US5036646A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of packaging an integrated circuit in an inert gas
Assignee: MITUSI TOATSU CHEMICALS INCORPORATED A CORP OF JAPAN
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Filing: 1989-05-10
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Granted: 1991-08-06
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Expires: 2009-05-10
Abstract
Abstract The present invention relates to a container for an integrated circuit wafer comprising a tray-shaped member having a recess and a complimentary sheet member sized to attach to and cover said recess, at least one of said members being made from a material selected from the group consisting of a single layer of a high nitrile resin, and a laminated layer of a high nitrile resin, a polyvinylidene chloride resin, an ethylene vinyl alcohol copolymer or a polyvinyl alcohol resin, and a method for storing the wafer.
Inventors
- 👤 Masayuki Makihara
- 👤 Toshirou Ryuno
- 👤 Mitsunobu Fujita
- 👤 Osamu Narimatsu
- 👤 Toshiyuki Konishi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 15:30
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/10; H10P72/19; H10P72/1911
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
162 words
A method for storing an integrated circuit wafer comprising engaging a tray-shaped member and a complimentary sheet member to form a closed container comprising: (a) providing a tray-shaped member having a recess for holding said wafer; and (b) providing a complimentary sheet member proportionately sized to attach to and cover said recess; at least one of said tray-shaped member and said complimentary sheet member being made from a material selected from the group consisting of a single layer of at least one high-nitrile resin and a laminated layer of at least one thermoplastic resin and at least one gas barrier resin; and the surface of the container that may contact the integrated circuit wafer has an ASTM-D-2240 resin hardness of at least about 70; placing the integrated circuit wafer in the container, adding an inert gas to the container and storing the integrated circuit wafer in the container in the presence of the inert gas which has been added to the container.
Claim 2
Independent Claim
162 words
A method for storing an integrated circuit wafer comprising engaging a tray-shaped member and a complimentary sheet member to form a closed container comprising: (a) providing a tray-shaped member having a recess for holding said wafer; and (b) providing a complimentary sheet member proportionately sized to attach to and cover said recess; at least one of said tray-shaped member and said complimentary sheet member being made from a material selected from the group consisting of a single layer of at least one high-nitrile resin and a laminated layer of at least one thermoplastic resin and at least one gas barrier resin; and the surface of the container that may contact the integrated circuit wafer has an ASTM-D-2240 resin hardness of at least about 70; placing the integrated circuit wafer in the container, adding an inert gas to the container and storing the integrated circuit wafer in the container in the presence of the inert gas which has been added to the container.
Claim 3
Dependent Claim
21 words
The method of claim 1 wherein said high-nitrile resin has an ASTM D14340-66 oxygen permeability of 20 cc/m 2 .atm.24 hr.
Claim 4
Dependent Claim
34 words
The method of claim 1 wherein said gas barrier resin is selected from the group consisting of a high-nitrile resin, a polyvinylidene chloride resin, an ethylene vinyl alcohol copolymer and a polyvinyl alcohol resin.
Claim 5
Dependent Claim
16 words
The method of claim 1 wherein said high-nitrile resin is a copolymer containing unsaturated nitrile monomers.
Claim 6
Dependent Claim
18 words
The method of claim 4 wherein said copolymer contains at least about 50% by weight unsaturated nitrile monomers.
Claim 7
Dependent Claim
16 words
The method of claim 4 wherein said copolymer contains at least about 50% by weight acrylonitrile.
Claim 8
Dependent Claim
40 words
The method of claim 1 wherein said high-nitrile resin is a copolymer of at least one unsaturated nitrile monomer and a monomer selected from the group consisting of styrene, butadiene, isoprene, methyl acrylate, ethyl acrylate, methyl methacrylate and ethyl methacrylate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-08-05 | 1995-02-04 | 1995-08-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-08-05 | 1999-02-04 | 1999-08-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-08-05 | 2003-02-04 | 2003-08-06 | $7700.00 | Window Closed / Lapsed |