Patent US2494282A successfully refreshed from Google Patents.
EP0171801A2
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EP
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Method for processing a backside illuminated detector assembly
Assignee: Honeywell Inc
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Filing: 1985-08-14
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Granted: —
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Expires: 2005-08-14
Abstract
Abstract A process for fabricating high performance backside illuminated detectors (10) is described. The process uses a transmissive adhesive (12) such as epoxy on a transmissive substrate (10) to hold the detector material (14) during the fabrication process. After fabrication and connection to a readout device (20), such as a CCD, the substrate (10) and adhesive (12) are removed using an appropriate solvent, leaving the thin detector assembly (14, 16), without extraneous material, mounted directly on the CCD (20). The process may be used for a variety of detector materials (Figures 1A to 1E).
Inventors
- 👤 John W. Marciniec
- 👤 Bruce C. Cochran
- 👤 Martha A. Hartley
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-28 22:26
CPC Classifications
H; H10; H10F; H10F39/00; H10F39/10; H10F39/12; H10F39/15; H10F39/157; H10F39/1575; H10F71/00; H10F71/125; H10F71/1253; H10W; H10W72/00; H10W72/071; H10W72/073; H10W72/07331; H10W72/07337; H10W72/30; H10W72/351; H10W72/353; H10W72/354
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
141 words
A method for processing a backside illuminated detector assembly to be fabricated from a detector substrate having a first surface, characterized by the following steps: a) preparing a substantially transmissive planar substrate (10), said transmissive substrate having substantially parallel first and second surfaces; b) applying a substantially transmissive removable adhesive layer (12) to said first surface of said transmissive substrate; c) affixing said detector substrate (14) to said transmissive substrate by bringing said detector substrate into physical contact with said adhesive layer in a manner to cause adhesion between said transmissive substrate and said detector substrate; d) fabricating detector elements (16) from said detector substrate; e) attaching said detector elements to a detector readout device (20); and f) removing said transmissive substrate (10) and said adhesive layer (12) thereby leaving said detector elements (16) positioned on said detector readout device (20).
Claim 2
Independent Claim
141 words
A method for processing a backside illuminated detector assembly to be fabricated from a detector substrate having a first surface, characterized by the following steps: a) preparing a substantially transmissive planar substrate (10), said transmissive substrate having substantially parallel first and second surfaces; b) applying a substantially transmissive removable adhesive layer (12) to said first surface of said transmissive substrate; c) affixing said detector substrate (14) to said transmissive substrate by bringing said detector substrate into physical contact with said adhesive layer in a manner to cause adhesion between said transmissive substrate and said detector substrate; d) fabricating detector elements (16) from said detector substrate; e) attaching said detector elements to a detector readout device (20); and f) removing said transmissive substrate (10) and said adhesive layer (12) thereby leaving said detector elements (16) positioned on said detector readout device (20).
Claim 3
Dependent Claim
35 words
A method according to claim 1, characterized in that said step of applying causes the removal of trapped gases from said first surface of said transmissive substrate (10) and from said removable adhesive layer (12).
Claim 4
Dependent Claim
34 words
A method according to claim 1, characterized in that said step of applying causes said first surface of said detector substrate (14) and said first surface of transmissive substrate (10) to be substantially parallel.
Claim 5
Dependent Claim
28 words
A method according to claim 1, characterized in that said removable adhesive (12) is insoluble in the solvents used in said step of fabricating said detector elements (16).
Claim 6
Dependent Claim
18 words
A method according to claim 1, characterized in that said substantially transmissive removable adhesive (12) comprises glycol phthalate.
Claim 7
Dependent Claim
26 words
A method according to claim 5, characterized in that said glycol pthalate is applied to said first surface of said transmissive substrate (10) at approximately 70°C.
Claim 8
Independent Claim
45 words
A method according to claims 2 and 5, character- ized in that said removal of trapped gases from said removable adhesive layer (12) and said transmissive substrate (10) is accomplished by heating and out- gassing said transmissive substrate and said adhesive layer at approximately 130°C.
Claim 9
Dependent Claim
20 words
A method according to claim 5, characterized in that said step of removing said transmissive window is accomplished using acetone.
Claim 10
Dependent Claim
124 words
A method according to claim 1, characterized in that said step of affixing comprises the steps of: a) placing said detector substrate (14) on a heat source with said first surface facing away from said heat source; b) placing said transmissive substrate (10) with said adhesive layer (12) on said first surface of said detector substrate (14); c) placing a weighted substantially flat surface on top of said transmissive substrate (10) in order to insure proper adhesion of said transmissive substrate and said detector substrate (14); and d) heating said detector substrate adhesive layer (12) and said transmissive substrate (10) in order to effect partial liquification and adhesion of said adhesive layer (12) to both said transmissive substrate (10) and said detector substrate (14).
Claim 11
Dependent Claim
21 words
A method according to claim 9, characterized in that said step of heating is to approximately 65°C for approximately fifteen minutes.
Claim 12
Dependent Claim
44 words
A method according to claim 1, characterized in that said step of fabricating said detector elements (16) comprises the steps of: a) polishing said detector substrate (14) to a desired final thickness; and b) delineating individual detector arrays (1() from said detector substrate (14).
Claim 13
Dependent Claim
17 words
A method according to claim 1, characterized in that said detector substrate (14) comprises mercury cadmium telluride.
Claim 14
Dependent Claim
17 words
A method according to claim 1, characterized in that said detector substrate (14) comprises a pyroelectric material.
References Cited (Backward Citations)
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