US4582480A
Expired / Lapsed
US
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Methods of and apparatus for vapor delivery control in optical preform manufacture
Assignee: Furukawa Electric North America Inc
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Filing: 1984-08-02
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Granted: 1986-04-15
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Expires: 2004-08-02
Abstract
Abstract A vapor delivery system for the manufacture of an optical preform includes a deposition bubbler (60) and another bubbler (40) referred to as a supply bubbler which is interposed between a reservoir (24) of a liquid and the deposition bubbler. Heat energy is applied to the supply bubbler and to the deposition bubbler to vaporize liquid therein. A carrier gas is introduced into the liquid in the supply bubbler at a location below the free surface and into the deposition bubbler to cause vapor of the liquid to become entrained in the carrier gas and to flow from the supply bubbler into the deposition bubbler and from the deposition bubbler to a substrate tube from which an optical preform is made. Facilities are provided for maintaining sufficient liquid in the supply bubbler and suitable temperatures of the liquid in the supply and deposition bubblers to control the vapor flow into and out of the deposition bubbler to prevent unintended perturbations in the deposition bubbler. As a result, the concentration level of the vapor which is entrained in the carrier gas and delivered to the substrate tube is maintained at a substantially constant value.
Inventors
- 👤 Brian Lynch
- 👤 Pundi L. Narasimham
- 👤 Fred P. Partus
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 19:57
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/448; C23C16/4481; C23C16/4482; B; B01; B01D; B01D1/00; B01D1/0082; B01D1/14; C03; C03B; C03B37/00; C03B37/01; C03B37/012; C03B37/014; C03B37/01413; C03C; C03C17/00; C03C17/02; C03B2207/00; C03B2207/80; C03B2207/85; C03B2207/86; C03B2207/87
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
201 words
A method of controlling the delivery of vapor of a liquid to a vapor deposition site, said method including the steps of: providing a deposition bubbler which contains a quantity of the liquid and which is in fluid communication with the deposition site; providing a supply bubbler which contains a quantity of the liquid and which is in fluid communication with the deposition bubbler; heating the liquid in the supply bubbler and in the deposition bubbler to vaporize liquid therein; introducing a gaseous medium into the supply bubbler and then flowing the gaseous medium from the supply bubbler into the deposition bubbler to cause vapor of the liquid to become entrained in the gaseous medium and to flow from the supply bubbler into the deposition bubbler and from the deposition bubbler to the deposition site; and maintaining sufficient liquid within the supply bubbler and suitable temperatures of the liquid in the supply and in the deposition bubblers to control the mass flow rate of vapor into and out of the deposition bubbler to prevent unintended perturbations in the deposition bubbler and cause the concentration level of the delivered vapor which is entrained in the gaseous medium to have a predetermined value.
Claim 2
Independent Claim
201 words
A method of controlling the delivery of vapor of a liquid to a vapor deposition site, said method including the steps of: providing a deposition bubbler which contains a quantity of the liquid and which is in fluid communication with the deposition site; providing a supply bubbler which contains a quantity of the liquid and which is in fluid communication with the deposition bubbler; heating the liquid in the supply bubbler and in the deposition bubbler to vaporize liquid therein; introducing a gaseous medium into the supply bubbler and then flowing the gaseous medium from the supply bubbler into the deposition bubbler to cause vapor of the liquid to become entrained in the gaseous medium and to flow from the supply bubbler into the deposition bubbler and from the deposition bubbler to the deposition site; and maintaining sufficient liquid within the supply bubbler and suitable temperatures of the liquid in the supply and in the deposition bubblers to control the mass flow rate of vapor into and out of the deposition bubbler to prevent unintended perturbations in the deposition bubbler and cause the concentration level of the delivered vapor which is entrained in the gaseous medium to have a predetermined value.
Claim 3
Dependent Claim
25 words
The method of claim 1, wherein said step of maintaining is accomplished to cause the concentration level of the delivered vapor to be substantially constant.
Claim 4
Dependent Claim
35 words
The method of claim 1, wherein said step of heating is accomplished to cause the temperature of the liquid in the deposition bubbler to be greater than that of the liquid in the supply bubbler.
Claim 5
Dependent Claim
47 words
The method of claim 1, wherein a ratio of vapor to gaseous medium is detected by sensing a heat transfer characteristic of the vapor flow from the deposition bubbler and the heating of the liquid in the deposition bubbler is accomplished in response to the sensed ratio.
Claim 6
Dependent Claim
66 words
The method of claim 1, wherein said method also includes the step of providing a reservoir of the liquid and a conduit which includes a valve and which provides communication between the reservoir and the supply bubbler, and said step of maintaining is accomplished by providing a gaseous head pressure within the reservoir and opening the valve to allow filling of the supply bubbler with liquid.
Claim 7
Dependent Claim
53 words
The method of claim 5, wherein levels of the liquid in the supply bubbler between limits which define a sufficient quantity of liquid are established, and wherein when the liquid level rises or drops to those levels, the valve is closed or opened to discontinue or to begin filling of the supply bubbler.
