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EP0077577A2
Expired / Lapsed
EP
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Photographic articles comprising a compound having acetylenic bonds and methods for producing the articles
Assignee: University Patents Inc
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Filing: 1980-06-09
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Granted: —
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Expires: 2000-06-09
Abstract
Abstract This invention provide a novel photoresistive article having significantly improved properties of resultion when used as a photoresist. The article comprising a substrate and a layer carried by said substrate of a photopolymerizable composition which layer comprises at least one material having at least two acetylenic bonds, at least two of said bonds being in conjugation with one another and having a plurality of discrete domains. In one embodiment of the invention, within the discrete domain, a majority of the molecules of the material are oriented in an irregular array. The domains may have an average dimension of less than 10,000 angstom units and provides enhanced resolution of micro-structural lines in an image projected thereon.
Inventors
- 👤 Anthony Frank Garito
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-29 16:33
CPC Classifications
B; B82; B82Y; B82Y20/00; B05; B05D; B05D1/00; B05D1/18; B05D1/20; B05D1/202; B82Y30/00; B82Y40/00; C; C07; C07C; C07C205/00; C07C205/27; C07C205/35; C07C205/36; C07C205/37; C07C57/00; C07C57/18; C07C57/52; C08; C08F; C08F138/00; G; G02; G02F; G02F1/00; G02F1/0009; G02F1/0018; G02F1/35; G02F1/355; G02F1/361; G02F1/3615; G02F1/3618; G03; G03F; G03F7/00; G03F7/004; G03F7/025; G02F1/3515; G02F1/37; G02F1/377; G02F3/00
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
54 words
A photographic or photolithographic article comprising a substrate, and a layer carried by said substrate of a photopolymerizable composition characterised in that said layer comprises at least one material having at least two acetylenic bonds, at least two of said bonds being in conjugation with one another, and having a plurality of discrete domains.
Claim 2
Dependent Claim
54 words
A photographic or photolithographic article comprising a substrate, and a layer carried by said substrate of a photopolymerizable composition characterised in that said layer comprises at least one material having at least two acetylenic bonds, at least two of said bonds being in conjugation with one another, and having a plurality of discrete domains.
Claim 3
Dependent Claim
27 words
An article as claimed in claim 1 wherein within each of said domains a majority of the molecules of said material are orientated in a regular array.
Claim 4
Dependent Claim
36 words
An article as claimed in claim 2 wherein the orientation of the molecular array in one of said domains is transverse to the orientation of the molecular arrays of the majority of the domains contiguous thereto.
Claim 5
Dependent Claim
24 words
An article as claimed in any one of the preceding claims wherein the domains have an o average dimension of not more than 10,OOOA.
Claim 6
Dependent Claim
21 words
An.article as claimed in any preceding claim wherein the domains have an average dimension of o not more than 2000 A.
Claim 7
Dependent Claim
20 words
An article as claimed in any preceding claim wherein the domains have an average dimension o of less than 1000A.
Claim 8
Dependent Claim
23 words
An article as claimed in any one of the preceding claims wherein said discrete domains include molecules of lower polymerizability than said material.
Claim 9
Dependent Claim
26 words
An article as claimed in any preceding claim wherein said material includes molecules which have a steric structure or substituent groups which reduce the polymerizability thereof.
Claim 10
Dependent Claim
21 words
An article as claimed in any preceding claim wherein the said layer includes substituent grouping which bond covalently with said substrate.
Claim 11
Dependent Claim
16 words
An article as claimed in claim 9 wherein the substituent groups are silyl or siloxyl linkages.
Claim 12
Dependent Claim
39 words
An article as claimed in claim 9 or claim 10 wherein a bonding layer is interposed between said layer of photopolymerizable composition and said substrate, said bonding layer being covalently bonded at least to said layer of photopolymerizable composition.
Claim 13
Dependent Claim
72 words
An article as claimed in claim 11 wherein the bonding layer comprises a compound having the general formula where the R 11 groups may be the same or different and are hydrocarbyl groups having from 1 to about 6 carbon atoms, where R 12 is a hydrocarbyl group having from 1 to about 6 carbon atoms, and Z is any substituent which may be covalently bond with the diacetylenic specie of choice.
Claim 14
Dependent Claim
12 words
An article as claimed in claim 12 wherein the compound is 3-aminopropyltriethoxysilane.
Claim 15
Dependent Claim
33 words
An article as claimed in any preceding claim wherein said layer includes a nitroso dimer to retard thermally induced polymerization without interfering with the domain structure or with the photopolymerizability of said material.
Claim 16
Independent Claim
64 words
A method of forming an article as claimed in any preceding claim which method comprises coating a substrate with at least one substantially continuous layer of a photopolymerizable composition characterised in that said layer comprises at least one material having at least two acetylenic bonds at least two of said bonds being in conjugation with one another and having a plurality of discrete domains.
Claim 17
Dependent Claim
27 words
A method as claimed in claim 15 wherein said discrete domains have an average dimension in o the plane of the layer of not more than 10,OOOA.
Claim 18
Dependent Claim
35 words
A method as claimed in claim 15 or claim 16 wherein the article is heated to a temperature below the melting point of said material to establish the discrete domains in the layer after coating.
Claim 19
Independent Claim
54 words
A method as claimed in any one of claims 15 to 17 wherein the coating is carried out using the Langmuir-Blodgett film forming technique characterised in that the pH, the temperature and/ or the specific gravity of the water sub-phase is adjusted to cause or allow formation of said domains in the resulting layer.
Claim 20
Independent Claim
41 words
A method as claimed in any one of claims 15 to 18 wherein the substrate is coated with a bonding layer prior to coating with said photopolymerizable composition said bonding layer being capable of forming convalent bonds with said photopolymerisable layer.
Claim 21
Dependent Claim
72 words
A method as claimed in claim 19 wherein said bonding layer includes a compound having the general formula where the R 11 groups may be the same or different and are hydrocarbyl groups having from 1 to about 6 carbon atoms, where R 12 is a hydrocarbyl group having from 1 to about 6 carbon atoms, and Z is any substituent which may be covalently bond with the diacetylenic specie of choice.
References Cited (Backward Citations)
No citation records indexed.
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