Patent US5033856A successfully refreshed from Google Patents.
US5033856A
Expired / Lapsed
US
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Three-dimensional shape measuring apparatus
Assignee: Canon Inc
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Filing: 1990-04-30
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Granted: 1991-07-23
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Expires: 2010-04-30
Abstract
Abstract A three-dimensional shape measuring apparatus having a high performance and a reduced drive energy is disclosed. At least a portion of an in-focus state detection optical system having an internal light source is movable while maintaining a light path near an object lens of the optical system. A distance of movement of the movable portion which is moved with auto-focusing operation for an object is measured and the three-dimensional shape is measured precisely with a high stroke. An inclination angle measuring optical system which shares the light path near the object lens with the in-focus state detection optical system and has an internal light source is provided in a common casing. Thus, the distance of movement of the movable part of the in-focus state detection optical system and an inclination angle are simultaneously measured so that the three-dimensional shape can be more precisely measured.
Inventors
- 👤 Noriyuki Nose
- 👤 Yukichi Niwa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 19:13
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/24
Claims Analysis
Total Claims: 61
Claim 1
Independent Claim
345 words
An apparatus for optically measuring the shape of an object from a distance to each position of the object surface and the inclination at each position thereof, comprising: a casing; an in-focus state detection optical system having an object lens and contained in said casing, at least one of a portion of said in-focus state detection optical system and said casing being movable while keeping a light path near said object lens generally constant in order to bring said in-focus state detection optical system into an in-focus position relative to each position of the object surface; means for measuring the distance of movement of said at least one of said portion and said casing; an inclination measuring optical system for measuring the inclination of said each position of the object surface, said inclination measuring and said in-focus state detection optical systems having said object lens in common, wherein light beams incident on the object surface through said inclination measuring and said in-focus state detection optical systems are coincident with each other and focused at the same time when said in-focus state detection optical system is brought into said in-focus position. optical means for directing two kinds of light beams to each position of the object surface, said optical means focusing said light beams on said each position at the same time; first light receiving means for receiving a light beam produced by one of said light beams reflected by said each position, said first light receiving means detecting a distance to said each position along an optical axis of said optical means in accordance with a projection condition of said reflected light beam onto said first light receiving means; and second light receiving means for receiving a light beam produced by the other of said light beams reflected by said each position, said second light receiving means for detecting an inclination of said each position relative to a reference plane in accordance with a projection condition of said reflected light beam produced by the other of said light beams onto said second light receiving means.
Claim 2
Independent Claim
345 words
An apparatus for optically measuring the shape of an object from a distance to each position of the object surface and the inclination at each position thereof, comprising: a casing; an in-focus state detection optical system having an object lens and contained in said casing, at least one of a portion of said in-focus state detection optical system and said casing being movable while keeping a light path near said object lens generally constant in order to bring said in-focus state detection optical system into an in-focus position relative to each position of the object surface; means for measuring the distance of movement of said at least one of said portion and said casing; an inclination measuring optical system for measuring the inclination of said each position of the object surface, said inclination measuring and said in-focus state detection optical systems having said object lens in common, wherein light beams incident on the object surface through said inclination measuring and said in-focus state detection optical systems are coincident with each other and focused at the same time when said in-focus state detection optical system is brought into said in-focus position. optical means for directing two kinds of light beams to each position of the object surface, said optical means focusing said light beams on said each position at the same time; first light receiving means for receiving a light beam produced by one of said light beams reflected by said each position, said first light receiving means detecting a distance to said each position along an optical axis of said optical means in accordance with a projection condition of said reflected light beam onto said first light receiving means; and second light receiving means for receiving a light beam produced by the other of said light beams reflected by said each position, said second light receiving means for detecting an inclination of said each position relative to a reference plane in accordance with a projection condition of said reflected light beam produced by the other of said light beams onto said second light receiving means.
Claim 3
Dependent Claim
16 words
An apparatus according to claim 1, wherein said measuring means optically measures said distance of movement.
Claim 4
Dependent Claim
38 words
An apparatus according to claim 2, wherein said measuring means comprises a laser interferometer and a corner cube mounted to said one of the portion and the casing, said laser interferometer being arranged opposite to said corner cube.
