US5041783A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Probe unit for an atomic probe microscope
Assignee: Olympus Corp
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Filing: 1990-02-05
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Granted: 1991-08-20
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Expires: 2010-02-05
Abstract
Abstract A probe unit includes a disk-like substrate made of transparent material, a transparent electrode coated on all over the substrate, and a metal wire whose sharp tip is projected vertically and upwardly from the center of the substrate through the transparent electrode. The metal wire is made of Pt-Ir, which incudes a sharp tip projected from the upper surface of the substrate and a stem embedded in a hole of the electrode and fixed to the electrode and substrate by conductive adhesive.
Inventors
- 👤 Hiroko Ohta
- 👤 Tsugiko Takase
- 👤 Shuzo Mishima
- 👤 Hirofumi Miyamoto
- 👤 Takao Okada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 09:36
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/10; G01Q60/16; G01Q30/00; G01Q30/02; G01Q30/025; G01Q70/00; G01Q70/02; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/86; Y10S977/861
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
45 words
A probe unit for a scanning tunnel microscope comprising a transparent substrate, a transparent electrode supported by the substrate, and a conductive projection supported by the substrate and electrically connected to the electrode, the conductive projection having a sharp front end projecting from the substrate.
Claim 2
Dependent Claim
45 words
A probe unit for a scanning tunnel microscope comprising a transparent substrate, a transparent electrode supported by the substrate, and a conductive projection supported by the substrate and electrically connected to the electrode, the conductive projection having a sharp front end projecting from the substrate.
Claim 3
Dependent Claim
26 words
The probe unit according to claim 1, wherein said conductive projection is a metal wire having a stem portion embedded in and supported by the substrate.
Claim 4
Dependent Claim
34 words
The probe unit according to claim 2, wherein said transparent electrode is a conductive layer formed on a surface of the substrate and the front of said metal wire passes through the conductive layer.
Claim 5
Dependent Claim
31 words
The probe unit according to claim 1, wherein said transparent electrode is a conductive layer formed on a surface of the substrate and said projection is formed on this conductive layer.
Claim 6
Dependent Claim
26 words
The probe unit according to claim 1, wherein said substrate has a disk shape and said projection is projected along the center axis of the substrate.
Claim 7
Dependent Claim
20 words
The probe unit according to claim 1, wherein said electrode has a layer vacuum-deposited on a surface of the substrate.
Claim 8
Dependent Claim
21 words
The probe unit according to claim 6, wherein said conductive projection has a conductive member selectively deposited on said vacuum-deposited layer.
Claim 9
Dependent Claim
29 words
The probe unit according to claim 1, wherein said substrate has a central protrusion on the top thereof and said projection is formed on the center of the protrusion.
Claim 10
Dependent Claim
40 words
A probe unit for a scanning tunnel microscope comprising a transparent substrate, a conductive probe vertically supported by the substrate, the probe having a sharp tip projecting from the substrate, and means for applying a voltage to said projecting tip.
Claim 11
Dependent Claim
40 words
A probe unit for a scanning tunnel microscope comprising a transparent substrate, a conductive probe vertically supported by the substrate, the probe having a sharp tip projecting from the substrate, and means for applying a voltage to said projecting tip.
Claim 12
Dependent Claim
39 words
The probe unit according to claim 9, wherein said probe includes a tip and base which are projected from the opposite surfaces of the substrate, and which includes a metal lead electrically connected to the base of the probe.
Claim 13
Dependent Claim
22 words
The probe unit according to claim 9, which includes a conductive pattern formed on the substrate and electrically connected to the probe.
Claim 14
Dependent Claim
21 words
The probe unit according to claim 9, which includes another transparent substrate and a transparent electrode formed between the transparent substrates.
Claim 15
Dependent Claim
35 words
The probe unit according to claim 9, which includes first and second transparent electrodes formed on the opposite surfaces of the substrate, said probe vertically projected from the first transparent electrode and electrically connected thereto.
Claim 16
Dependent Claim
55 words
A probe unit comprising a transparent substrate, a transparent electrode supported by the substrate, and a conductive projection supported by the substrate and electrically connected to the electrode, wherein said conductive projection is a metal wire having a stem portion embedded in and supported by the substrate and a sharp front projecting from the substrate.
Claim 17
Dependent Claim
55 words
A probe unit comprising a transparent substrate, a transparent electrode supported by the substrate, and a conductive projection supported by the substrate and electrically connected to the electrode, wherein said conductive projection is a metal wire having a stem portion embedded in and supported by the substrate and a sharp front projecting from the substrate.
Claim 18
Dependent Claim
34 words
The probe unit according to claim 14, wherein said transparent electrode is a conductive layer formed on a surface of the substrate, and the front of said metal wire passes through the conductive layer.
Claim 19
Dependent Claim
46 words
A probe unit comprising a transparent substrate, a transparent electrode supported by the substrate, and a conductive projection supported by the substrate and electrically connected to the electrode, wherein said substrate has a disk shape, and said projection projects along the center axis of the substrate.
Claim 20
Dependent Claim
46 words
A probe unit comprising a transparent substrate, a transparent electrode supported by the substrate, and a conductive projection supported by the substrate and electrically connected to the electrode, wherein said substrate has a disk shape, and said projection projects along the center axis of the substrate.
Claim 21
Dependent Claim
63 words
A probe unit for an atomic probe microscope adapted to be positioned to face a sample, the probe unit comprising: a transparent substrate, and conductive projection supported by the substrate, the conductive projection having a sharp front end projecting from the substrate, whereby at least a portion of the substrate around the projection passes light toward the sample and light from the sample.
Claim 22
Dependent Claim
63 words
A probe unit for an atomic probe microscope adapted to be positioned to face a sample, the probe unit comprising: a transparent substrate, and conductive projection supported by the substrate, the conductive projection having a sharp front end projecting from the substrate, whereby at least a portion of the substrate around the projection passes light toward the sample and light from the sample.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-08-19 | 1995-02-18 | 1995-08-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-08-19 | 1999-02-18 | 1999-08-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-08-19 | 2003-02-18 | 2003-08-20 | $7700.00 | Window Closed / Lapsed |