US5043578A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Writing atomic scale features with fine tip as source of deposited atoms
Assignee: International Business Machines Corp
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Filing: 1990-04-05
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Granted: 1991-08-27
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Expires: 2010-04-05
Abstract
Abstract Submicron structures are written on a surface by positioning in nanometer range proximity, preferably within current tunneling range, of the surface a scanning tip of a material that emits atoms upon application of an applied voltage of low magnitude. While the tip is maintained within said range, it is moved relative to the surface, and a series of short voltage pulses are concurrently applied between the tip and surface. These pulses cause atoms of tip material to directly transfer to the surface and concurrently cause remaining atoms of tip material to migrate to the tip and continuously reform the tip and maintain its sharp configuration, thereby insuring uninterrupted writing ability. Various tip materials exhibiting low field evaporation potentials may be used; however, gold is preferred if deposition is to be under ambient conditions. Heating the tip enhances the ability of the material to emit atoms. The deposited structures may be selectively sensed or erased by application of appropriate voltages.
Inventors
- 👤 Peter H. Guthner
- 👤 Harry J. Mamin
- 👤 Daniel Rugar
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 07:44
CPC Classifications
B; B82; B82B; B82B3/00; B82Y; B82Y10/00; B82Y30/00; B82Y40/00; G; G11; G11B; G11B9/00; G11B9/12; G11B9/14; G01; G01Q; G01Q80/00; H; H01; H01J; H01J2237/00; H01J2237/30; H01J2237/317; H01J2237/31735; H01J2237/31738; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/855; Y10S977/857
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
142 words
A method of writing submicron structures on a surface, comprising the steps of: providing an apparatus having a sharp scanning wire composed entirely of a material that when subjected to an applied voltage of low magnitude emits atoms from the tip of said wire; positioning the tip of the wire within atom transfer range of the surface; and while maintaining the tip of the wire within atom transfer range, moving the tip laterally relative to the surface and concurrently applying a series of short voltage pulses to the wire of a magnitude and duration sufficient to cause atoms of wire material to directly transfer to and write on the surface and concurrently cause remaining atoms of the wire material to continuously reform the tip and maintain its sharp configuration, thereby insuring uninterrupted writing ability until the supply of wire is substantially exhausted.
Claim 2
Independent Claim
142 words
A method of writing submicron structures on a surface, comprising the steps of: providing an apparatus having a sharp scanning wire composed entirely of a material that when subjected to an applied voltage of low magnitude emits atoms from the tip of said wire; positioning the tip of the wire within atom transfer range of the surface; and while maintaining the tip of the wire within atom transfer range, moving the tip laterally relative to the surface and concurrently applying a series of short voltage pulses to the wire of a magnitude and duration sufficient to cause atoms of wire material to directly transfer to and write on the surface and concurrently cause remaining atoms of the wire material to continuously reform the tip and maintain its sharp configuration, thereby insuring uninterrupted writing ability until the supply of wire is substantially exhausted.
Claim 3
Dependent Claim
69 words
The method of claim 1, including the step of: erasing the submicron structures by: positioning and maintaining the tip within atom transfer range of the surface; and applying a series of short voltage pulses to the tip of a magnitude sufficient to cause atoms previously deposited on the surface to be attracted to and deposited on the tip while the tip is positioned over the atoms to be removed.
Claim 4
Dependent Claim
35 words
The method of claim 2, including the step of: rewriting over the surface with atoms from the wire after atoms have been removed therefrom, thereby to provide a storage medium with a reusable storage surface.
Claim 5
Dependent Claim
17 words
The method of claim 1, wherein the polarity of the tip relative to the surface is negative.
Claim 6
Dependent Claim
19 words
The method of claim 1, wherein, for storage applications, the applying step is conducted at ambient temperature and atmosphere.
Claim 7
Dependent Claim
11 words
The method of claim 1, wherein the tip material is gold.
Claim 8
Dependent Claim
26 words
The method of claim 1, wherein said transfer is effected in as little as 10 nanoseconds and produces a structure less than 10 nanometers in diameter.
Claim 9
Dependent Claim
22 words
The method of claim 1, wherein the surface is part of an electronic circuit and the transferred atoms collectively constitute circuit elements.
Claim 10
Dependent Claim
19 words
The method of claim 1, wherein the surface is part of a mask used to lithographically form integrated circuits.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-08-26 | 1995-02-25 | 1995-08-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-08-26 | 1999-02-25 | 1999-08-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-08-26 | 2003-02-25 | 2003-08-27 | $7700.00 | Window Closed / Lapsed |