Claim 5
Dependent Claim
42 words
An apparatus according to claim 2, wherein said measuring means comprises a grid pitch reader and a reference grid mounted to said one of the portion and the casing, and said reader measures said distance of movement by a grid interference system.
Claim 6
Dependent Claim
25 words
An apparatus according to claim 1, wherein each of said in-focus state detection and said inclination measuring optical systems each includes a separate light source.
Claim 7
Dependent Claim
32 words
An apparatus according to claim 1, wherein wavelength ranges of light beams incident on the object surface through said in-focus state detection and said inclination measuring optical systems differ from each other.
Claim 8
Dependent Claim
83 words
An apparatus according to claim 1, wherein said inclination measuring optical system includes means for producing a light beam; optical system means for converging the light beam produced by said producing means and directing the convergent beam toward said each position of the object surface to be examined; and photoelectric conversion means for receiving a light beam reflected by said each position of the object surface for detecting the inclination of said each position of the object surface relative to a reference plane.
Claim 9
Independent Claim
184 words
An apparatus for optically measuring a shape of an object surface from a distance to each position of the object surface and the inclination at each position thereof, comprising: optical means for directing two kinds of light beams to each position of the object surface, said optical means focusing said light beams on said each position at the same time; first light receiving means for receiving a light beam produced by one of said light beams reflected by said each position, said first light receiving means detecting a distance to said each position along an optical axis of said optical means in accordance with a projection condition of said reflected light beam onto said first light receiving means; and second light receiving means for receiving a light beam produced by the other of said light beams reflected by said each position, said second light receiving means for detecting an inclination of said each position relative to a reference plane in accordance with a projection condition of said reflected light beam produced by the other of said light beams onto said second light receiving means.
Claim 10
Independent Claim
184 words
An apparatus for optically measuring a shape of an object surface from a distance to each position of the object surface and the inclination at each position thereof, comprising: optical means for directing two kinds of light beams to each position of the object surface, said optical means focusing said light beams on said each position at the same time; first light receiving means for receiving a light beam produced by one of said light beams reflected by said each position, said first light receiving means detecting a distance to said each position along an optical axis of said optical means in accordance with a projection condition of said reflected light beam onto said first light receiving means; and second light receiving means for receiving a light beam produced by the other of said light beams reflected by said each position, said second light receiving means for detecting an inclination of said each position relative to a reference plane in accordance with a projection condition of said reflected light beam produced by the other of said light beams onto said second light receiving means.
Claim 11
Dependent Claim
17 words
An apparatus according to claim 8, wherein wavelength ranges of said light beams differ from each other.
Claim 12
Dependent Claim
25 words
An apparatus according to claim 8, wherein said optical means includes an object lens for directing said light beams to said each position in common.
Claim 13
Dependent Claim
36 words
An apparatus according to claim 8, wherein said first light receiving means is disposed conjugate with said each position of the object surface when said optical means has focused said light beams on said each position.
Claim 14
Dependent Claim
37 words
An apparatus according to claim 9, further comprising filter means for directing the light beams reflected by said each position, wavelength ranges of which differ from each other, to said first and second light receiving means, respectively.
Claim 15
Independent Claim
115 words
An apparatus for measuring the shape of an object comprising: illuminating means for illuminating a predetermined area on the object, said illuminating means illuminating with at least one light beam substantially condensed on the predetermined area; detecting means for detecting a position wherein said light beam is substantially condensed on the predetermined area; adjusting means for adjusting a distance between said position and the predetermined area based upon a result obtained by the detection of said detecting means; and measuring means for measuring the inclination of the predetermined area by detecting the change of the position of the light beam reflected from the predetermined area in an area not optically conjugate to the predetermined area.
Claim 16
Independent Claim
115 words
An apparatus for measuring the shape of an object comprising: illuminating means for illuminating a predetermined area on the object, said illuminating means illuminating with at least one light beam substantially condensed on the predetermined area; detecting means for detecting a position wherein said light beam is substantially condensed on the predetermined area; adjusting means for adjusting a distance between said position and the predetermined area based upon a result obtained by the detection of said detecting means; and measuring means for measuring the inclination of the predetermined area by detecting the change of the position of the light beam reflected from the predetermined area in an area not optically conjugate to the predetermined area.