Claim 8
Dependent Claim
112 words
The method of claim 1, which also includes; providing a reservoir of the liquid which is in liquid communication with the supply bubbler; sensing deviations of the liquid level within the supply bubbler from a predetermined level; and in response to the sensed deviations of the liquid level from the predetermined level, causing a flow of the liquid between the reservoir and the supply bubbler to cause the liquid level to be restored to a level which is sufficient to enable suitable temperature control of the liquid within the supply bubbler to prevent unintended perturbations in the deposition bubbler and cause the concentration level of the delivered vapor to be substantially constant.
Claim 9
Dependent Claim
77 words
The method of claim 7, which also includes providing a valved conduit which communicates the reservoir with the supply bubbler, and wherein the step of causing is accomplished by providing a gaseous head pressure within the reservoir and by varying the gaseous head pressure within the reservoir and opening the valve to maintain the liquid level in the supply bubbler at least at the predetermined level by causing liquid to flowed from the bubbler to the reservoir.
Claim 10
Dependent Claim
32 words
The method of claim 1, wherein said step of maintaining causes the mass flow rate of the vapor from the deposition bubbler to be slightly greater than the mass flow rate thereinto.
Claim 11
Independent Claim
207 words
An apparatus for controlling the delivery of vapor to a deposition site, said apparatus comprising: a deposition bubbler which contains a quantity of a liquid and which is in fluid communication with the deposition site; a supply bubbler which contains a quantity of the liquid and which is in fluid communication with the deposition bubbler; heating means for increasing the temperature of the liquid in the supply bubbler and in the deposition bubbler to vaporize liquid therein; means for introducing a carrier gas into the supply bubbler and for flowing the gas from the supply bubbler into the deposition bubbler to cause vapor of the liquid to become entrained in the carrier gas and to flow from the supply bubbler into the deposition bubbler and out of the deposition bubbler to the deposition site; and control means for maintaining sufficient liquid within said supply bubbler and suitable relative temperatures of the liquid in said supply bubbler and of the liquid in said deposition bubbler to control the vapor mass flow rate into and out of the deposition bubbler to prevent unintended perturbations in the deposition bubbler and cause the concentration level of the delivered vapor which is entrained in the carrier gas to be a predetermined value.
Claim 12
Independent Claim
207 words
An apparatus for controlling the delivery of vapor to a deposition site, said apparatus comprising: a deposition bubbler which contains a quantity of a liquid and which is in fluid communication with the deposition site; a supply bubbler which contains a quantity of the liquid and which is in fluid communication with the deposition bubbler; heating means for increasing the temperature of the liquid in the supply bubbler and in the deposition bubbler to vaporize liquid therein; means for introducing a carrier gas into the supply bubbler and for flowing the gas from the supply bubbler into the deposition bubbler to cause vapor of the liquid to become entrained in the carrier gas and to flow from the supply bubbler into the deposition bubbler and out of the deposition bubbler to the deposition site; and control means for maintaining sufficient liquid within said supply bubbler and suitable relative temperatures of the liquid in said supply bubbler and of the liquid in said deposition bubbler to control the vapor mass flow rate into and out of the deposition bubbler to prevent unintended perturbations in the deposition bubbler and cause the concentration level of the delivered vapor which is entrained in the carrier gas to be a predetermined value.
Claim 13
Dependent Claim
21 words
The apparatus of claim 10, wherein said control means causes the concentration level of the delivered vapor to be substantially constant.
Claim 14
Dependent Claim
31 words
The apparatus of claim 10, wherein said heating means causes the temperature of the liquid in said deposition bubbler to be higher than that of the liquid in said supply bubbler.
Claim 15
Dependent Claim
44 words
The apparatus of claim 10, wherein the ratio of vapor-to-carrier gas is detected by sensing a heat transfer characteristic of the vapor flowed out of said deposition bubbler and said means for heating said deposition bubbler is controlled in response to the sensed ratio.
Claim 16
Dependent Claim
52 words
The apparatus of claim 10, which also includes a reservoir for holding a quantity of the liquid and a conduit which includes a valve and which provides liquid communication between said reservoir and said supply bubbler, and wherein said control means includes means for providing a gaseous head pressure within said reservoir.
Claim 17
Dependent Claim
53 words
The apparatus of claim 14, wherein levels of the liquid in said supply bubbler between limits which define a sufficient quantity of liquid are established, and wherein when the liquid level rises or drops to those levels, said valve is closed or opened automatically to discontinue or to begin filling said supply bubbler.
Claim 18
Dependent Claim
119 words
The apparatus of claim 10, which also includes: a reservoir which contains a liquid; means for sensing the level of liquid in said supply bubbler; conduit means for providing liquid communication between said reservoir and said supply bubbler; and means including means for providing a gaseous head pressure in said reservoir and being responsive to the sensed level of liquid in said supply bubbler for varying the head pressure to cause flow between said reservoir and said supply bubbler to bring the level of the liquid therein to at least a level which is predetermined to be sufficient to enable suitable temperature control of the liquid in the supply bubbler to prevent the unintended perturbations in the deposition bubbler.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-04-14 | 1989-10-14 | 1990-04-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-04-14 | 1993-10-14 | 1994-04-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-04-14 | 1997-10-14 | 1998-04-15 | $7700.00 | Window Closed / Lapsed |