US5032491A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of forming a fine pattern
Assignee: Toshiba Corp
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Filing: 1988-08-22
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Granted: 1991-07-16
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Expires: 2008-08-22
Abstract
Abstract A photoresist is coated on a substrate to form a planar surface, thus to form a recessed portions corresponding to a mask of a pattern to be formed in the photoresist layer having planar surface. SiO 2 etc. are deposited into the recessed portions to prepare a mask, thus to form a fine pattern by anisotropic etching. As a result, by films remaining below the recessed portions formed in the photoresist layer having planar surface, a fine pattern is formed.
Inventors
- 👤 Katsuya Okumura
- 👤 Tohru Watanabe
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 07:23
CPC Classifications
H; H10; H10P; H10P76/00; H10P76/20; H10P50/00; H10P50/20; H10P50/28; H10P50/286; H10P50/287
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
86 words
A method of forming a fine pattern, comprising the steps of: coating a photoresist on a surface on which a pattern is to be formed; forming a plurality of recessed portions defining a predetermined fine pattern at the top surface of said photoresist; depositing a material having an etch rate different from that of said photoresist into said recessed portions, said material being deposited by a liquid phase deposition method; and removing said photoresist with said material deposited within said recessed portions being as a mask.
Claim 2
Independent Claim
86 words
A method of forming a fine pattern, comprising the steps of: coating a photoresist on a surface on which a pattern is to be formed; forming a plurality of recessed portions defining a predetermined fine pattern at the top surface of said photoresist; depositing a material having an etch rate different from that of said photoresist into said recessed portions, said material being deposited by a liquid phase deposition method; and removing said photoresist with said material deposited within said recessed portions being as a mask.
Claim 3
Dependent Claim
46 words
A method of forming a fine pattern as claimed in claim 1, wherein said coating step comprises sufficiently thickly coating said photoresist so that the surface of said photoresist becomes planar even if said surface on which a pattern is to be formed has an offset.
Claim 4
Dependent Claim
45 words
A method of forming a fine pattern as claimed in claim 1, wherein said depositing step comprises depositing said material on the entire surface of said photoresist, thereafter to apply etch back to said material, thus allowing said material to remain within said recessed portions.
Claim 5
Dependent Claim
44 words
A method of forming a fine pattern as claimed in claim 3, wherein a second photoresist is formed on said deposited material, thereafter to apply etch back to said second photoresist and said material, thus allowing said material to remain within said recessed portions.
Claim 6
Dependent Claim
35 words
A method as claimed in claim 1, wherein said material is deposited at the top surface of said photoresist by immersing said surface into an immersion liquid of an acid saturated with SiO 2 .
Claim 7
Dependent Claim
34 words
A method as claimed in claim 1, wherein said material is deposited at the top surface of said photoresist by immersing said surface into an immersion liquid of an acid saturated with a metal.
References Cited (Backward Citations)
JPS58132927A
Cited
JPS5976428A
Cited
JPS59163829A
Cited
EP0150597A1
Cited
EP0151948A2
Cited
US4599137A
Cited
US4634645A
Cited
JPS6154629A
Cited
US4707218A
Cited
EP0265638A2
Cited
US4732658A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-07-15 | 1995-01-14 | 1995-07-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-07-15 | 1999-01-14 | 1999-07-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-07-15 | 2003-01-14 | 2003-07-16 | $7700.00 | Window Closed / Lapsed |