Claim 17
Dependent Claim
35 words
An apparatus according to claim 13, wherein said detecting means detects the position of the condensed beam based upon the focusing state of the condensed light beam from said illuminating means on the predetermined area.
Claim 18
Dependent Claim
39 words
An apparatus according to claim 14, wherein said illuminating means illuminates the object with a first condensed light beam to be received by said detecting means and a second condensed light beam to be received by said measuring means.
Claim 19
Dependent Claim
26 words
An apparatus according to claim 13, further comprising means for measuring the shape of the object based upon a distance adjusting quantity of said adjusting means.
Claim 20
Independent Claim
172 words
An apparatus for measuring the shape of an object comprising: illuminating means for illuminating a predetermined area on the object, said illuminating means illuminating with at least one light beam substantially condensed on the predetermined area; detecting means for detecting a position where said light beam is substantially condensed on the predetermined area; adjusting means for adjusting a distance between said position and the predetermined area based upon a result obtained by the detection of said detecting means; and measuring means for measuring the inclination of the predetermined area, said measuring means having separating means for separating the light beam reflected from the predetermined area in accordance with an incident position thereof in an area not optically conjugate to the predetermined area, and a light quantity detecting means for detecting the light quantity of each of the light beams separated by said separating means, with said measuring means measuring the inclination of the predetermined area based upon a comparison between the light quantities of the light beams separated by said separating means.
Claim 21
Independent Claim
172 words
An apparatus for measuring the shape of an object comprising: illuminating means for illuminating a predetermined area on the object, said illuminating means illuminating with at least one light beam substantially condensed on the predetermined area; detecting means for detecting a position where said light beam is substantially condensed on the predetermined area; adjusting means for adjusting a distance between said position and the predetermined area based upon a result obtained by the detection of said detecting means; and measuring means for measuring the inclination of the predetermined area, said measuring means having separating means for separating the light beam reflected from the predetermined area in accordance with an incident position thereof in an area not optically conjugate to the predetermined area, and a light quantity detecting means for detecting the light quantity of each of the light beams separated by said separating means, with said measuring means measuring the inclination of the predetermined area based upon a comparison between the light quantities of the light beams separated by said separating means.
Claim 22
Dependent Claim
35 words
An apparatus according to claim 17, wherein said detecting means detects the position of the condensed beam based upon the focusing state of the condensed light beam from said illuminating means on the predetermined area.
Claim 23
Dependent Claim
39 words
An apparatus according to claim 18, wherein said illuminating means illuminates the object with a first condensed light beam to be received by said detecting means and a second condensed light beam to be received by said measuring means.
Claim 24
Dependent Claim
26 words
An apparatus according to claim 17, further comprising means for measuring the shape of the object based upon a distance adjusting quantity of said adjusting means.
Claim 25
Independent Claim
128 words
An apparatus for measuring the shape of an object comprising: illumination means for illuminating a first area on the object, said illuminating means illuminating with at least one light beam substantially condensed on the first area; detecting means for detecting a position where said light beam is substantially condensed on a second area, the center of which is substantially coincident with that of the first area; adjusting means for adjusting a distance between said position and the second area based upon a result obtained by the detection of said detecting means; and measuring means for measuring the inclination of the first area by detecting the change of the position of the light beam reflected from the first area in an area not optically conjugate to the first area.
Claim 26
Independent Claim
128 words
An apparatus for measuring the shape of an object comprising: illumination means for illuminating a first area on the object, said illuminating means illuminating with at least one light beam substantially condensed on the first area; detecting means for detecting a position where said light beam is substantially condensed on a second area, the center of which is substantially coincident with that of the first area; adjusting means for adjusting a distance between said position and the second area based upon a result obtained by the detection of said detecting means; and measuring means for measuring the inclination of the first area by detecting the change of the position of the light beam reflected from the first area in an area not optically conjugate to the first area.
Claim 27
Dependent Claim
35 words
An apparatus according to claim 21, wherein said detecting means detects the position of the condensed beam based upon the focusing state of the condensed light beam from said illuminating means on the second area.
Claim 28
Dependent Claim
51 words
An apparatus according to claim 22, wherein said illuminating means illuminates the object with a first condensed light beam condensed on the first area and being received by said measuring means and, further, with a second condensed light beam condensed on the second area and being received by said detecting means.
