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US5035782A
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Method for the formation of monomolecular adsorption films or built-up films of monomolecular layers using silane compounds having an acetylene or diacetylene bond
Assignee: Panasonic Holdings Corp
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Filing: 1989-06-27
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Granted: 1991-07-30
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Expires: 2009-06-27
Abstract
Abstract A method for the formation of monomolecular adsorption films of a silane compound having a diacetylene bond is described. The silane compound is chemically adsorbed on a substrate through ═SiO-- bonds and the resultant film is significantly reduced in number of defects such as pinholes. When the monomolecular film is irradiated with actinic light, the diacetylene bonds are convered into a conjugated diacetylene polymer. Similarly, a built-up film of a desired number of monomolecular layers of a silane compound having an acetylene bond formed on a substrate by chemical adsorption and a corresponding number of monomolecular layers of an aliphatic acid or alcohol having an acetylene bond and alternately deposited on the first-mentioned layer is also provided.
Inventors
- 👤 Hideharu Tamura
- 👤 Kazufumi Ogawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 12:58
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; B; B05; B05D; B05D1/00; B05D1/18; B05D1/185; B82; B82Y; B82Y10/00; B82Y30/00; B82Y40/00; G; G02; G02F; G02F1/00; G02F1/35; G02F1/355; G02F1/361; G02F1/3615; G02F1/3617; H01; H01B; H01B1/00; H01B1/06; H01B1/12; H01B1/124; H01B1/125; H10D; H10D64/00; H10D64/01; H10D64/011; H10D64/0111; H10P14/63; H10P14/6326; H10P14/6342; H10P14/65; H10P14/6516; H10P14/6536
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
112 words
A method for the formation of a monomolecular adsorption film which comprises providing a substrate having a layer comprising molecules which react with a silane compound having at least one diacetylene bond; chemically adsorbing the silane compound to the layer to form a monomolecular adsorption film of the silane compound on the substrate through the layer at a temperature not higher than 20° C.; selectively heating a pattern of adsorbed film to a temperature sufficient to cause molecules of the silane compound in the heated portions to become obliquely oriented; and irradiating the film with an energy beam to form a conjugated diacetylene polymer only in the selectively heated portions of film.
Claim 2
Independent Claim
112 words
A method for the formation of a monomolecular adsorption film which comprises providing a substrate having a layer comprising molecules which react with a silane compound having at least one diacetylene bond; chemically adsorbing the silane compound to the layer to form a monomolecular adsorption film of the silane compound on the substrate through the layer at a temperature not higher than 20° C.; selectively heating a pattern of adsorbed film to a temperature sufficient to cause molecules of the silane compound in the heated portions to become obliquely oriented; and irradiating the film with an energy beam to form a conjugated diacetylene polymer only in the selectively heated portions of film.
Claim 3
Dependent Claim
21 words
A method according to claim 1; wherein the substrate is made of silicon and the layer is an SiO 2 layer.
Claim 4
Dependent Claim
27 words
A method according to claim 1, wherein the silane compound has the formula CH.sub.3 (CH.sub.2)mC.tbd.C-C.tbd.C-(CH.sub.2)n-SiCl.sub.3 wherein m and n are, respectively, an integer of 0 to 25.
Claim 5
Dependent Claim
37 words
A method according to claim 1, wherein the chemical adsorption is effected by immersing the substrate in a solution of the silane compound in a solvent at a concentration of from 2×10 -3 to 5×10 -2 mole/liter.
Claim 6
Independent Claim
86 words
A method for forming a built-up film of monomolecular layers comprising providing a substrate having a layer comprising molecules which react with a silane compound having an acetylene bond; chemically adsorbing the silane compound to said layer to form a monomolecular adsorption film characterized by molecules oriented in a direction oblique to the substrate; and applying an aliphatic acid having an acetylene bond to the adsorption film by oxidative coupling to thereby form a monomolecular layer of the acid through diacetylene bonds with the silane compound.
Claim 7
Independent Claim
86 words
A method for forming a built-up film of monomolecular layers comprising providing a substrate having a layer comprising molecules which react with a silane compound having an acetylene bond; chemically adsorbing the silane compound to said layer to form a monomolecular adsorption film characterized by molecules oriented in a direction oblique to the substrate; and applying an aliphatic acid having an acetylene bond to the adsorption film by oxidative coupling to thereby form a monomolecular layer of the acid through diacetylene bonds with the silane compound.
Claim 8
Dependent Claim
18 words
A method according to claim 5, wherein the substrate is silicon; and the layer is SiO 2 layer.
Claim 9
Dependent Claim
22 words
A method according to claim 5, wherein the compound has the formula HC.tbd.C-(CH.sub.2)o-SiCl.sub.3 where o is an integer of 1 to 25.
Claim 10
Dependent Claim
23 words
A method according to claim 7, wherein the aliphatic acid has the formula HC.tbd.C-(CH.sub.2)p-COOH, wherein p is an integer of 1 to 25.
Claim 11
Dependent Claim
15 words
A method according to claim 8, wherein p is an integer of 8 or over.
Claim 12
Dependent Claim
33 words
A method according to claim 7, wherein said aliphatic acid is deposited by an oxidative coupling method wherein said substrate is immersed in a solution of said acid in the presence of oxygen.
Claim 13
Dependent Claim
28 words
A method according to claim 5, further comprising irradiating the diacetylene bonds with an energy beam capable of conversion of the diacetylene bonds into a conjugated diacetylene polymer.
Claim 14
Dependent Claim
50 words
A method according to claim 5, further comprising chemically adsorbing on the top of the monomolecular layer a silane compound having an acetylene bond through the carboxyl groups of the chemical adsorption through the carboxyl groups of the adsorption film to form a monomolecular adsorption film of the silane compound.
