US5032543A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Coplanar packaging techniques for multichip circuits
Assignee: Massachusetts Institute of Technology
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Filing: 1988-06-17
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Granted: 1991-07-16
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Expires: 2008-06-17
Abstract
Abstract A method for assembling and interconnecting large, high-density circuits from separately fabricated components, where conventional preassembly device testing, and conventional production techniques, can be employed in an uncomplicated process. A plurality of semiconductor chips are applied connection-side down to a temporary soluble substrate and then encapsulated. The temporary soluble substrate is then dissolved, exposing the connection side of the chips, to which electrical connections can then be made.
Inventors
- 👤 Jerry G. Black
- 👤 David K. Astolfi
- 👤 Scott P. Doran
- 👤 Daniel J. Ehrlich
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 20:18
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/01; H10W74/019; H10W40/00; H10W40/70; H10W40/77; H10W40/778
Claims Analysis
Total Claims: 36
Claim 1
Independent Claim
93 words
A method for assembling and interconnecting a plurality of separately fabricated semiconductor chips comprising the steps of: (a) applying a plurality of semiconductor chips, connection-side down, to a soluble substrate; (b) encapsulating the product of step (a) on the side of said substrate to which the semiconductor chips have been applied, (c) dissolving the soluble substrate from the product of step (b) and thereby exposing the connection-sides of the plurality of chips, and (d) applying a pattern of conductive material to the exposed surface to make electrical connections between the plurality of chips.
Claim 2
Independent Claim
93 words
A method for assembling and interconnecting a plurality of separately fabricated semiconductor chips comprising the steps of: (a) applying a plurality of semiconductor chips, connection-side down, to a soluble substrate; (b) encapsulating the product of step (a) on the side of said substrate to which the semiconductor chips have been applied, (c) dissolving the soluble substrate from the product of step (b) and thereby exposing the connection-sides of the plurality of chips, and (d) applying a pattern of conductive material to the exposed surface to make electrical connections between the plurality of chips.
Claim 3
Dependent Claim
17 words
The method of claim 1 wherein said substrate comprises at least a thin film of crystallized salt.
Claim 4
Dependent Claim
10 words
The method of claim 2, where said salt is NaCl.
Claim 5
Dependent Claim
10 words
The method of claim 2, where said salt is KCl.
Claim 6
Dependent Claim
14 words
The method of claim 2, wherein a surface of said crystallized salt is polished.
Claim 7
Dependent Claim
20 words
The method of claim 1, further comprising the step (al) of supplying adhesive between the semiconductor chips and said substrate.
Claim 8
Dependent Claim
18 words
The method of claim 1, further comprising the step (al) of moderately heating the product of step (a).
Claim 9
Dependent Claim
20 words
The method of claim 6, further comprising the step (a2) of removing excess adhesive from the product of step (a1).
Claim 10
Dependent Claim
18 words
The method of claim 6, further comprising the step (a2) of moderately heating the product of step (al).
Claim 11
Dependent Claim
20 words
The method of claim 9, further comprising the step (a3) of removing excess adhesive from the product of step (a2).
Claim 12
Dependent Claim
11 words
The method of claim 10, wherein said adhesive is a polymer.
Claim 13
Dependent Claim
15 words
The method of claim 1, wherein epoxy is employed for the encapsulating of step (b).
Claim 14
Dependent Claim
17 words
The method of claim 12, further comprising the step (b1) of curing the product of step (b).
Claim 15
Dependent Claim
15 words
The method of claim 7, wherein epoxy is employed for the encapsulating of step (b).
Claim 16
Dependent Claim
15 words
The method of claim 10, wherein epoxy is employed for the encapsulating of step (b).
Claim 17
Dependent Claim
31 words
The method of claim 1, wherein step (c) comprises the step (cl) of treating the product of step (b) until the soluble substrate is removed from the product of step (b).
Claim 18
Dependent Claim
31 words
The method of claim 15, wherein step (c) comprises the step (cl) of treating the product of step (b) until the soluble substrate is removed from the product of step (b).
Claim 19
Dependent Claim
19 words
The method of claim 17, wherein said treating comprises bathing the product of step (b) in an aqueous solution.
Claim 20
Dependent Claim
33 words
The method of claim 11, wherein step (c) comprises the step of treating the product of step (b) in a non-aqueous solution until the adhesive is removed from the product of step (b).
Claim 21
Dependent Claim
29 words
The method of claim 10, wherein step (c) comprises the step of treating the product of step (b) until the adhesive is removed from the product of step (b).
Claim 22
Dependent Claim
31 words
The method of claim 16, wherein step (c) further comprises the step (c2) of treating the product of step (cl) until the adhesive is removed from the product of step (cl).
Claim 23
Dependent Claim
31 words
The method of claim 17, wherein step (c) further comprises the step (c2) of treating the product of step (c1) until the adhesive is removed from the product of step (c1).
Claim 24
Dependent Claim
35 words
The method of claim 18, wherein step (c) further comprises the step (c2) of bathing the product of step (c1) in a non-aqueous solution until the adhesive is removed from the product of step (c1).
Claim 25
Dependent Claim
13 words
The method of claim 23, wherein said non-aqueous solution is comprised of acetone.
Claim 26
Dependent Claim
15 words
The method of claim 1, wherein the semiconductor chips comprises at least one micro chip.
Claim 27
Dependent Claim
31 words
The method of claim 1 further comprising a grid waffle having at least one window, wherein at least one of the semiconductor chips is seated in said at least one window.
Claim 28
Dependent Claim
17 words
The method of claim 26, further comprising a heat sink attached to said at least one microchip.
Claim 29
Dependent Claim
27 words
The method of claim 1, further comprising the step (d) of milling the product of step (c) until it has two opposed faces parallel to each other.
Claim 30
Dependent Claim
74 words
A packaging method for multichip circuits comprising the steps of: (1.) applying with an adhesive at least one selected device to a soluble substrate; (2. ) dissolving excess adhesive from the product of step 1, (3.) moderately heating the product of step 2; (4.) encapsulating with encapsulant the product of step 3; (5.) dissolving the soluble substrate from the product of step 4; and (6.) dissolving the adhesive from the product of step 5.
Claim 31
Dependent Claim
74 words
A packaging method for multichip circuits comprising the steps of: (1.) applying with an adhesive at least one selected device to a soluble substrate; (2. ) dissolving excess adhesive from the product of step 1, (3.) moderately heating the product of step 2; (4.) encapsulating with encapsulant the product of step 3; (5.) dissolving the soluble substrate from the product of step 4; and (6.) dissolving the adhesive from the product of step 5.
Claim 32
Dependent Claim
19 words
The method of claim 29, further comprising the step of curing the encapsulant of step 4, before step 5.
Claim 33
Dependent Claim
40 words
The method of claim 29, wherein said at least one device comprised at least one microchip and a grid waffle having at least one window, wherein said at least one micro chip is seated in said at least one window.
Claim 34
Dependent Claim
17 words
The method of claim 31, further comprising a heat sink attached to said at least one microchip.
Claim 35
Dependent Claim
11 words
The method of claim 29, wherein said adhesive is a polymer.
Claim 36
Dependent Claim
10 words
The method of claim 29, wherein said encapsulant is epoxy.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-07-15 | 1995-01-14 | 1995-07-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-07-15 | 1999-01-14 | 1999-07-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-07-15 | 2003-01-14 | 2003-07-16 | $7700.00 | Window Closed / Lapsed |