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US5029175A Expired / Lapsed US ⏱️ 0.0 years remaining

Semiconductor laser

Assignee: Panasonic Holdings Corp
•
Filing: 1989-11-17
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Granted: 1991-07-02
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Expires: 2009-11-17
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Abstract

Abstract In a semiconductor laser, an AlGaInP cladding layer of one conductive type, an active layer, and an AlGaInP cladding layer of other conductive type greater in thickness in stripes are formed on a GaAs substrate, and an insulating film, AlGaInP or amorphous layer smaller in refractive index than the AlGaInP cladding layer are formed at both sides of the stripes, wherein the light can be confined and guided also in the direction parallel to the active layer, and the light can be index-guided both in the direction parallel to the active layer and in the direction vertical thereto, so that a laser having an extremely smaller astigmatism may be presented. In addition, the current blocking layer disposed at the outer side of the insulating film, AlGaInP or amorphous layer is high in thermal conductivity, and the heat generated in the vicinity of the active layer may be efficiently released.

Inventors

  • 👤 Kiyoshi Ohnaka
  • 👤 Mototsugu Ogura

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-08 11:22
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/20; H01S5/22; H01S5/227; H01S5/223; H01S5/2231; H01S5/2205; H01S5/2206; H01S5/2209; H01S5/221; H01S5/2211; H01S5/2214; H01S5/2216; H01S5/2275; H01S5/30; H01S5/32; H01S5/323; H01S5/32308; H01S5/32325