Claim 15
Dependent Claim
30 words
A method according to claim 12, further comprising irradiating the diacetylene bonds in the films with an energy beam capable of converting the diacetylene bonds into a conjugated diacetylene polymer.
Claim 16
Dependent Claim
44 words
A method according to claim 5, wherein the chemical adsorption and the oxidative coupling steps are repeated to form a number of films alternately deposited one on top of another while polymerizing diacetylene bonds whenever the diacetylene bonds are formed in the built-up film.
Claim 17
Dependent Claim
53 words
A method according to claim 5, wherein the chemical adsorption and the oxidative coupling steps are repeated to form a number of films alternately deposited one on top of another and the resultant built-up film is irradiated with an energy beam to polymerize diacetylene bonds formed in the built-up film at one time.
Claim 18
Independent Claim
83 words
A method of forming a monomolecular adsorption composite film comprising providing a substrate having a layer comprising molecules which react with a silane compound having an acetylene bond; chemically adsorbing the silane compound to said layer to form a monomolecular adsorption film characterized by molecules oriented in a direction oblique to the substrate; and applying an alcohol having an acetylene bond to the adsorption film by diindiol oxidation to form a built-up film of the alcohol through diacetylene bonds with the silane compound.
Claim 19
Independent Claim
83 words
A method of forming a monomolecular adsorption composite film comprising providing a substrate having a layer comprising molecules which react with a silane compound having an acetylene bond; chemically adsorbing the silane compound to said layer to form a monomolecular adsorption film characterized by molecules oriented in a direction oblique to the substrate; and applying an alcohol having an acetylene bond to the adsorption film by diindiol oxidation to form a built-up film of the alcohol through diacetylene bonds with the silane compound.
Claim 20
Dependent Claim
19 words
A method according to claim 16, wherein the substrate is silicon; and the layer is a SiO 2 layer.
Claim 21
Dependent Claim
24 words
A method according to claim 16, wherein the silane compound has the formula HC.tbd.C-(CH.sub.2)o-SiCl.sub.3 wherein q is an integer of from 1 to 25.
Claim 22
Dependent Claim
23 words
A method according to claim 16, wherein the alcohol has the formula HC.tbd.C-(CH.sub.2)q-OH, wherein q is an integer of from 1 to 25.
Claim 23
Dependent Claim
15 words
A method according to claim 16, wherein q is an integer of 8 or over.
Claim 24
Dependent Claim
24 words
A method according to claim 16, wherein the alcohol is deposited by diindiol oxidation by immersing the substrate in a solution of the alcohol.
Claim 25
Dependent Claim
27 words
A method according to claim 16, further comprising irradiating the diacetylene bonds with an energy beam capable of converting the diacetylene bonds into a conjugated diacetylene polymer.
Claim 26
Dependent Claim
42 words
A method according to claim 16, further comprising chemically adsorbing a silane compound having an acetylene bond to the hydroxyl groups of the deposited film to form a monomolecular adsorption film of the silane compound on the top of the alcohol film.
Claim 27
Dependent Claim
29 words
A method according to claim 23, further comprising irradiating the diacetylene bonds in the films with an energy beam to convert the diacetylene bonds into a conjugated diacetylene polymer.
Claim 28
Dependent Claim
44 words
A method according to claim 16, wherein the chemical adsorption and the diindiol oxidation procedures are repeated to form a number of films alternately deposited one on top of another while polymerizing diacetylene bonds whenever the diacetylene bonds are formed in the built-up film.
Claim 29
Dependent Claim
53 words
A method according to claim 16, wherein the chemical adsorption and the diindiol oxidation procedures are repeated to form a number of films alternately deposited one on top of another; and irradiating the thus obtained built-up film with an energy beam to polymerize diacetylene bonds formed in the built-up film at one time.
Claim 30
Independent Claim
117 words
A method for the formation of a monomolecular adsorption film which comprises providing a substrate having a layer comprising molecules which react with a silane compound having at least one diacetylene bond; chemically adsorbing the silane compound to the layer to form a monomolecular adsorption film of the silane compound on the substrate through the layer at a temperature between the glass transition temperature and the melting point of the silane compound to cause molecules of the silane compound to become obliquely oriented with respect to the substrate; and irradiating the adsorbed film with an energy beam to convert the diacetylene bonds into a conjugated diacetylene polymer to form a conjugated diacetylene polymer in the entire film.
Claim 31
Independent Claim
117 words
A method for the formation of a monomolecular adsorption film which comprises providing a substrate having a layer comprising molecules which react with a silane compound having at least one diacetylene bond; chemically adsorbing the silane compound to the layer to form a monomolecular adsorption film of the silane compound on the substrate through the layer at a temperature between the glass transition temperature and the melting point of the silane compound to cause molecules of the silane compound to become obliquely oriented with respect to the substrate; and irradiating the adsorbed film with an energy beam to convert the diacetylene bonds into a conjugated diacetylene polymer to form a conjugated diacetylene polymer in the entire film.
Claim 32
Dependent Claim
21 words
A method according to claim 27, wherein the substrate is made of silicon and the layer is an SiO 2 layer.
Claim 33
Dependent Claim
27 words
A method according to claim 28, wherein the silane compound has the formula CH.sub.3 (CH.sub.2)mC.tbd.C-C.tbd.C-(CH.sub.2)n-SiCl.sub.3 wherein m and n are, respectively, an integer of 0 to 25.
Claim 34
Dependent Claim
34 words
A method according to claim 27, wherein the chemical adsorption is effected by immersing the substrate in a solution of the silane compound at a concentration of from 2×10 -3 to 5×10 -2 mole/liter.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 7.5 Years (Year 8) | 1998-07-29 | 1999-01-28 | 1999-07-30 | $3760.00 | Window Closed / Lapsed |
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