Claim 29
Dependent Claim
26 words
An apparatus according to claim 21, further comprising means for measuring the shape of the object based upon a distance adjusting quantity of said adjusting means.
Claim 30
Independent Claim
188 words
An apparatus for measuring the shape of an object comprising: illuminating means for illuminating a first area on the object, said illuminating means illuminating with at least one light beam substantially condensed in the first area; detecting means for detecting a position where said light beam is substantially condensed on a second area of the object, the center of which is substantially coincident with that of the first area; adjusting means for adjusting a distance between said position and the second area based upon a result obtained by the detection of said detecting means; and measuring means for measuring the inclination of the first area, said measuring means having separating means for separating the light beam reflected from the first area in accordance with an incident position thereof in an area not optically conjugate to the first area, and a light quantity detecting means for detecting the light quantity of each of the light beams separated by said separating means, with said measuring means measuring the inclination of the predetermined area based upon a comparison between the light quantities of the light beams separated by said separating means.
Claim 31
Independent Claim
188 words
An apparatus for measuring the shape of an object comprising: illuminating means for illuminating a first area on the object, said illuminating means illuminating with at least one light beam substantially condensed in the first area; detecting means for detecting a position where said light beam is substantially condensed on a second area of the object, the center of which is substantially coincident with that of the first area; adjusting means for adjusting a distance between said position and the second area based upon a result obtained by the detection of said detecting means; and measuring means for measuring the inclination of the first area, said measuring means having separating means for separating the light beam reflected from the first area in accordance with an incident position thereof in an area not optically conjugate to the first area, and a light quantity detecting means for detecting the light quantity of each of the light beams separated by said separating means, with said measuring means measuring the inclination of the predetermined area based upon a comparison between the light quantities of the light beams separated by said separating means.
Claim 32
Dependent Claim
35 words
An apparatus according to claim 25, wherein said detecting means detects the position of the condensed beam based upon the focusing state of the condensed light beam from said illuminating means on the second area.
Claim 33
Dependent Claim
51 words
An apparatus according to claim 26, wherein said illuminating means illuminates the object with a first condensed light beam condensed on the first area and being received by said measuring means and, further, with a second condensed light beam condensed on the second area and being received by said detecting means.
Claim 34
Dependent Claim
26 words
An apparatus according to claim 25, further comprising means for measuring the shape of the object based upon a distance adjusting quantity of said adjusting means.
Claim 35
Dependent Claim
87 words
A measuring apparatus comprising: illuminating means for illuminating a predetermined area on an object, said illuminating means illuminating with at least one light beam substantially condensed on the predetermined area; adjusting means for adjusting a distance between a focussing position of the condensed light beam and a plane on which the predetermined area exists; measuring means for measuring the inclination of the predetermined area by detecting a position of the light beam reflected from the predetermined area in a plane not optically conjugate to the predetermined area.
Claim 36
Dependent Claim
87 words
A measuring apparatus comprising: illuminating means for illuminating a predetermined area on an object, said illuminating means illuminating with at least one light beam substantially condensed on the predetermined area; adjusting means for adjusting a distance between a focussing position of the condensed light beam and a plane on which the predetermined area exists; measuring means for measuring the inclination of the predetermined area by detecting a position of the light beam reflected from the predetermined area in a plane not optically conjugate to the predetermined area.
Claim 37
Dependent Claim
15 words
An apparatus according to claim 29, wherein said adjusting means adjusts said distance to zero.
Claim 38
Dependent Claim
43 words
An apparatus according to claim 29, further comprising detecting means for detecting a position of the predetermined area substantially along a direction parallel to an optical axis of an optical system of at least one of said illuminating means and said adjusting means.
Claim 39
Dependent Claim
18 words
An apparatus according to claim 31, wherein said detecting means detects the position by using said adjusting means.
Claim 40
Dependent Claim
75 words
A measuring method comprising: illuminating a predetermined area on an object with at least one light beam substantially condensed on the predetermined area; adjusting a distance between a focussing position of the condensed light beam and a plane on which the predetermined area exists; and measuring the inclination of the predetermined area by detecting a position of the light beam reflected from the predetermined area in a plane not optically conjugate to the predetermined area.