Claims Analysis

Total Claims: 19
Claim 1
Independent Claim 92 words
In a semiconductor laser, an AlGaInP cladding layer of one conductive type, an active layer, and an AlGaInP cladding layer of other conductive type greater in thickness in stripes are formed on a GaAs substrate, an insulation layer lower in refractive index than the AlGaInP cladding layer of other conductive type is formed in a pair of stripes on the surface of the AlGaInP cladding layer of other conductive type at both sides of the stripes, and a current blocking layer of one conductive type is formed at the outer side thereof.
Claim 2
Dependent Claim 92 words
In a semiconductor laser, an AlGaInP cladding layer of one conductive type, an active layer, and an AlGaInP cladding layer of other conductive type greater in thickness in stripes are formed on a GaAs substrate, an insulation layer lower in refractive index than the AlGaInP cladding layer of other conductive type is formed in a pair of stripes on the surface of the AlGaInP cladding layer of other conductive type at both sides of the stripes, and a current blocking layer of one conductive type is formed at the outer side thereof.
Claim 3
Dependent Claim 99 words
In a semiconductor laser, an AlGaInP cladding layer of one conductive type, an active layer, and an AlGaInP cladding layer of other conductive type with a dovetail-shaped mesa section greater in thickness in stripes formed in the <011> direction are formed on a GaAs substrate having (100) as the principal plane, an insulation layer lower in refractive index than the AlGaInP cladding layer of other conductive type is formed on the dovetail-shaped mesa surface of the AlGaInP cladding layer of other conductive type, and a current blocking layer of one conductive type is formed at the outer side thereof.
Claim 4
Dependent Claim 99 words
In a semiconductor laser, an AlGaInP cladding layer of one conductive type, an active layer, and an AlGaInP cladding layer of other conductive type with a dovetail-shaped mesa section greater in thickness in stripes formed in the <011> direction are formed on a GaAs substrate having (100) as the principal plane, an insulation layer lower in refractive index than the AlGaInP cladding layer of other conductive type is formed on the dovetail-shaped mesa surface of the AlGaInP cladding layer of other conductive type, and a current blocking layer of one conductive type is formed at the outer side thereof.
Claim 5
Dependent Claim 132 words
In a semiconductor laser, an AlGaInP cladding layer of one conductive type, an active layer, and an AlGaInP cladding layer of other conductive type greater in thickness in stripes are formed on a GaAs substrate, an insulation layer lower in refractive index than the AlGaInP cladding layer of other conductive type is formed in a pair of stripes on the surface at both sides of the stripes of the AlGaInP cladding layer of other conductive type in a region in the vicinity of the output facet of laser light, and a current blocking layer of one conductive type is formed on the outer side thereof and on the surface of both sides of the stripes of the AlGaInP cladding layer of other conductive type in the region free from the insulation layer.
Claim 6
Dependent Claim 132 words
In a semiconductor laser, an AlGaInP cladding layer of one conductive type, an active layer, and an AlGaInP cladding layer of other conductive type greater in thickness in stripes are formed on a GaAs substrate, an insulation layer lower in refractive index than the AlGaInP cladding layer of other conductive type is formed in a pair of stripes on the surface at both sides of the stripes of the AlGaInP cladding layer of other conductive type in a region in the vicinity of the output facet of laser light, and a current blocking layer of one conductive type is formed on the outer side thereof and on the surface of both sides of the stripes of the AlGaInP cladding layer of other conductive type in the region free from the insulation layer.
Claim 7
Dependent Claim 30 words
In a semiconductor laser according to any one of claims 1 to 3, a contact layer of other conductive type is formed on an insulating layer low in refractive index.
Claim 8
Dependent Claim 94 words
In a semiconductor laser, an AlGaInP cladding layer of one conductive type, an active layer, and an AlGaInP cladding layer of other conductive type greater in thickness in stripes are formed on a GaAs substrate, an AlGaInP or AlInP layer lower in refractive index than the AlGaInP cladding layer of other conductive type is formed in a pair of stripes on the surface of the AlGaInP cladding layer of other conductive type on both sides of the stripes, and a current blocking layer of one conductive type is formed on the outer side thereof.
Claim 9
Dependent Claim 94 words
In a semiconductor laser, an AlGaInP cladding layer of one conductive type, an active layer, and an AlGaInP cladding layer of other conductive type greater in thickness in stripes are formed on a GaAs substrate, an AlGaInP or AlInP layer lower in refractive index than the AlGaInP cladding layer of other conductive type is formed in a pair of stripes on the surface of the AlGaInP cladding layer of other conductive type on both sides of the stripes, and a current blocking layer of one conductive type is formed on the outer side thereof.
Claim 10
Dependent Claim 101 words
In a semiconductor laser, an AlGaInP cladding layer of one conductive type, an active layer, and an AlGaInP cladding layer of other conductive layer with a dovetial-shaped mesa section greater in thickness in stripes formed in the <011> direction are formed on a GaAs substrate having (100) as the principal plane, an AlGaInP or AlInP layer lower in refractive index than the AlGaInP cladding layer of other conductive type is formed on the dovetail-shaped mesa surface of the AlGaInP cladding layer of other conductive layer, and a current blocking layer of one conductive type is formed on the outer side thereof.
Claim 11
Dependent Claim 101 words
In a semiconductor laser, an AlGaInP cladding layer of one conductive type, an active layer, and an AlGaInP cladding layer of other conductive layer with a dovetial-shaped mesa section greater in thickness in stripes formed in the <011> direction are formed on a GaAs substrate having (100) as the principal plane, an AlGaInP or AlInP layer lower in refractive index than the AlGaInP cladding layer of other conductive type is formed on the dovetail-shaped mesa surface of the AlGaInP cladding layer of other conductive layer, and a current blocking layer of one conductive type is formed on the outer side thereof.
Claim 12
Dependent Claim 140 words
In a semiconductor laser, an AlGaInP cladding layer of one conductive type, an active layer, and an AlGaInP cladding layer of other conductive type greater in thickness in stripes are formed on a GaAs substrate, an AlGaInP or AlInP layer lower in refractive index than the AlGaInP cladding layer of other conductive type is formed in a pair of stripes on the surface at both sides of the stripes of the AlGaInP cladding layer of other conductive type in the region in the vicinity of the output facet of laser light, and a current blocking layer of one conductive type is formed on the outer side thereof and on the surface at both sides of the stripes of the AlGaInP cladding layer of other conductive type in the region free from the AlGaInP or AlInP layer lower in refractive index.
Claim 13
Dependent Claim 140 words
In a semiconductor laser, an AlGaInP cladding layer of one conductive type, an active layer, and an AlGaInP cladding layer of other conductive type greater in thickness in stripes are formed on a GaAs substrate, an AlGaInP or AlInP layer lower in refractive index than the AlGaInP cladding layer of other conductive type is formed in a pair of stripes on the surface at both sides of the stripes of the AlGaInP cladding layer of other conductive type in the region in the vicinity of the output facet of laser light, and a current blocking layer of one conductive type is formed on the outer side thereof and on the surface at both sides of the stripes of the AlGaInP cladding layer of other conductive type in the region free from the AlGaInP or AlInP layer lower in refractive index.
Claim 14
Dependent Claim 31 words
In a semiconductor laser according to any one of claims 5 to 7, the conductive type of the AlGaInP or AlInP layer low in refractive index is the other conductive type.
Claim 15
Dependent Claim 36 words
In a semiconductor laser according to any one of claims 5 to 7, a contact layer of other conductive layer is formed on the AlGaInP or AlInP layer of other conductive type low in refractive index.
Claim 16
Dependent Claim 82 words
In a semiconductor laser, an AlGaInP cladding layer of one conductive type, an active layer, an AlGaInP cladding layer of other conductive type, and a contact layer of other contact layer are formed in stripes on a GaAs substrate, and an AlGaInP cladding layer of other conductive type and an amorphous layer lower in refractive index than the AlGaInP cladding layer of one conductive type and the AlGaInP cladding layer of other conductive type are formed at both sides of the stripes.
Claim 17
Dependent Claim 82 words
In a semiconductor laser, an AlGaInP cladding layer of one conductive type, an active layer, an AlGaInP cladding layer of other conductive type, and a contact layer of other contact layer are formed in stripes on a GaAs substrate, and an AlGaInP cladding layer of other conductive type and an amorphous layer lower in refractive index than the AlGaInP cladding layer of one conductive type and the AlGaInP cladding layer of other conductive type are formed at both sides of the stripes.
Claim 18
Dependent Claim 28 words
In a semiconductor laser according to claim 10, a mixture of amorphous Si and amorphous Si 3 N 4 or SiO 2 is used as the amorphous layer.
Claim 19
Dependent Claim 53 words
In a semiconductor laser according to claims 10 or 11, a diffusion layer of other conductive type is formed on the surface of the strip-shaped AlGaInP cladding layer of one conductive type, active layer, AlGaInP cladding layer of other conductive type and contact layer of other conductive type formed on the GaAs substrate.

References Cited (Backward Citations)

JPS5882589A Cited
US4602371A Cited
JPS61176181A Cited
JPS6215876A Cited
JPS62200785A Cited
US4792958A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-07-01 1994-12-31 1995-07-02 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-07-01 1998-12-31 1999-07-02 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-07-01 2002-12-31 2003-07-02 $7700.00 Window Closed / Lapsed

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