Abstract An inchworm type driving mechanism usable as a fine positioning device is disclosed. The mechanism includes at least two clamps for clamping a movable member, and an expansible/contractable device for driving the movable member. Each clamp includes a plurality of levers each having a pivot provided by a resilient hinge and an electrostrictive device disposed between end portions of the levers. Through the actuation of the electrostrictive device, the other end portions of the levers sandwich the opposite sides of the movable member to clamp the same. In one preferred form, each clamp is supported by a support, with low rigidity in the clamping direction, but with high rigidity in a direction perpendicular to the clamping direction. Thus, undesirable deformation or distortion of the movable member can be avoided and, therefore, high-precision positioning of the movable member is assured.
An inchworm type driving mechanism, comprising: a movable member having first and second movable portions which are coupled to each other through a resilient element; a first clamp having a plurality of movable arms for selectively pressing against opposite sides of the first movable portion of the movable member to clamp the first movable portion in a clamping direction; a second clamp having a plurality of movable arms for selectively pressing against opposite sides of the second movable portion of the movable member to clamp the second movable portion in a clamping direction; supporting means for supporting each of said first and second clamps, said supporting means having a low rigidity with respect to the movable member in the clamping direction and a high rigidity in a direction perpendicular to the clamping direction; and an expansible and contractible element for causing relative displacement between the first and second movable portions of the movable member.
Claim 2
Dependent Claim
154 words
An inchworm type driving mechanism, comprising: a movable member having first and second movable portions which are coupled to each other through a resilient element; a first clamp having a plurality of movable arms for selectively pressing against opposite sides of the first movable portion of the movable member to clamp the first movable portion in a clamping direction; a second clamp having a plurality of movable arms for selectively pressing against opposite sides of the second movable portion of the movable member to clamp the second movable portion in a clamping direction; supporting means for supporting each of said first and second clamps, said supporting means having a low rigidity with respect to the movable member in the clamping direction and a high rigidity in a direction perpendicular to the clamping direction; and an expansible and contractible element for causing relative displacement between the first and second movable portions of the movable member.
Claim 3
Dependent Claim
16 words
A mechanism according to claim 1, wherein said supporting means comprises a parallel leaf spring mechanism.