Claim 41
Dependent Claim
75 words
A measuring method comprising: illuminating a predetermined area on an object with at least one light beam substantially condensed on the predetermined area; adjusting a distance between a focussing position of the condensed light beam and a plane on which the predetermined area exists; and measuring the inclination of the predetermined area by detecting a position of the light beam reflected from the predetermined area in a plane not optically conjugate to the predetermined area.
Claim 42
Dependent Claim
43 words
A method according to claim 33, further comprising the step of detecting the position of the predetermined area substantially along a direction parallel to an optical axis of an optical system used for adjusting the distance between the focussing position and the plane.
Claim 43
Dependent Claim
136 words
A measuring apparatus comprising: illuminating means for illuminating a predetermined area on an object, said illuminating means illuminating with at least one light beam substantially condensed on the predetermined area; adjusting means for adjusting a distance between a focussing position of the condensed light beam and a plane on which the predetermined area exists; and measuring means for measuring the inclination of the predetermined area, said measuring means having separating means for separating the light beam reflected from the predetermined area at a position not optically conjugate to the predetermined area, and light quantity detecting means for detecting light quantity of at least one of the light beams separated by said separating means, wherein said measuring means measures the inclination on the basis of a result obtained by the detection of said light quantity detecting means.
Claim 44
Dependent Claim
136 words
A measuring apparatus comprising: illuminating means for illuminating a predetermined area on an object, said illuminating means illuminating with at least one light beam substantially condensed on the predetermined area; adjusting means for adjusting a distance between a focussing position of the condensed light beam and a plane on which the predetermined area exists; and measuring means for measuring the inclination of the predetermined area, said measuring means having separating means for separating the light beam reflected from the predetermined area at a position not optically conjugate to the predetermined area, and light quantity detecting means for detecting light quantity of at least one of the light beams separated by said separating means, wherein said measuring means measures the inclination on the basis of a result obtained by the detection of said light quantity detecting means.
Claim 45
Dependent Claim
43 words
An apparatus according to claim 35, further comprising detecting means for detecting a position of said predetermined area substantially along a direction parallel to an optical axis of an optical system of at least one of said illuminating means and said adjusting means.
Claim 46
Dependent Claim
18 words
An apparatus according to claim 36, wherein said detecting means detects the position by using said adjusting means.
Claim 47
Dependent Claim
107 words
A measuring apparatus comprising: illuminating means for illuminating a first area on an object arranged on a plane, said illuminating means illuminating with at least one light beam substantially condensed on the first area; adjusting means for adjusting a distance between a focussing position of the condensed light beam and a second area on the same plane of the object, the center of which is substantially coincident with that of the first area; and measuring means for measuring the inclination of the first area by detecting a position of the light beam reflected from the first area in a plane not optically conjugate to the first area.
Claim 48
Dependent Claim
107 words
A measuring apparatus comprising: illuminating means for illuminating a first area on an object arranged on a plane, said illuminating means illuminating with at least one light beam substantially condensed on the first area; adjusting means for adjusting a distance between a focussing position of the condensed light beam and a second area on the same plane of the object, the center of which is substantially coincident with that of the first area; and measuring means for measuring the inclination of the first area by detecting a position of the light beam reflected from the first area in a plane not optically conjugate to the first area.
Claim 49
Dependent Claim
43 words
An apparatus according to claim 38, further comprising detecting means for detecting a position of said second area substantially along a direction parallel to an optical axis of an optical system of at least one of said illuminating means and said adjusting means.
Claim 50
Dependent Claim
18 words
An apparatus according to claim 39, wherein said detecting means detects the position by using said adjusting means.
Claim 51
Dependent Claim
155 words
A measuring apparatus comprising: illuminating means for illuminating a first area on an object arranged on a plane, said illuminating means illuminating with at least one light beam substantially condensed on the first area; adjusting means for adjusting a distance between a focussing position of the condensed light beam and a second area on the same plane of the object, the center of which is substantially coincident with that of the first area; measuring means for measuring the inclination of the first area, said measuring means having separating means for separating the light beam reflected from the first area at a position not optically conjugate to the first area, and light quantity detecting means for detecting a light quantity of at least one of the light beams separated by said separating means, wherein said measuring means measures the inclination on the basis of a result obtained by the detecting of said light quantity detecting means.
