US5039657A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Preparation of superconducting oxide films by reactive evaporation using ozone
Assignee: University of Minnesota System
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Filing: 1990-09-05
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Granted: 1991-08-13
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Expires: 2010-09-05
Abstract
Abstract A low-temperature method is provided to prepare a superconductive ceramic oxide comprising contacting the surface of a heated substrate with ozone while evaporating the other components of the superconductive ceramic oxide onto said surface, so that a layer of the superconductive ceramic oxide forms thereon.
Inventors
- 👤 Allen M. Goldman
- 👤 Dale D. Berkley
- 👤 Burgess R. Johnson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 00:23
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0548; C; C23; C23C; C23C14/00; C23C14/0021; C23C14/06; C23C14/08; C23C14/087; H10N60/0381; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/73; Y10S505/732; Y10S505/736
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
54 words
A method of preparing an oriented superconductive ceramic oxide comprising directing a stream of essentially pure ozone at the surface of a heated substrate while evaporating the metallic components of the superconductive ceramic oxide onto said surface so that a layer of said superconductive ceramic oxide is formed thereon without need of further annealing.
Claim 2
Independent Claim
54 words
A method of preparing an oriented superconductive ceramic oxide comprising directing a stream of essentially pure ozone at the surface of a heated substrate while evaporating the metallic components of the superconductive ceramic oxide onto said surface so that a layer of said superconductive ceramic oxide is formed thereon without need of further annealing.
Claim 3
Dependent Claim
11 words
The method of claim 1 wherein the metallic components comprise Cu.
Claim 4
Dependent Claim
13 words
The method of claim 2 wherein the metallic components comprise Y and Ba.
Claim 5
Dependent Claim
14 words
The method of claim 1 wherein the substrate is heated to about 500°-700° C.
Claim 6
Dependent Claim
24 words
The method of claim 1 wherein the stream of ozone delivers at least about 10 15 molecules of O 3 /sec to the surface.
Claim 7
Dependent Claim
26 words
The method of claim 1 wherein the stream delivers ozone at a rate comparable to the rate of evaporation of the metal components onto said surface.
Claim 8
Dependent Claim
17 words
The method of claim 1 wherein the superconductive ceramic oxide layer is about 500 Å-0.5 μm thick.
Claim 9
Dependent Claim
19 words
The method of claim 1 wherein the stream of ozone is provided by the controlled evaporation of liquid ozone.
Claim 10
Dependent Claim
22 words
The method of claim 1 wherein the metallic components are evaporated at a pump pressure of about 10 -6 -10 -7 Torr.
Claim 11
Dependent Claim
15 words
The method of claim 1 wherein the substrate comprises single crystal of Si or GaAs.
Claim 12
Dependent Claim
11 words
The method of claim 1 wherein the substrate is an oxide.
Claim 13
Dependent Claim
17 words
The method of claim 1 further comprising depositing an insulating layer on said superconductive ceramic oxide layer.
Claim 14
Dependent Claim
19 words
The method of claim 1 wherein said ozone is thermally decomposed to produce active oxygen atoms at said surface.
References Cited (Backward Citations)
US4361114A
Cited
JPS5773178A
Cited
JPS5850629A
Cited
JPS62104177A
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US4728621A
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US4916116A
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US4950642A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-08-12 | 1995-02-11 | 1995-08-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-08-12 | 1999-02-11 | 1999-08-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-08-12 | 2003-02-11 | 2003-08-13 | $7700.00 | Window Closed / Lapsed |