Processing liquid supply unit

Claim 2

A processing liquid supply unit for supplying a processing liquid to an object to be processed in a clean room, said unit comprising: a reserve tank, for reserving a processing liquid, located outside of said clean room; a storing tank for storing said processing liquid supplied from said reserve tank; detecting means for detecting the amount of the processing liquid stored in said storing tank; refilling means for automatically refilling the processing liquid into said storing tank on the basis of detection signals from said detecting means; processing liquid delivery means for delivering the processing liquid from said storing tank to an object to be processed; and means for forming a resist film on said object, wherein said processing liquid is for forming said resist film on said object.

Claim 3

A processing liquid supply unit according to claim 1, wherein said processing liquid includes a resist solution.

Claim 4

A processing liquid supply unit according to claim 1, wherein said processing liquid includes a developer.

Claim 5

A processing liquid supply unit according to claim 1, wherein said refilling means comprises piping means for connecting said reserve tank with said storing tank, supplying means for supplying said processing liquid to said storing tank through said piping means under a pressure generated by introducing said carrier gas into said reserve tank, and exhaust means for exhausting said processing liquid and said carrier gas from said storing tank.

Claim 6

A processing liquid supply unit according to claim 1, wherein said processing liquid delivery means includes pressure feed gas supply means for supplying a pressure feed gas to pressure-feed a processing liquid to add to the processing liquid stored in said storing means.

Claim 7

A processing liquid supply unit according to claim 1, wherein said processing liquid delivery means includes a pump for delivery of the processing liquid stored in said storing means.

Claim 8

A processing liquid supply unit according to claim 1, further comprising control means for controlling the refilling of processing liquid by said refilling means on the basis of detection by said detecting means.

Claim 9

A processing liquid supply unit according to claim 1, wherein said detecting means includes a sensor to detect the level of the processing liquid in said processing liquid storage tank.

Claim 10

A processing liquid supply unit according to claim 1, wherein said processing liquid includes HMDS.

Claim 11

A processing liquid supply unit according to claim 1, wherein said processing liquid delivery means includes carrier gas supply means for supplying a carrier gas into said processing liquid in said storing tank and dissolving said processing liquid in said carrier gas into vapor form, piping means for carrying the vapor of said processing liquid from said storing tank to said object, and valve means for allowing the vapor of said processing liquid to be delivered to said object, and for stopping the supply of the carrier gas, when the gas pressure and concentration in said storing tank rise to specified values.

Claim 12

A processing liquid supply unit according to claim 10, further comprising controlling means for controlling said valve means, to allow the vapor of said processing liquid to be delivered to the object, when the gas pressure and concentration in said storing tank rise to said specified values.

Claim 13

A processing liquid supply unit for supplying a processing liquid to an object to be processed, said unit comprising: storing means for storing a processing liquid; detecting means for detecting the amount of the processing liquid stored in said storing means; refilling means for automatically refilling the processing liquid into said storing means on the basis of detection signals from said detection means; processing liquid delivery means for delivering the processing liquid from said storing means to an object to be processed; and means for forming a resist film on said object, wherein said processing liquid is for forming said resist film on said object, said storing means having two storing tanks connected in parallel, said processing liquid delivery means including carrier gas supply means for supplying a carrier gas into said processing liquid in one of said storing tanks and dissolving said processing liquid in said carrier gas into vapor form, piping means for carrying the vapor of said processing liquid from said storing tanks to said object, and valve means for allowing the vapor of said processing liquid to be delivered to said object, and for stopping the supply of the carrier gas when the gas pressure and concentration in said one of said storing tanks rise to specified values, wherein; while the vapor is supplied to said object from one of said storing tanks, the other of said storing tanks is supplied with processing liquid by said refilling means, and while the vapor is supplied to said object from the other of said storing tanks, said one of said storing tanks is supplied with processing liquid by said refilling means; and while said carrier gas is supplied to said one of said storing tanks, said vapor of said processing liquid is supplied to said object from the other one of said storing tanks.

Claim 14

A processing liquid supply unit for supplying a processing liquid to an object to be processed, said unit comprising: storing means for storing a processing liquid; detecting means for detecting the amount of the processing liquid stored in said storing means; refilling means for automatically refilling the processing liquid into said storing means on the basis of detection signals from said detection means; processing liquid delivery means for delivering the processing liquid from said storing means to an object to be processed; and means for forming a resist film on said object, wherein said processing liquid is for forming said resist film on said object, said storing means having two storing tanks connected in parallel, said processing liquid delivery means including carrier gas supply means for supplying a carrier gas into said processing liquid in one of said storing tanks and dissolving said processing liquid in said carrier gas into vapor form, piping means for carrying the vapor of said processing liquid from said storing tanks to said object, and valve means for allowing the vapor of said processing liquid to be delivered to said object, and for stopping the supply of the carrier gas when the gas pressure and concentration in said one of said storing tanks rise to specified values, wherein; while the vapor is supplied to said object from one of said storing tanks, the other of said storing tanks is supplied with processing liquid by said refilling means, and while the vapor is supplied to said object from the other of said storing tanks, said one of said storing tanks is supplied with processing liquid by said refilling means; and while said carrier gas is supplied to said one of said storing tanks, said vapor of said processing liquid is supplied to said object from the other one of said storing tanks.