Claim 52
Dependent Claim
155 words
A measuring apparatus comprising: illuminating means for illuminating a first area on an object arranged on a plane, said illuminating means illuminating with at least one light beam substantially condensed on the first area; adjusting means for adjusting a distance between a focussing position of the condensed light beam and a second area on the same plane of the object, the center of which is substantially coincident with that of the first area; measuring means for measuring the inclination of the first area, said measuring means having separating means for separating the light beam reflected from the first area at a position not optically conjugate to the first area, and light quantity detecting means for detecting a light quantity of at least one of the light beams separated by said separating means, wherein said measuring means measures the inclination on the basis of a result obtained by the detecting of said light quantity detecting means.
Claim 53
Dependent Claim
42 words
An apparatus according to claim 41, further comprising detecting means detecting a position of the second area substantially along a direction parallel to an optical axis of an optical system of at least one of said illuminating means and said adjusting means.
Claim 54
Dependent Claim
18 words
An apparatus according to claim 42, wherein said detecting means detects the position by using said adjusting means.
Claim 55
Dependent Claim
86 words
A measuring apparatus comprising: illuminating means for illuminating a predetermined area on an object, said illuminating means illuminating with at least one light beam substantially condensed on the predetermined area; adjusting means for adjusting a distance between a focussing position of the condensed light beam and a plane on which the predetermined area exists; measuring means for measuring inclination of the predetermined area by detecting a position of the light beam reflected from the predetermined area in a plane not optically conjugate to the predetermined area.
Claim 56
Dependent Claim
86 words
A measuring apparatus comprising: illuminating means for illuminating a predetermined area on an object, said illuminating means illuminating with at least one light beam substantially condensed on the predetermined area; adjusting means for adjusting a distance between a focussing position of the condensed light beam and a plane on which the predetermined area exists; measuring means for measuring inclination of the predetermined area by detecting a position of the light beam reflected from the predetermined area in a plane not optically conjugate to the predetermined area.
Claim 57
Dependent Claim
15 words
An apparatus according to claim 44, wherein said adjusting means adjusts said distance to zero.
Claim 58
Dependent Claim
73 words
A measuring method comprising: illuminating a predetermined area on an object with at least one light beam substantially condensed on the predetermined area; adjusting a distance between a focussing position of the condensed light beam and a plane on which the predetermined area exists; measuring inclination of the predetermined area by detecting a position of the light beam reflected from the predetermined area in a plane not optically conjugate to the predetermined area.
Claim 59
Dependent Claim
73 words
A measuring method comprising: illuminating a predetermined area on an object with at least one light beam substantially condensed on the predetermined area; adjusting a distance between a focussing position of the condensed light beam and a plane on which the predetermined area exists; measuring inclination of the predetermined area by detecting a position of the light beam reflected from the predetermined area in a plane not optically conjugate to the predetermined area.
Claim 60
Dependent Claim
120 words
A measuring apparatus comprising: at least one light source; an illuminating optical system for illuminating a predetermined area on an object, said illuminating optical system illuminating with at least a light beam from said light source substantially condensed on the predetermined area; an adjusting mechanism for adjusting a distance between a focussing position of the condensed light beam and a plane on which the predetermined area exists; and at least one sensor for detecting a position of the light beam reflected from the predetermined area in a plane not optically conjugate to the predetermined area, wherein measurement of an inclination of the predetermined area is carried out on the basis of a result obtained by the detection of said sensor.
Claim 61
Dependent Claim
120 words
A measuring apparatus comprising: at least one light source; an illuminating optical system for illuminating a predetermined area on an object, said illuminating optical system illuminating with at least a light beam from said light source substantially condensed on the predetermined area; an adjusting mechanism for adjusting a distance between a focussing position of the condensed light beam and a plane on which the predetermined area exists; and at least one sensor for detecting a position of the light beam reflected from the predetermined area in a plane not optically conjugate to the predetermined area, wherein measurement of an inclination of the predetermined area is carried out on the basis of a result obtained by the detection of said sensor.
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USPTO Annuity & Maintenance Windows
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| 3.5 Years (Year 4) | 1994-07-22 | 1995-01-21 | 1995-07-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-07-22 | 1999-01-21 | 1999-07-23 | $3760.00 | Window Closed / Lapsed |
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