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US5032568A
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Deposition of superconducting thick films by spray inductively coupled plasma method
Assignee: University of Minnesota System
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Filing: 1989-09-01
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Granted: 1991-07-16
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Expires: 2009-09-01
Abstract
Abstract A method is provided to apply a coating of a superconducting ceramic oxide to a substrate comprising introducing an atomized aqueous solution comprising at least three metal salts into inductively coupled plasma so as to deposit a superconductive ceramic oxide on the substrate, or alternatively, to deposit a mixed metal oxide on the substrate, which is converted into a superconductive ceramic oxide by post-annealing.
Inventors
- 👤 Yuk-Chiu Lau
- 👤 Emil Pfender
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 13:55
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/408; C23C16/44; C23C16/50; C23C16/505; C23C16/507; H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0492; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/73; Y10S505/737
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
79 words
A method to apply a superconducting ceramic oxide by employing the techniques of inductively coupled ultrahigh temperature plasma deposition comprising: (a) introducing an atomized aqueous solution containing at least three metal salt precursors into an inductively coupled ultrahigh temperature plasma in relative amounts effective to deposit a coating of a mixed metal oxide on the surface of a heated substrate; and (b) annealing the mixed metal oxide coating in an oxygen atmosphere to yield a superconducting ceramic oxide coating.
Claim 2
Independent Claim
79 words
A method to apply a superconducting ceramic oxide by employing the techniques of inductively coupled ultrahigh temperature plasma deposition comprising: (a) introducing an atomized aqueous solution containing at least three metal salt precursors into an inductively coupled ultrahigh temperature plasma in relative amounts effective to deposit a coating of a mixed metal oxide on the surface of a heated substrate; and (b) annealing the mixed metal oxide coating in an oxygen atmosphere to yield a superconducting ceramic oxide coating.
Claim 3
Dependent Claim
13 words
The method of claim 1 wherein the plasma is an argon thermal plasma.
Claim 4
Dependent Claim
14 words
The method of claim 1 wherein the aqueous solution comprises about 3-5 metal salts.
Claim 5
Dependent Claim
16 words
The method of claim 3 wherein the aqueous solution contains salts of yttrium, barium and copper.
Claim 6
Dependent Claim
17 words
The method of claim 4 wherein the metal molar ratio in the aqueous solution is about 1:2:3.
Claim 7
Dependent Claim
20 words
The method of claim 5 wherein the superconducting mixed metal oxide film comprises YBa 2 Cu 3 O 7-x .
Claim 8
Dependent Claim
13 words
The method of claim 1 wherein the aqueous solution is atomized with oxygen.
Claim 9
Dependent Claim
19 words
The method of claim 1 wherein the substrate is polycrystalline Al 2 O 3 or polycrystalline ZrO 2 .
Claim 10
Dependent Claim
15 words
The method of claim 1 wherein the deposition rate is at least about 10 μm/min.
Claim 11
Independent Claim
74 words
A method to apply a superconducting ceramic oxide by employing the techniques of inductively couple ultrahigh temperature plasma deposition comprising introducing an atomized aqueous solution containing at least three metal salt precursors into an inductively coupled ultrahigh temperature plasma, wherein said salt precursors are present in the necessary relative amounts, and wherein said plasma contains at amount of oxygen, effective to deposit a superconducting ceramic oxide coating on the surface of a heated substrate.
Claim 12
Independent Claim
74 words
A method to apply a superconducting ceramic oxide by employing the techniques of inductively couple ultrahigh temperature plasma deposition comprising introducing an atomized aqueous solution containing at least three metal salt precursors into an inductively coupled ultrahigh temperature plasma, wherein said salt precursors are present in the necessary relative amounts, and wherein said plasma contains at amount of oxygen, effective to deposit a superconducting ceramic oxide coating on the surface of a heated substrate.
Claim 13
Dependent Claim
13 words
The method of claim 10 wherein the plasma is an argon/oxygen thermal plasma.
Claim 14
Dependent Claim
14 words
The method of claim 10 wherein the aqueous solution comprises about 3-5 metal salts.
Claim 15
Dependent Claim
16 words
The method of claim 12 wherein the aqueous solution contains salts of yttrium, barium and copper.
Claim 16
Dependent Claim
17 words
The method of claim 13 wherein the metal molar ratio in the aqueous solution is about 1:2:3.
Claim 17
Dependent Claim
19 words
The method of claim 14 wherein the superconductive ceramic oxide film comprises YBa 2 Cu 3 O 7-x .
Claim 18
Dependent Claim
13 words
The method of claim 10 wherein the aqueous solution is atomized with oxygen.
Claim 19
Dependent Claim
19 words
The method of claim 10 wherein the substrate is polycrystalline Al 2 O 3 or polycrystalline ZrO 2 .
Claim 20
Dependent Claim
15 words
The method of claim 10 wherein the deposition rate is at least about 10 μm/min.
Claim 21
Dependent Claim
15 words
The method of claim 1 wherein the plasma is at a temperature range of 5,000-10,000K.
Claim 22
Dependent Claim
15 words
The method of claim 10 wherein the plasma is at a temperature range of 5,000-10,000K.
References Cited (Backward Citations)
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1994-07-15 | 1995-01-14 | 1995-07-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-07-15 | 1999-01-14 | 1999-07-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-07-15 | 2003-01-14 | 2003-07-16 | $7700.00 | Window Closed / Lapsed |