface of said first glass plate; second stripes arranged on an inner surface of said second glass plate in a direction perpendicular to that of said first stripes for defining a plurality of stripe crossing areas in the liquid crystal layer; means for selectively applying voltages to said first and second stripes for orienting the liquid crystal molecules in a direction perpendicular to the surfaces of the first and second glass plates at the crossing areas of the voltage-applied selected stripes that correspond to the pattern being exposed; and means for applying parallel light beams onto an entire surface of the optical modulating mask with the light beings being transmitted only through the selected stripe crossing areas of the liquid crystal layer to produce a desired optical image.
Claim 6
Dependent Claim
32 words
An apparatus according to claim 3, which further comprises means for reducing the optical image, and means for transmitting the reduced optical image onto a photoresist layer deposited on a semiconductor substrate.
Claim 7
Dependent Claim
34 words
An apparatus according to claim 3, wherein said parallel light beam applying means includes a pair of deflecting plates for directing the parallel light beams onto the entire surface of the optical modulating mask.
Claim 8
Dependent Claim
17 words
An apparatus according to claim 4, wherein said means for reducing the optical image includes lens means.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-09-02 | 1995-03-04 | 1995-09-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-09-02 | 1999-03-04 | 1999-09-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-09-02 | 2003-03-04 | 2003-09-03 | $7700.00 | Window Closed / Lapsed |